Arun Microelectronics LTD NGC2D Manuale utente

Pressure Gauge Controller - Model NGC2D

USER MANUAL

ISSUE 2.5

For use with program version 6.1.x

Section Page

1 Introduction ……………….……………………………………………………………………………….............. 2

1.1 Scope of this manual ……………………………….…………………………………………….………………………………………………………. 2

2 Technical Data ………………………………………………………………………………………………………………. 2

3 Warnings & Safety ………………………………………………………………………………………………………. 4

4 Installation …………………………………………………………………………………….……………………………. 4

4.1 Instrument …………………………………………………………………………………………….………………………………………………………. 4

4.2 Ion Gauge ……………………………………………………………………………………………..……………….............................. 6

5 Front Panel …………………………………………………………………………………………………………………. 7

6 Setup ………………………………………….………………………………………………………………………………. 8

6.1 Switching On …………………………………………………………………………………………………………………………………………………. 8

6.2 Setup …………………………………………………………………………………………………………………….………………………………………. 8

Passwords / Units ………………………………………………………………………………………………………………………………………. 8

Interlock / Autostart …………………………………………………………………………………………………………………………………. 9

Gauges ……………………………………………………………………………………………………………………………………………………….. 9

Relays …………………………………………………………………………………………………………………………………………………………. 10

Bake ………………………………………………………………………………………………………………...……………………………………….. 10

TSP …………………………………………………………………………………………………………...………………………………………………… 11

Degas ………………………………………………………………………………………………………………………………………………………….. 11

7 Operation ……………………………………………………..………………………………….……………………….. 12

7.1 Function switch in Operation ………………………………………………………………………………………………………………………. 12

7.2 Relay Trip Levels ………………………………………………………………………………………………………………………………………….. 12

7.3 Display Sequence ………………………………………………………………………………………………………………………………………….. 13

Pirani …………………………………………………………………………………………………………………………………………………………. 13

Leak Detector ……………………………………………………………………………………………………………………………………………. 13

Ion Gauge Sensitivity …………………………………………………………………………………………………………………………………. 13

Temperature ………………………………………………………………………………………….…………………………………………………. 13

Capacitance Manometer ……………………………………………………………………...………………………………………………….. 13

8 Ion Gauge Operation ………………………………………………………………………………………………….. 14

8.1 Display Sequence in Emission …….…………………………………………………………………………………………………………………. 14

Starting the Ion Gauges ………………………………………………………………………………………………………………………………. 14

Emission Change …………………………………………………………………………………………………………………………………………. 14

8.2 Changing Emission Current ……………………………………………………………………………………………………………………………. 15

8.3 Prompted Emission Change …………………………………………………………………………………………………………………………… 15

9 Degas ……………………………………………..………………………………………………………………………….. 15

Manual ……………………………………………………………………………………………………………………………………………………….…. 16

Programmed …………………………………………………………………………………………………………………………………………………. 16

Quick …………………………………………………………………………………………………………………………………………………………….. 16

10 Bake ……………………..…………………………………………………………………………………………………….. 17

11 Capacitance Manometer ……………………………………………………………………………………………. 18

12 Recorder Output ……………………………………………………………………………………………………….. 18

13 External Inhibit ………………………………………………………………………………………………………….. 18

14 Windows Software ……………………………………………………………………………………………………….. 18

15 Remote Operation ……………………………………………………………………………………………………… 19

16 Troubleshooting ………………………………………………………………………………………………………… 22

15.1 Fan slow / failed …………………….……………………………………….……………………………………………………………………………. 22

15.2 Temperature ……………………………………………..…………………….……………………………………………………………………………. 22

15.3 Emission Fault ………………………………………..……………………….……………………………………………………………………………. 22

15.4 IG Fil O/C ………………………….…………………………………………….……………………………………………………………………………. 22

15.5 Password Forgotten? ………………………….…………………………….……………………………………………………………………………. 22

15.6 Ion Gauge Connections …………………………………………………….……………………………………………………………………………. 23

17 Assistance …………………………………………………………………………………………………………………… 23

Appendix A

Gauge Principals …………………………………………………………………………………………………………………………………………… 24

1 Introduction

The NGC2D process controller is a high-accuracy Bayard-Alpert (BA) ion gauge controller that offers integrated

pressure measurement and process control. The controller operates from electrical supply voltages in the

range 100 to 240 volts and frequencies of 48 or 65 Hertz.

The controller may be used with UHV ion gauges incorporating tungsten or coated iridium filaments. The

controller can operate two ion gauges sequentially, two AML Pirani gauges and one capacitance manometer.

Four power relays for process control are provided as is an internal thermocouple amplifier for bakeout

control. Automatic control of a titanium sublimation pump controller is also featured.

