Coremorrow N62 Manuale utente
N62 Piezo Nanopositioning Scanner
User Manual
Version: V1.0
This document describes the following products:
■N62.XY20S
■N62.XY20S
DECLARATION
This user manual is applicable to N62 Piezo Nanopositioning Scanner,
for your smooth and correct use of this product, please read this manual
carefully before using it. Please follow the instructions in the installation
and use process. Improper operation may cause injury to the operator and/
or damage to the product, so it is required that the entire installation and
operation process should be completed by professionals with a certain
foundation and a certain understanding of product principles, or under the
guidance of a professional.
If you disassemble or transform the product without permission, our
company will not be responsible for any consequences arising therefrom.
To change the product model and other false sales of our company's
products are illegal, users should be vigilant. Once found, you should
actively report or contact our company, jointly crack down on illegal acts,
and prevent fraud and economic losses. CoreMorrow will investigate for the
legal responsibility of the illegal subject and related party.
With the continuous development and innovation of technology,
CoreMorrow will timely add the latest information to the manual as
required. If you need, please contact us, or to our website www.coremorrow.
com for download, we apologize for any inconvenience caused to you.
1
1. Introduction ........................................................................................................................................2
1.1 Purpose and content ................................................................................................................2
1.2 Symbol and meaning................................................................................................................2
1.3 Users of This Manual ................................................................................................................2
1.4 Manual Lost and Reissued......................................................................................................2
2. Safety Guide........................................................................................................................................3
3. Product Overview ...........................................................................................................................4
3.1 Product Introduction ................................................................................................................4
3.2 Product Features........................................................................................................................5
3.3 Motion direction ........................................................................................................................5
4. Operating environment ..................................................................................................................6
5. Installation and operation..............................................................................................................6
5.1 Installation and Precautions .................................................................................................6
5.2 Load................................................................................................................................................7
5.3 Operating...................................................................................................................................10
6. Transportation and inspection ..................................................................................................11
6.1 Transportation..........................................................................................................................11
6.2 Open-Box Inspection.............................................................................................................11
7. Maintenance and Treatment......................................................................................................12
7.1 Problem Handling...................................................................................................................12
7.2 Daily maintenance..................................................................................................................13
7.3 Disposal......................................................................................................................................13
8. Parameter..........................................................................................................................................14
8.1 Technical data...........................................................................................................................14
8.2 Drawing......................................................................................................................................14
8.3 Driving and Sensor Connector...........................................................................................15
9.Customer Service ............................................................................................................................16
10.Contact us........................................................................................................................................16
Contents
N62 Piezo Nanopositioning Scanner User Manual
2
1.
2.
1. Introduction
1.1 Purpose and content
The manual is mainly for smooth and correct use of N62 Piezo Nanopositioning Scanner.
The manual contains all the necessary information for N62 Piezo Nanopositioning Scanner.
Introduction of the precautions during installation and use.
1.2 Symbol and meaning
DANGER: Improper handling may could cause injury to the operator.
Attention: Improper handling can cause damage to the equipment.
No order between items.
1.3 Users of This Manual
The default user of this manual has knowledge of piezoelectric products and controllers,
and has a certain basis for their installation and use.
1.4 Manual Lost and Reissued
If this manual is lost, please contact CoreMorrow. We will send you the latest version of the
user manual.
Please operating in order.
3
In order to prevent damage to the product caused by improper operation, the
following points should be paid attention to when in use.
N62 Piezo Nanopositioning Scanner is used in a dust-free, oil-free and lubricant-free
environment.
As the product is designed with flexible structure, it is recommended that the load
should not exceed load capacity of product. When loading, DO NOT apply torque
force and DO NOT pry or twist the load surface, so as not to damage the structure.
Recommended voltage range is 0~120V for long-term use and lifetime.
Do not disassemble the product to avoid damage.
Avoid stretching and bending the cable interface to prevent damage to the cable.
Use the dedicated cable provided by CoreMorrow to connect N62 Piezo
Nanopositioning Scanner to controller.
Do not connect via an extension cable casually, if you need a longer cable, please
contact CoreMorrow.
A change in temperature and pressure will charge the piezoelectric actuator, and
the actuator will remain energized for a period of time when it is disconnected
from the controller,So the operator should pay attention to when in use.
Do not disassemble N62 Piezo Nanopositioning Scanner.
Discharge N62 before installation, which can be done by connecting to the
controller.
Do not unplug the wire connecting with controller during operation.
