EBARA EV-PA 250 Manuale utente

PM10U

EBARA

CORPORATION

Model EV-PA in this document is model code of Ebara.

Date Contents

2019/04/04 Initial Release

2019/04/19 Drawing update

2019/05/21 Front page module name

ISSUED BY PRECISION MACHINERY COMPANY

INSTRUCTION MANUAL

DRY VACUUM PUMP

MODEL EV-PA 250

MODEL EV-PA 500

Doc.No.7312-Z94024 Rev.2

CAUTION

Read and understand this INSTRUCTION MANUAL thoroughly before using

this equipment.

Keep this INSTRUCTION MANUAL on hand for future reference.

To Facility and Tool Manufactures:

Distribute this Instruction Manual to all end-user personnel actually operating

this equipment.

P.2

PM10U

EBARA CORPORATION

Do not reproduce or reprint any portion of this manual without permission.

Manufacturer reserves the right to discontinue or change any specifications or

Designs without notice and without incurring obligations.

EV-PA in this instruction manual is our model code.

P.3

PM10U

EBARA CORPORATION

Environmental Basic Policies

It is our responsibility, as people of the earth, to protect nature's irreplaceable treasures and

to pass them on to future generations.

As we undertake our business activities, we will establish environmental management systems

and implement ongoing improvements and reviews, while striving to promote harmony

between technology and nature, prevent environmental pollution, and improve the overall results of

our environmental management activities. We are aware that environmental protection and

management activities are the responsibility of all managers and employees of the Corporation, and

each person will demonstrate this awareness when carrying out his or her duties.

We will widely publicize these basic policies to regional societies and the general public and work to

make Ebara's position on the environment clear to society in general.

PM10U

EBARA

CORPORATION

Foreword

Design of EBARA EV-PA series DRY VACUUM PUMP is based on superior engineering and long

experience. To prevent any possible trouble and provide satisfactory operation and long life, it is

important to thoroughly understand this EBARA EV-PA series DRY VACUUM PUMP by careful study of

this manual. If any questions arise regarding this manual, please direct them to EBARA or your dealer.

Your questions will be promptly answered and your suggestion may be considered for incorporation into

our future products.

The design, specification and appearance are subject to change without prior notice

WARNING

Before using this equipment, read this INSTRUCTION MANUAL thoroughly.

Manufactures warranty will be void, if the EV-PA series DRY PUMP has been

incorrectly installed, operated or maintained or if it has been modified or

repaired with parts not specified by manufacture.

EBARA is not liable for any injury or damage arising from an individual’s

carelessness, or misuse.

P.5

PM10U

EBARA CORPORATION

(1) Limited Warranty

The liability of EBARA CORPORATION under this Warranty covers the following.

Unless otherwise specified in the contact, the warranty period shall be either one year from the first date

of operation or 18 months after the shipment from EBARA, whichever comes first.

1. When the purchased pump cause failure that owe to its design, manufacturing processes or other

faultiness that EBARA is responsible to, EBARA will either repair the troubling parts or replace the

pump at free of charge. No extension of warranty is available even when the pump was replaced

during the original warranty program.

2. Fees will be charged for repair in the following circumstances and for consumable parts:

(1) If the trouble occurs after the Warranty has expired.

(2) If the trouble is caused by operating in the manner not described in the instruction manual or

using under special condition.

(3) If the trouble is caused by repair or remodeling of the pump by other than Ebara or authorization

suppliers by Ebara.

(4) If the trouble is caused by corrosion or by-products due to pumping the corrosive or reactive

substance.

(5) If the trouble is caused by corrosion or by-products due to pumping the water or codensability

material.

(6) If the trouble is caused by suction foreign material.

(7) If the trouble is caused by fire, flood, earthquake, or other circumstances beyond EBARA’s

control.

3. EBARA will not be liable for any compensation for damage or injury resulting from breakdown of

the pump.

(2) Repair and Servicing

Requests for repair or servicing of the pump shall be made to your dealer or to EBARA.

If any abnormal symptoms other than those displayed on the LCD controller appear, take action in

accordance with the instruction of Section 8. "Troubleshooting".

If trouble occurs, to order repairs or servicing. Please contact EBARA CORPORATION or an

authorized Agent/Distributor, and provide the information on the nameplate and details of the problem.

If you have any enquiries about the pump, please contact EBARA.

PM10U

EBARA

CORPORATION

(3) Safty Notice

It is essential that those operating this pump should have the knowledge to identify and avoid

hazardous conditions associated with the pump. Inadequate or rash operation may cause dangerous

and serious accidents. Before installation and operation, the operator should first have a good

knowledge of the pump construction, operation procedure, and its hazards (e.g., electrical, stored

electrical, thermal). The operator should read through this instruction manual and other documents

issued by EBARA in detail.

The following symbols are used to highlight important information and instructions that must be

followed to prevent personal injury or damage to equipment. Please study the symbols carefully so

that the meaning of any warning you encounter is immediately clear.

DANGER

: indicates an

imminently hazardous situation which, if not avoided, will result in

death or serious injury.

