EBARA EV-A10 Manuale utente

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INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

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CAUTION

READ AND UNDERSTAND THIS INSTRUCTION MANUAL THOROUGHLY

BEFORE USING THIS EQUIPMENT.

BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE

REFERENCE.

To Facility and Tool Manufactures:

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EVA_CN_E_Rev.0

MODEL EV-A10

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Environmental Basic Policies

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Foreword

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WARNING

BEFORE USING THIS EQUIPMENT, READ THIS INSTRUCTION

MANUAL THOROUGHLY. MANUFACTURES WARRANTY WILL BE

VOID, IF THE MODEL EV-A10 DRY VACUUM PUMP HAS BEEN

INCORRECTLY INSTALLED, OPERATED OR MAINTAINED OR IF IT

HAS BEEN MODIFIED OR REPAIRED WITH PARTS NOT SPECIFIED

BY MANUFACTURE.

SINCE THE OPERATIONS OR WORKS THAT ARE NOT DESCRIBED IN

THIS MANUAL COULD RESULT IN SERIOUS OR POSSIBLY EVEN

FATAL INJURY OR DAMAGE TO THE PUMP, DO NOT THESE THAT

ABSOLUTELY.

EBARA IS NOT LIABLE FOR ANY INJURY OR DAMAGE ARISING FROM

AN INDIVIDUAL’S CARELESSNESS, OR MISUSE.

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308 (%$5$&25325$7,21

(1) Limited Warranty

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(2) Repair and Servicing

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DANGER

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WARNING

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CAUTION

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NOTE

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308 (%$5$&25325$7,21

(4) Safety Warning Labels

)ROORZLQJVDIHW\ODEHOVDUHDWWDFKHGWRSXPSFRYHUV

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(OHFWULFFKDUJHPDUN

 +D DUGRXVZHLJKWGDQJHU

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

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VHUYLFLQJ

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(OHFWULFFKDUJHPDUN

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WARNING

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$OORZSLSLQJDQGFDVLQJWRFRRO

EHIRUHVHUYLFLQJ

㧗㒊࠶ࡾࠋ᥋ゐࡍࡿ࡜ⅆയࢆࡍࡿ༴㝤ࡀ࠶ࡾࡲࡍࠋ

㓄⟶࣭ࢣ࣮ࢩࣥࢢࡀ෭࠼࡚࠿ࡽ࣓ࣥࢸࢼࣥࢫࢆࡋ࡚ୗࡉ࠸ࠋ

&

WARNING

㆙ ࿌

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&RQWDFWZLOOFDXVHLQMXU\RUGHDWKE\

HOHFWULFDOVKRFN'LVFRQQHFW

OLQHSRZHUEHIRUHVHUYLFLQJ

༴㝤㟁ᅽ㒊࠶ࡾࠋ᥋ゐࡍࡿ࡜㔜യࡲࡓࡣṚஸࡢ

༴㝤ᛶࡀ࠶ࡾࡲࡍࠋ㟁※౪⤥ࢆṆࡵ࡚ࣈ࣮ࣞ࢝ࢆษࡗࡓ≧ែ࡛

࣓ࣥࢸࢼࣥࢫࢆࡋ࡚ୗࡉ࠸ࠋ&

DANG ER

༴

㝤

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&DQFDXVHLPSDFWLQMXU\WKURXJKIDOOLQJRUWLSSLQJ

8VHDSSURSULDWHSURSHUO\ULJJHGOLIWLQJHTXLSPHQWDQGNHHSIURP

XQGHUVXVSHQGHGSXPS5DLVHDOODGMXVWHUIHHWIXOO\ZKHQPRYLQJ

㔜㔞≀ࠋⴠୗཬࡧ㌿ಽ࡟ࡼࡾ㔜യࡲࡓࡣṚஸࡢ༴㝤ࡀ࠶ࡾࡲࡍࠋ

ྞࡾୖࡆࡓ࣏ࣥࣉࡢୗ࡟ධࡽ࡞࠸࡛ୗࡉ࠸ࠋ

⛣ື󰪍ࡣ඲࢔ࢪࣕࢫࢱࣇࢵࢺࢆୖ㝈ࡲ࡛࠶ࡆ࡚ୗࡉ࠸ࠋ

&



 3

308 (%$5$&25325$7,21



High temperature warning

㻌

Hazardous voltage warning

Heavy weight danger

Electric charge mark

㻌

Top View

Front View

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