Before use, check whether the connection wire of the product is in good condition and
whether the product and the controller are effectively grounded. During operation,
strictly standardize the operation. Do not touch the product (up to 150V voltage) with
your hand when power on, in case of danger.
2. Safety Guide
N62 Piezo Nanopositioning Scanner is designed with the most advanced technology and
safety standards for your own safety and the correct use of the product, please observe
the following points when in use.
N62 Piezo Nanopositioning Scanner User Manual
4
3. Product Overview
3.1 Product Introduction
N62 Piezo Nanopositioning Scanner has the following advantages:
High performance piezo stack:
N62 Piezo Nanopositioning Scanner is driven by a highly reliable ceramic actuator with
a fully insulated structure, so its performance and service life are far better than the
traditional actuator. The insulating layer can effectively prevent the piezoelectric ceramic
from being damaged when exposed to moisture. Therefore, the stability of piezoelectric
ceramics can be guaranteed under extreme circumstances. Compared with traditional
driving mechanism, there are no transmission parts and friction. Therefore, ceramic
actuator has the characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
N62 Piezo Nanopositioning Scanner adopting flexible hinge mechanism has advantages
of no friction, high positioning accuracy. Flexible hinge is an element not affected by static
and dynamic friction, based on the elastic deformation of metal material (e.g., steel) ,
there is no rolling and sliding parts. Flexible unit has very high load capacity and stiffness.
Hinge guide needs no maintenance and no wear and tear. Suitable for a wide range of
temperatures, no lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
N62 Piezo Nanopositioning Scanner has a travel range of up to 22μm/axis in X Y, and can
move in X Y at the same time, the high flexibility ensures that XY dimensional motion
is uncoupled ,and features fast response speed, no mechanical friction, high repeatable
5
3.2 Product Features
Fast response speed.
Closed-loop strain gauge sensor, high positioning accuracy.
Used for high frequency.
3.3 Motion direction
positioning accuracy, easy to operate, so it can meet different applications. This product
can also be customized according to the needs.
N62 is mainly used in biotechnology, interferometry, quality detection, optical detection,
nanometer positioning, microscopy and imaging, image processing and other fields, with a
good development prospect.
Y
FIG.1 The Motion Direction of N62 Piezo Nanopositioning Scanner
Table1.N62 Wire Identification and Motion Direction
The identification of the labels on the wires of N62 is as follows:
Model Motion direction Function Label
N62
X
PZT Drive CH1
Senser output 1
Y
PZT Drive CH1
Senser output 1
Constant voltage PZT Drive CH3
N62 Piezo Nanopositioning Scanner User Manual
6
4. Operating environment
A clean, dustfree and non-corrosive environment
Operating temperature : -20~80℃
Relative humidity : <60%
Recommended voltage range is 0~120V for long-term use and lifetime
FIG.2 N62 Installation diagram
5. Installation and operation
Safety check should be carried out before installation, such as whether the connection wire
is damaged or broken, whether the drive power supply is grounded, etc.
5.1 Installation and Precautions
Installation diagram of N62 is as follows:
1.Ensure that the installation plane is relatively flat.
2.Use M3 screws to mount N62 on the mounting surface directly and tighten it.
3.Grounding protection for connection, as shown below.
M3 hole for load mounting
M2.5 hole for grounding
Motion surface
M3 hole for mounting
7
FIG.4 Connector diagram
FIG. 3 Grounding protection diagram
Sensor output Label for sensor output
Label for PZT drive
PZT drive output
4.Mounting the load and tighten it properly to ensure the positioning accuracy.
5.Connect the connector with the corresponding controller according to the identification.
The wiring mode of LEMO connector is shown as below
Safety washer
Flat washer
Platform
Cable
connector
Ground protection
Screw
5.2 Load
When mounting the load, ensure that the load quality is less than the maximum load
capacity of N62, and try to mount the load in the center of the moving surface.
The correct position to mount the load is shown below.
N62 Piezo Nanopositioning Scanner User Manual
8
FIG.5 The load is applied to the center of the moving surface
FIG.6 Try not to let the position of the center of gravity far exceed the active platform
For the protection of the product, we do not recommend that the load is too high. If a
high load must be used, please appropriately low the position of the center of gravity of
the load. The wrong mounting way is shown in the figure below.
FIG.7 Do not mount long loads on one side of the platform
It is forbidden to mount the load on one side of the moving platform, which will cause
serious damage to the product, as shown in the figure below.
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