1.1 Scope of this manual

This manual provides installation, operation and maintenance instructions for the Arun Microelectronics Ltd

Ion Gauge Controller model NGC2D. Please read this manual before attempting to install and operate the

controller.

This manual contains essential safety information which supplements the safety features of the controller.

Safety procedures are highlighted as WARNING instructions by the symbol below. Failure to observe the

instructions could result in injury or death to persons.

2 Technical data

2.1 Mechanical Data

Dimensions 19” full-width rack

Height: 1U.

Depth: 270mm, excluding connectors

Weight 2.7kg

2.2 Electrical Supply

Supply Voltage 100 to 240 Volts nominal at 48 to 65 Hertz, auto adjusting

Power Consumption Less than 20 Watts idling

Less than 75 Watts in emission

Fuse 2.0 A (T), 5x20mm

Supply socket IEC 320-C14

2.3 Environment

Operating temperature 5°to 35°C for specified performance

Operation is inhibited at greater than 40°C

Storage temperature -10°C to 70°C

Relative Humidity (non condensing) 10% to 90%

Maximum operating altitude 2000 m

Pollution category – EN61010 1

2.4 Electrometer

Logarithmic conformance

2.5 Ion Gauge

Suitable type UHV Bayard-Alpert gauges

Range 1x10

-3 to below 3 x 10 -11 mbar. Dependant on gauge-head

Grid +200 V d.c. (+500 V at 60mA in Degas)

Filament Tungsten: ≤12 V at ≤4.2 A

Coated iridium: ≤12 V at ≤2.6 A

Filament power limited to > 30 Watts

Filament bias: +50 V

Collector 0 V (virtual earth)

Emission current Soft-start emission control at 0.5mA or 5mA

Sensitivity adjustment 1 mbar

-1 to 140 mbar -1

2.6 Pirani Gauge

Suitable type Constant-voltage, half bridge. Calibration at connector

Range 1x10-3 mbar to 200mbar

2.7 Capacitance manometer

Suitable type Self-powered with +10 V full-scale output.

1, 10, 100 or 1000 mbar or Torr

2.8 Process trips

Relays Four x single pole, change-over. 5 A at 240 V maximum

Assignment Independently assignable to any gauge

2.9 Bake-out

Thermocouple type Mineral-insulated K-type with miniature flat-pin connector

Programme Settable bake temperature (50-250°C), bake time (1Hr to

90Hrs) and overpressure limit

2.10 Communications

Interface RS232C

Settings 1200, 2400, 4800 or 9600 (Default) baud,

8 data bits, 1 stop bit, no parity, no handshaking

Range 21°C +5°C to +35°C

1mA to 350pA <1% <1%

<350pA to 10pA <1% <4%

<10pA to 2pA <10% <20%

3 Warnings and safety

WARNING – Safe operation of ion gauges requires grounding of all exposed

conductors of the vacuum system, gauges and controller. LETHAL VOLTAGES

may be established under some operating conditions unless correct grounding

is provided. All exposed and isolated metal parts should therefore be reliably

grounded to a common system earth point via 4mm2or thicker copper

wire/braid, the integrity of which should be checked regularly. No ferrite

components should be installed.

High voltages are present within the instrument when operating and for some seconds after

switching off. Remove the mains lead before removing the cover for any reason.

Ensure that maintenance is carried out only by suitably trained personnel.

Instruments are shipped with password protection disabled. If you set a password you must record what it is.

Password usage restricts access to most functions of the instrument, other than pressure measurement.

The conditions set at manufacture assume that you do not require any interlocks and that the ion gauge has

a Tungsten filament. You may fuse coated Ion Gauge filaments if you do not set up the instrument

appropriately.

Allow several minutes for Pirani gauges to reach operating temperature after switching on before using them

for interlock, autostart or process control.

Two fans are used sequentially for cooling. Orange Status LEDs on the front panel indicate which fan is being

used. If a fan fails a message is displayed at the time of failure and the LED for that fan flashes thereafter.

Operation with only one fan is permissible but replace a failed fan as soon as possible. If the remaining fan

fails, operation of the ion gauge will be disabled. Replacement fans must conform to the specification printed

on the rear panel and are available from AML.

Discharges from X-ray power supplies and other high-voltage and high-energy sources (which are commonly

used in vacuum systems) into the Ion Gauge may damage the instrument. Such damage is not covered by the

warranty. Discharge damage will be minimised by decreasing the impedance of the strap/cable from the

earth stud on the instrument to the vacuum system earth distribution point. This connection may also be

essential for operator safety: follow the safety instructions and recommendations of the supplier of any high-

voltage equipment used in the vacuum system.

4 Installation

Checks on receipt of the instrument

On receipt of the instrument remove all packing material and check that all items on the shipping list have

been received. Report any damage or shortages to the Company or the Distributor who supplied the

instrument. The packing material has been specially designed to protect the instrument and should be

retained for possible future use.

