Advanced Energy Industries AMN PS-2A Manuale utente

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MANUAL

Fort Collins, CO 80525 USA

970.221.4670

[email protected]

1625 Sharp Point Drive

Advanced Energy Industries,Inc.

AMN PS-2A

Automatic Matching Network

Power Supply Controller

5708577-A

April 17, 2002

User Manual

AMN PS-2A

Automatic Matching Network Power Supply

Controller

5708577-A

iv 5708577-A

Advanced Energy®

This manual and the information contained herein is the property of Advanced Energy

Industries, Inc.

No part of this manual may be reproduced or copied without the express written

permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual

DISCLAIMER AND LIMITATION OF LIABILITY

The information contained in this manual is subject to change by Advanced Energy

Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no

warranty of any kind whatsoever, either expressed or implied, with respect to the

information contained herein. Advanced Energy Industries, Inc. shall not be liable in

damages, of whatever kind, as a result of the reliance on or use of the information

contained herein.

PRODUCT USAGE STATEMENT

Read this entire manual and all other publications pertaining to the work to be

performed before you install, operate, or maintain this equipment. Practice all plant

and product safety instructions and precautions. Failure to follow instructions can

cause personal injury and/or property damage. All personnel who work with or who

are exposed to this equipment must take precautions to protect themselves against

serious or possibly fatal bodily injury.

Advanced Energy Industries, Inc., (AE) provides information on its products and

associated hazards, but it assumes no responsibility for the after-sale operation of

the equipment or the safety practices of the owner or user. This equipment produces

or uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.

NEVER DEFEAT INTERLOCKS OR GROUNDS.

5708577-A v

AMN PS-2A

TRADEMARKS

is a registered trademark of Advanced Energy Industries, Inc.

Advanced Energy is a registered trademark of Advanced Energy Industries, Inc.

AE is a registered trademark of Advanced Energy Industries, Inc.

vi 5708577-A

Advanced Energy®

5708577-A vii

AMN PS-2A

Chapter 1. Introduction

Read This Section! . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Interpreting the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Type Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Icons (Symbols) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Product Safety/Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Directives and Standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Conditions of Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Chapter 2. Theory

General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Chapter 3. Specifications

Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Environmental Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Chapter 4. Controls, Indicators, and Interfaces

Remote Interface Connector (J2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Remote Interface Connector (J2) Electrical Characteristics . . . . . . . . . . . . . . 4-1

Interface Cabling Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Remote Interface Connector (J2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Matching Network Interface Connector (J1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Matching Network Interface Connector (J1) Electrical Characteristics . . . . . . 4-4

Interface Cabling Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Matching Network Interface Connector (J1) . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Phase (J3) and Magnitude (J4) Error Voltage Input Ports . . . . . . . . . . . . . . . . . . . 4-6

Phase Error Voltage Input Port (J3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Magnitude Error Voltage Input Port (J4) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Phase/Magnitude Gain Adjustors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

Front Panel Switches and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Rear View Illustration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Table of Contents

viii 5708577-A

Advanced Energy®

Chapter 5. Installation, Setup, and Operation

Installing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Spacing Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Dimensional Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Mounting the Controller and Making Connections . . . . . . . . . . . . . . . . . . . . . 5-3

Electrical Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Automatic Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Manual Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Remote Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Chapter 6. Troubleshooting and Global Support

Before Calling AE Global Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

Troubleshooting With the Power Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

Troubleshooting With the Power On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

Troubleshooting Flow Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

AE Global Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Returning Units for Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Authorized Returns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Warranty Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

5708577-A ix

AMN PS-2A

Theory of Operation Block Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Wiring for 115 Vac transformer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Wiring for 230 Vac Transformer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Remote Interface Connector (J2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Matching Network Interface Connector (J1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Phase Error Voltage Input Port (J3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Magnitude Error Voltage Input Port (J4) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Phase and Magnitude Gain Adjustments on Rear Panel . . . . . . . . . . . . . . . . . . . . . . . 4-7

AMN PS-2A Controller Front Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9

Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Matching Network Interface Connector (J1) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Remote Interface Connector (J2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

BNC-Type Connector (J3 and J4) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

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