WARNING

: indicates a potentially hazardous situation which, if not avoided, could result in

death or serious situation.

CAUTION

: indicates a potentially hazardous situation which, if not avoided, may result in

minor or moderate injury or possible damage to the equipment or machine.

: is used to call attention or to emphasize essential information.

Precautions necessary for safe use of the EBARA EV-PA series DRY VACUUM PUMP are detailed in

this instruction manual, while important items concerning precautions for handling EBARA EV-PA series

DRY VACUUM PUMPare listed below.

Note

DANGER

Keep the power supply to the pump turned off until you have finished the wiring and

connecting work. Also remove the power connector and interrupt the Circuit Protector (CP)

during this.

PM10U

EBARA

CORPORATION

WARNING

· Carry out the electrical wireing only by qualified electricians.

Connect the grounding wire.

Do not use the power cable adapter.

Granding at the power outlet should be checked by qualified.

Install ELB (or CB) based on the law and the standard in the installation region. ELB (or

CB) is not installed in the pump unit.

Connect the pump to the power supply using the appropriate circuit breaker

(lockout/tagout CB).

Avoid contact and keep inflammable substances out of reach. The inlet and exhaust piping

will remain at a high temperature during operation and for a short time after the pump has

stopped.

Do not use explosive, flammable, toxic or corrosive substances. This pump is suitable for

use on clean and non-corrosive gases.

Check for leaks after you have installed the pump.

Avoid contact and keep inflammable substances out of reach. Do not remove the outer

cover during operation. The pump unit and the inlet piping and exhaust piping will remain

at a high temperature during operation and for a short time after the pump has stopped.

Do not perform a withstand voltage test. Failure to comply could result in damage to the

sensitive devices.

Keep the power supply to the pump turned off until you have finished the wiring, installing

and maintenance work. Also remove the power connector and interrupt the Circuit

Protector (CP) during this.

Do not insert any part of body to ventilation outlet. Moving parts of the cooling fan can

crash and cut.

Do not alter the pump member nor change any parts without the EBARA’s consent or

approval.

PM10U

EBARA

CORPORATION

CAUTION

Be careful not to overturn the pump when pushing and pulling it sideways, because the

width of the pump is small to its height.

Do not step on the pump or place objects on it.

The exhaust piping made by polyvinyl chloride causes the noise thrugh the pipe.

Do not apply the power supply from the pump's power pack to any other equipment as this

will result in malfunctioning of the control units and in pump failure.

Use the correct wiring materials and size to match the operating conditions in accordance

with the power consumption rating and ambient air temperature of the pump.

Vents at both ends of the pump. Place the pump at least 100mm from the stationary

section. If the cooling air supply is insufficient, the pump temperature will rise and problems

such as rotor contact will occur.

Install pump in a location at an ambient not exceeding 30°C. Particular caution is required

when the pump is operated in an enclosed room.

Check the pump according to “8. Troubleshooting” before stopping suddenly. This pump

doesn’t stop by signal “WARNING”. But signal “ALARM” or serious trouble occurs in a

pump when pump driving is continued.

P.9

PM10U

EBARA CORPORATION

Note

· Placed the pump in an upright position. Do not stack as packing. When the pump is

overturned, this will result in accident.

· A gap of at least 50mm should be left open for ventilation between the pump cover and

the adjacent equipment.

· To fix the pump, the rubber feet of five each are attaches. If the pump is not stable, vibration

and noise of the pump may be increased.

· Do not wire vacant pins.

· Apply a voltage between 4VDC and 27VDC on the equipment side. Do not apply 5VDC

power on the equipment side. The output signals are generated from an open collector

and the pump provides 5VDC power for input signals.

· The output signals are generated from an open collector.

· Wire all signals with the correct polarity (SIG./COM.).

· When output signals energize an inductive load such as a relay, insert a diode (100V. 1A

class) to limit the back electromotive force during de-energization.

· The pump cannot start while the measuring instruments are warming up after the CP is

placed in the ON position.

· Do not start the pump when a WARNING/ALARM has been generated. After you have

taken the remedial actions, reset the pump.

· With the “AUTO MODE”, The pump starts driving when switched on in the state that short-

circuited by the ”PUMP START pin” of the control connector.

· Do not supply a power till you confirm pump setting and safety complete when you use

an “AUTO MODE”..

· With the “AUTO MODE”, the pump starts driving after warm-up completion automatically

(When a pump is not abnormal).

P.10

PM10U

EBARA CORPORATION

(4) Safty Warning Labels

Following safty labels are attached to pump covers.

1. High temperature warning

2. Hazardous voltage warning

3. Heavy object warning

4. Electric charge mark

1. High temperature warning

Allow the piping and casing to cool before servicing. Hot surface may burn or cause injury.

2. Hazardous voltage warning

Turn power off and lockout before servicing. Hazardous voltage may shock, burn, or cause death.

3. Heavy object warning

Do not lift and move without assistance. Heavy object may result in severe injury.

4. Electric charge mark

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