4.1 Instrument installation

Mounting

The instrument is suitable for mounting in a standard 19" rack and occupies 1U (1.75”, 44.5mm) of the rack.

The mounting holes in the front panel are intended for retaining the instrument in the rack and will not

support its weight. Additional support is required toward the rear and various arrangements are provided by

rack manufacturers for this purpose.

Page 5

Ventilation

The instrument is forced-air ventilated through grilles on the sides and a vent in the rear panel. Mount it in a

location where there is an adequate supply of air as close as possible to cool room-ambient temperature.

The instrument is tolerant of, and is compensated for, operation at elevated ambient temperatures up to 40°

Celsius. Long-term accuracy and reliability will be enhanced by operation at the lowest possible temperature.

If there are other instruments in the rack which generate significant amounts of waste heat, try to ensure

that this is deflected away from this instrument.

Line Power Connection

The NGC2D operates from a 100V to 240V nominal AC power source having a line frequency of 48 to 65 Hz.

Use a three-wire power cord to connect to a properly grounded wall outlet.

Line Fuse

There is a line fuse located on the inside of the instrument on the rear of the power inlet connector. A spare

fuse is located in a replacement fuse holder on the circuit board. Replacement fuses must be T2.0A. High

voltages are present within the instrument when operating and for some seconds after switching off. Remove

the mains lead before removing the cover for any reason.

Grounding

The instrument earth stud must be connected directly to the vacuum system

earth distribution point with a low-impedance strap/cable (>=4mm2or 12awg):

there must be no ferrite components installed on it.

Ion Gauge 1 & 2

Use AML-approved gauges with properly-screened leads. The ground braid of the ion gauge cable must be

connected to the instrument ground stud.

Ion gauge leads should not be installed close to cables carrying high

alternating currents or through areas where there are significant

alternating magnetic fields. They should be constrained, since

movement or vibration will generate charges or currents and these may

disturb UHV pressure readings.

Third-party ion gauge cables may not allow compliance with EU EMC

Directives and may lead to unstable emission. As a minimum there must

be an overall screen on the lead and an inner screen on the collector

connected to the BNC shell. These screens must not connect either to

the vacuum chamber or to each other. Interlock pins 1 & 3 must be

connected together.

Pirani 1 & 2

AML Pirani gauges PVU or PVB are suitable for use with this instrument. Pirani 1 pressure is used for Ion Gauge

1 Interlock and Autostart functions and should be installed in the same chamber as the Ion Gauge. Pirani 2

is normally used for backing-line pressure measurement.

Ion Gauge Connector Pin Allocations

Pin Function

1 Interlock

2 Grid

3 Interlock

4 Filament Common

5 Filament 1

6 Filament 2

Relays

Four single pole, change-over relays are provided for process control and can be independently assigned to

any gauge. Contacts are rated at 5A, 240V maximum. The contacts of the relays are shown diagrammatically

on the rear panel legend, in the de-energised condition, adjacent to the terminal blocks to which they are

connected.

Inductive loads, including contactor coils, should have "snubber" networks connected in parallel to avoid arc

generation which could interfere with the operation of this and other equipment. The external wiring is

connected to the instrument through a two-part pluggable terminal block. This can be removed and wired

independently of the instrument. Ensure that external wiring is of adequate cross section for the load current.

Strip and twist the wires (do not tin them) and poke into the receptacle in the terminal block. Close the leaf

on the wire by tightening the screw immediately above. Take appropriate action to strain-relieve the wiring

nearby and to restrict access to the terminals if harmful voltages are to be present. Fit the terminal block

cover supplied.

If the Bake function is to be used then relay D must be assigned to Bake. It is used to switch on the Bake

heaters when energised. Do not connect heaters directly to relay D: use a contactor and fit a snubber directly

across its coil. The pressure measurement during the bake cycle is read from Ion Gauge 1 only.

If the TSP function is to be used then relay C must be assigned to TSP. Relay C is energised for 0.5 seconds

to fire the TSP. Consult the TSP manual for further information. The pressure measurement for TSP control

is read from Ion Gauge 1 only.

Bake Thermocouple

The K thermocouple tip must be isolated from the vacuum chamber and situated where it accurately

represents the bake temperature. Mineral-insulated thermocouples with a miniature flat-pin thermocouple

connector should be used.

Auxiliary Connector

The Auxiliary (AUX) connector terminal block is plug-in with pin assignments indicated on the rear panel

legend. The Capacitance Manometer output is connected to CM and 0V (Refer to section 12). The recorder is

connected between REC and 0V (Refer to section 13). Connecting ILOCK to 0V will prevent ion gauge emission

(Refer to section 14).

