Edwards AIGX-S-NW25 Manuale utente
D048-50-880
Issue E Original
Instruction Manual
Active Ion Gauge
Description Item Number
AIGX-S-NW25 D048-50-000
AIGX-S-DN16CF D048-51-000
AIGX-S-DN40CF D048-52-000
This product has been manufactured under a quality management system certified to ISO 9001:2008
Declaration of Conformity
We, Edwards Limited,
Crawley Business Quarter,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Active Ion Gauge
AIGX-S-NW25 D048-50-000
AIGX-S-DN16CF D048-51-000
AIGX-S-DN40CF D048-52-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN61326-2-3: 2013 Electrical equipment for measurement, control and laboratory
(Class B Emissions, Use. EMC requirements. Particular requirements. Test
Industrial Immunity) configuration, operational conditions and performance criteria
for transducers with integrated or remote signal conditioning
EN50581:2012 Technical Documentation for the Assessment of Electrical and
Electronic Products with respect to the Restriction of Hazardous
Substances
and fulfils all the relevant provisions of
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
09.07.2015, Eastbourne
Larry
Marini,
Senior
Technical Manage
r
Date and Place
P200-02-520 Issue F
© Edwards Limited 2013. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
DO48-50-880 Issue E
Contents
Section Page
1 INTRODUCTION .................................................................................... 1
1.1 Scope ...................................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA ................................................................................. 3
2.1 Mechanical Data ......................................................................................................... 3
2.2 Performance, Operating and Storage Conditions ................................................................... 3
2.3 Electrical Data ........................................................................................................... 3
2.3.1 Electrical Supply .........................................................................................................3
2.3.2 Output Signal .............................................................................................................3
2.3.3 Gauge and Degas Enable ................................................................................................ 4
2.3.4 Set-point ................................................................................................................. 4
2.3.5 Gauge Identification .................................................................................................... 4
2.3.6 Electrodes ................................................................................................................. 4
2.4 Materials Exposed to Vacuum .......................................................................................... 5
3 INSTALLATION ..................................................................................... 7
3.1 Unpack and Inspect ...................................................................................................... 7
3.2 Fit the AIGX to the Vacuum System ................................................................................... 7
3.3 Electrical Connections .................................................................................................. 7
3.3.1 Connect to Edwards Controller ........................................................................................ 7
3.3.2 Connect to Your Own Supply and Control Equipment .............................................................. 7
3.3.3 Maximum Cable Length ................................................................................................. 9
4 OPERATION ...................................................................................... 11
4.1 Enable and Disable the AIGX ..........................................................................................11
4.2 Pressure Measurement .................................................................................................11
4.2.1 Calibration in Different Gases ........................................................................................12
4.3 Emission Current ........................................................................................................13
4.4 Degas the AIGX ..........................................................................................................13
4.5 Over-pressure Protection ..............................................................................................13
4.6 Filament Selection ......................................................................................................13
4.7 LED Status ................................................................................................................13
4.8 Set-point Adjustment ..................................................................................................14
4.9 Error Indication .........................................................................................................14
4.10 Bakeout ................................................................................................................... 14
5 MAINTENANCE ................................................................................... 17
5.1 Fault Finding Guide .....................................................................................................17
5.2 Replace the Body Tube ................................................................................................17
5.3 Replace the Internal Fuse .............................................................................................17
5.4 Calibration Service .....................................................................................................18
6 STORAGE AND DISPOSAL ....................................................................... 19
6.1 Storage ...................................................................................................................19
6.2 Disposal ................................................................................................................... 19
7 SPARES AND ACCESSORIES ..................................................................... 21
7.1 Introduction .............................................................................................................21
gea/0226/07/13
DO48-50-880 Issue E
Page ii © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
7.2 Spares ..................................................................................................................... 21
7.3 Accessories ...............................................................................................................21
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 General View of the AIGX (NW25 version) ........................................................................... 2
2 Dimensions (mm) ........................................................................................................ 5
3 Schematic Diagram of Recommended Electrical Connections .................................................... 8
4 Pressure Output Signal of AIGX .......................................................................................12
5 Separate the Electronics Housing from the Body Tube ...........................................................15
6 Fuse Replacement ......................................................................................................18
Tables
Table Page
1 Pins On the AIGX Connector ............................................................................................ 9
2 Maximum Recommended Cable Length .............................................................................. 9
3 Gas Calibration Factors for Various Gases ..........................................................................12
4 LED Status ................................................................................................................13
5 Error Indication .........................................................................................................14
6 Fault Finding Guide .....................................................................................................17
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P300-20-000
Trademark credits
Fomblin®is a registered trademark of Ausimont SpA.
