Brooks 8200 Manuale utente
8200 Compressor
Installation, Operation and
Service Instructions
8040353 Revision AA
8200 Compressor
Installation, Operation and Service Manual
Brooks Automation
8040353 Revision AA
Information provided within this document is subject to change without notice, and although believed to be
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January 11, 2013 Part Num 8040353 Revision AA
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8200 Compressor Contents
Installation, Operation, and Service Instructions
Brooks Automation 8040353
Revision AA iii
Contents
Introduction
General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Installation, Operation and Servicing Instructions . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Safety
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Signal Word Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Safety Shape Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Inspection
The Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Installation
Compressor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Preparing the Compressor Input-Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Final Preparation of Compressor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-8
Connecting the Compressor to the Cold Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
Maintenance Procedures
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Contents 8200 Compressor
Installation, Operation, and Service Instructions
8040353 Brooks Automation
iv Revision AA
Unscheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Helium Circuit Decontamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Appendices
Appendix A: Customer Brooks Automation Technical Support Information. . .6-2
Appendix B: Troubleshooting Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Appendix C: Electrical Schematics for 8200 Compressor . . . . . . . . . . . . . . . . . . . .6-7
Appendix D: Components in the Electrical Control Module of the 8200 Compressor
6-10
Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled Compressors6-
12
Appendix F: Additional Cooling Water Quality Parameters . . . . . . . . . . . . . . . . .6-15
8200 Compressor Figures
Installation, Operation, and Service Instructions
Brooks Automation 8040353
Revision AA v
Figures
1-1 Air and Water Cooled 8200 Compressor Dimensions . . . . . . . . . . . . . . . . .1-3
1-2 Component Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
4-1 Electrical Terminal Enclosure with Cover in Place. . . . . . . . . . . . . . . . . . . .4-4
4-2 Assembly of Conductors to Terminal Block . . . . . . . . . . . . . . . . . . . . . . . . .4-4
4-3 8200 Compressor Cooling Water Flow and Pressure Requirements . . . . .4-7
4-4 8200 Compressor Water Cooling Requirements . . . . . . . . . . . . . . . . . . . . . .4-7
4-5 Typical 8200 Compressor Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-10
5-1 Adjusting the Self-Sealing Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
5-2 Disconnecting/Connecting the Adsorber Self-Sealing Coupling. . . . . . . .5-3
5-3 Removing the Adsorber from the Compressor . . . . . . . . . . . . . . . . . . . . . .5-4
6-1 8200 Compressor Electrical Schematic part number 8032563P001 . . . . . .6-8
6-2 8200 Compressor Electrical Schematic part number 8032564P001 . . . . . .6-9
6-3 Components in the Electrical Control Chassis of the 8200 Compressor
Three-Phase Scott-T Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
6-4 Components in the Electrical Control Chassis of the 8200 Compressor
Single-Phase RC Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
6-5 Flow Diagram of the 8200 (Air-Cooled) Compressor . . . . . . . . . . . . . . . . .6-13
6-6 Flow Diagram of the 8200 (Water-Cooled) Compressor. . . . . . . . . . . . . . .6-14
Figures 8200 Compressor
Installation, Operation, and Service Instructions
8040353 Brooks Automation
vi Revision AA
This Page Intentionally Left Blank
8200 Compressor Tables
Installation, Operation, and Service Instructions
Brooks Automation 8040353
Revision AA vii
Tables
1-1 Power Requirements (Steady-State Conditions) . . . . . . . . . . . . . . . . . . . . . .1-5
1-2 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
2-1 Safety Signal Words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
2-2 Safety Shapes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
4-1 Cooling Water Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
6-1 Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
6-2 Additional Cooling Water Quality Parameters. . . . . . . . . . . . . . . . . . . . . . .6-15
Tables 8200 Compressor
Installation, Operation, and Service Instructions
8040353 Brooks Automation
viii Revision AA
This Page Intentionally Left Blank
8200 Compressor
Installation, Operation, and Service Instructions
Brooks Automation 8040353
Revision AA 1-1
1Introduction
Overview
This chapter describes this manual and the compressor, including specifications.
Chapter Contents
General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Installation, Operation and Servicing Instructions . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Introduction 8200 Compressor
General Installation, Operation, and Service Instructions
8040353 Brooks Automation
1-2 Revision AA
General
The manual provides instructions for installing, operating and servicing the 8200
Compressor. This compressor is available in two versions: air-cooled, part number
8032549G001/G002 and water cooled, part number 803255G001/G002.
If you are installing or operating a Cryo-Torr or On-Board System you should also
have available the appropriate cryopump or refrigerator.
When you purchase a system, you will receive two manuals necessary for system
installation.
Questo manuale è adatto per i seguenti modelli
4
Indice
Altri manuali Brooks compressore d'aria