Serial Connector

The serial interface is RS232-compatible and only one instrument may

be connected to each computer serial port. (A USB to RS232 serial

adaptor may be required)

The connector is a 9 way “D” type female connector. The pin numbering

has been chosen so that a 9-way ‘straight-through’ male-to-female

cable will be satisfactory for use with a PC serial port.

4.2 Ion gaugehead installation

Consult the information supplied with the gauge-head for advice on flanges, gaskets and adaptors for

mechanical fixing.

Mount the gauge-head in a position where the free electrons generated in its vicinity will not affect other

equipment. The performance of the ion gauge may be affected by other electron or ion generating processes

within the vacuum chamber: should shielding of the gauge-head be necessary, ensure that the conductance

between the gauge-head and volume of interest is not significantly decreased by its presence. The orientation

of the gauge-head should be such that the filament is to the side of, or below, the grid structure. This will

ensure that if the filament should sag or break it will not short-circuit to the grid.

The gauge and controller are protected from all normal failure modes of either. Users should be aware of

potential hazards from other equipment, particularly those introducing high voltages into the vacuum

chamber.

Serial Connector Pin Allocations

Pin Function

2 Tx

3 Rx

5 GND

5 Front panel

The rotary Function Switch has two sets of positions: for setup

and operating. The SETUP locations are labelled in orange

print. The switch must be stationary for a brief time before any

action results.

INC, DEC and ENT are pushbutton switches

with tactile feedback. They select the

format of pressure display, modify setups and

change parameters before and during Ion

Gauge operation. Only press one switch at a

time.

A set of status LEDs are situated in the Status Window. The LEDs on the

right side of the window show further information about operations

involving the Ion Gauges, such as the Degas program in use. The LEDs on

the left side indicate the status of the instrument, the fans and the

number of the filament and gauge in use.

Flashing of the display or of individual LEDs either require a response by

the user or indicate an error/fault condition.

The messages and displays shown in the large display window are largely

self-explanatory and may be accompanied by sounds. The legends above

and below the display window indicate the units and the exponent scale

for interpreting the bargraph displays of Ion Gauge pressure.

LEDs indicate the status of

the four relays available for

pressure-related control,

Bake and TSP control. Each

LED illuminates when the

associated relay is

energised.

The units of the pressure display are indicated by one of three

LEDs in the display area. The centre orange LED indicates that

mBar has been selected, the green LED above it indicates Pascal

and the green LED below indicates Torr.

Page 8

6 Setup

New users should explore and familiarise themselves with the use of the controls and displays before

connecting any gauges or wiring to the rear panel.

6.1 Switching on

Turn the Function Switch to the OFF position. Connect and switch on the mains supply and wait for the start-

up messages to run (approx. 5 seconds). During this time, both fans are checked for correct operation. The

last display in the sequence will show Pirani 1 pressure or capacitance manometer pressure (if enabled).

Pirani gauges take some time to stabilise before they indicate correct pressure. If Pirani 1 is not connected

the display will show ‘PG1 >200mB’. If the Function Switch is at a position calling for emission at switch-on,

emission is inhibited and 'Switch Em Off' is displayed.

6.2 Setup, General description

Setups are distributed among six switch locations in order to reduce the time taken to modify parameters.

There is no restriction on when, how many times, or in what order you can enter a particular setup.

You may move the Function Switch part-way through a sequence if you do not wish to modify subsequent

settings within a setup. E.g. in SETUP GAUGES you may change the filament in use without progressing through

filament material, overpressure, etc..

If the instrument is waiting for a response from you then part of the display will flash, indicating that a choice

can be made, or a setting edited. ▲and ▼

modify the choice or setting and ENT confirms it. If you do not

modify the displayed setting for a few minutes the instrument will beep periodically. If you do not respond

for a further few seconds then the current display will be replaced by ‘Setup Aborted’ and the setting or

choice at the aborted stage will revert to its former setting.

If you move the Function Switch after modifying a choice or value but have not confirmed it with ENT then

the existing choice or value is unchanged.

If you do not require the Bake or TSP functions they can be disabled by not assigning relays to them.

Setups and access to operating parameters and functions can be password-protected to prevent unauthorised

use.

Password / Units

Set Password?

Press ▲or ▼to select if a password is to be used. Press

ENT to confirm.

If a password is to be used.

Change each character with ▲or ▼and confirm with ENT.

Select the units of pressure display. (mBar, Pa or Torr)

The current selection will flash in the main display.

Press ▲or ▼to select 1 or 2 decimal place ion gauge

pressure display.

Select if gauge pressures greater than 1mB should be

displayed in scientific notation or decimal notation.

Select Yes to assign a 3-7 character instrument ID.

Change each character with ▲or ▼and confirm with ENT.

If enabled this ID will be shown during start-up and is

available as an item in the main display sequence.

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