Aerotech ABL9000 Series Manuale utente

ABL/ABLH9000 Series Stage

User’s Manual

P/N: EDS104 (Revision 1.01.00)

Dedicated to the Science of Motion

Aerotech, Inc.

101 Zeta Drive,

Pittsburgh, PA, 15238

Phone: 412-963-7470

Fax: 412-963-7459

www.aerotech.com

Product Registration Register online at: http://www.-

aerotech.com/prodreg.cfm

Technical Support United States Headquarters:

Phone: (412) 967-6440

Fax: (412) 967-6870

Email: service@aerotech.com

United Kingdom:

Phone: +44 118 940 9400

Fax: +44 118 940 9401

Email: service@aerotech.co.uk

Germany:

Phone: +49 911 967 9370

Fax: +49 911 967 93720

Email: service@aerotechgmbh.de

Japan:

Phone: +81(0)47-489-1741 (Sales)

Phone: +81(0)47-489-1742 (Service)

Fax: +81(0)47-489-1743

Email: service@aerotechkk.com.jp

China:

Phone: +852-3793-3488

Email: saleschina@aerotech.com

Revision History Revision 1.01.00 February 28, 2011

Revision 1.00.00 February 9, 2006

Product names mentioned herein are used for identification purposes only and may be trademarks of

their respective companies.

ABL/ABLH9000 Series Stage User's Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures v
List of Tables vii
Chapter 1: Overview 1
1.1. Standard Features 2
1.1.1. Optional Features 3
1.2. Safety Procedures and Warnings 4
1.3. EC Declaration of Incorporation 6
Chapter 2: Installation 7
2.1. Unpacking and Handling the Stage 7
2.2. Preparing the Mounting Surface 8
2.3. Securing the Stage to the Mounting Surface 8
2.4. Attaching the Payload to the Stage 9
2.5. Electrical Installation 9
2.6. Air Requirements 9
Chapter 3: Operating Specifications 11
3.1. Environmental Specifications 11
3.2. Basic Specifications 12
3.3. Load Capability [TBD] 16
3.4. Limit Switch Wiring 16
3.4.1. Limit Switch Operation 16
3.4.2. Limit Switch Wiring 16
3.5. Standard Motor Wiring 17
3.6. Vacuum Operation 17
Chapter 4: Maintenance 19
4.1. Service and Inspection Schedule 19
4.2. Cleaning and Lubrication 19
4.2.1. Recommended Cleaning Solvents 19
4.2.2. Cleaning Process 20
Appendix A: Warranty and Field Service 21
Appendix B: Technical Changes 23
Index 25
Reader's Comments 27
www.aerotech.com iii

Table of Contents ABL/ABLH9000 Series Stage User's Manual

iv www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual List Of Figures
List of Figures
Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage 1
Figure 1-2: ABL/ABLH9000 Series Stage 2
Figure 3-1: Velocity vs. resolution as a function of system data rate (ABL/ABLH9000 with LTAS or
LNAS encoder)
14
Figure 3-2: Normally Closed (NC) and Normally Open (NO) Limit Switch Wiring 16
Figure 4-1: Air Bearing Surfaces and Encoder Scales Require Periodic Cleaning 20
www.aerotech.com v

List of Figures ABL/ABLH9000 Series Stage User's Manual

vi www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual List of Tables
List of Tables
Table 1-1: Model Numbers and Ordering Options 3
Table 3-1: Environmental Specifications 11
Table 3-2: ABL/ABLH9000 Series Specifications 12
Table 3-3: ABL/ABLH9000 Series Resolution Information 14
Table 3-4: ABL/ABLH9000 Motor Specifications 15
Table 4-1: Recommended Cleaning Solvents 19
Table B-1: Current Changes (1.01.00) 23
Table B-2: Archived Changes 24
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List of Tables ABL/ABLH9000 Series Stage User's Manual

viii www.aerotech.com

ABL/ABLH9000 Series Stage User's Manual Overview

Chapter 1: Overview

This manual describes Aerotech’s ABL/ABLH9000 series of air bearing positioning stages. Figure 1-1 shows

a typical ABL9000 positioning stage.

The ABL/ABLH9000 series supports travel distances ranging up to 1m x 1m. Designed to meet the exacting

requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL/ABLH9000 sets new

standards of performance.

This chapter introduces standard and optional features of the ABL/ABLH9000 stages and gives general

safety precautions.

Figure 1-1: Typical ABL/ABLH9000 Series Positioning Stage

N O T E : Aerotech continually improves its product offerings, and listed options may be superseded at any

time. Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current

product information at www.aerotech.com.

www.aerotech.com Chapter 1 1

Overview ABL/ABLH9000 Series Stage User's Manual

1.1. Standard Features

The ABL/ABLH9000 series stages all incorporate completely non-contact air bearing surfaces, linear

motors, and feedback devices to provide a maintenance free stage. There is no mechanical contact to wear

or require lubrication, making these stages ideal for clean room and medical applications.

The ABL/ABLH9000 incorporates an active preload on both vertical and horizontal surfaces. The opposing

thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bear-

ing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness

that is ideal for heavy or offset loading.

The brushless linear motor uses an ironless forcer, which means there is zero cogging and no attractive

forces – resulting in unsurpassed smoothness of motion. This is especially useful in applications where

velocity control is important.

Figure 1-2: ABL/ABLH9000 Series Stage

2 Chapter 1 www.aerotech.com

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