LET-LOK®is a registered trademark of HAM-LET Group.
Swagelok™ is trademark of Crawford Fitting Company.
Viton™ is trademark of DuPont Dow Elastomers L.L.C.
© Edwards Limited 2013. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
D048-50-880 Issue E
1 INTRODUCTION
1.1 Scope
This manual provides installation, operation and maintenance instructions for the Edwards Active Ion Gauge (AIGX).
You must use the AIGX as specified in the manual. Read this manual before installing and operating the AIGX.
Important safety information is highlighted as WARNING and/or CAUTION instructions which must be followed. The
use of WARNINGS and/or CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
The units used throughout this manual conform to SI international system of measurement followed by imperial units
in parenthesis; SI (imperial).
In accordance with the recommendations of IEC1010, the following warning symbols are on the pump:
1.2 Description
The AIGX is an ion gauge head and gauge controller in a single compact unit. The gauge operates as a hot filament
ionisation gauge, in which the pressure is measured indirectly as a function of the current.
The measurement range of the AIGX is 5 x 10-10 to 5 x 10-2 torr (6.6 x 10-10 to 6.6 x 10-2 mbar). Three types of
vacuum connections are available: DN16CF, DN40CF and NW25.
The AIGX requires a 14.5 - 30 V d.c. power supply; it has a 0 to 10 V d.c. analogue output which is related to pressure.
The AIGX is compatible with Edwards Controllers. Alternatively, you can use an independent power supply and you
can read the output signal with a voltmeter or analogue to digital converter.
An 8-way electrical connector socket on the AIGX (Figure 1, item 1) is used to connect the AIGX to your Controller or
electrical supply and voltmeter. Electrical cables fitted with suitable connectors are available as accessories. A
gauge identification signal is available on the electrical connector: this signal is used by Edwards Controllers to
identify which type of active gauge is connected.
The AIGX is supplied with two filaments. A switch on top of the gauge selects between filament 1 and 2 (Figure 1,
item 2).
There are two levels of emission currents: 0.1 and 1 mA. The gauge will automatically select 1 mA emission current
at low pressure, and 0.1 mA at high pressure.
A protection circuit is built into the gauge to prevent operating the gauge at pressures higher than 5 x 10-2 torr.
The AIGX can be degassed using the degas feature. During degas, the grid voltage is 500 V and the emission current
is 10 mA. The degas is inhibited at high pressure. The maximum duration of degas is three minutes, after which the
gauge returns automatically to its normal mode.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying
documentation.
From August 2005, Edwards will offer
European customers a recycling service.
D048-50-880 Issue E
Page 2 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
The AIGX has a set-point facility. The set-point signal is an open collector transistor output, which is on when the
pressure measured by the gauge is below a preset pressure. The pressure at which the set-point operates can be
adjusted using the set-trip switch on the top of the gauge (1, item 3).
The AIGX is fitted with a status LED (Figure 1, item 4) . This LED indicates the operating status of the gauge.
Figure 1 - General View of the AIGX (NW25 version)
1
1
2
4
3
5
1. Electrical connector
2. Filament select switch
3. Set trip switch
4. Status LED
5. Vacuum flange
© Edwards Limited 2013. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
D048-50-880 Issue E
2 TECHNICAL DATA
2.1 Mechanical Data
2.2 Performance, Operating and Storage Conditions
2.3 Electrical Data
2.3.1 Electrical Supply
2.3.2 Output Signal
Dimensions See Figure 2
Mass
2AIGX-S-NW25260 g 260 g
AIGX-S-DN16CF300 g 300 g
AIGX-S-DN40CF510 g 510 g
Volume of gauge tube 21 cm3
Enclosure rating IP30
Ambient temperature
Operation 0 to 40 ºC
Storage -30 to 70 ºC
Ambient humidity 90% RH (non-condensing) up to 31 ºC reducing to
50 % RH at 40 ºC
Atmosphere Dry non-conductive only (pollution degree 1)
Bakeout temperature 200 ºC (with electronics removed)
Maximum operating altitude 2000 m
Maximum internal pressure 10 bar absolute
Pressure measurement range 5 x 10-10 to 5 x 10-2 torr
(6.6 x 10-10 to 6.6 x 10-2 mbar)
Voltage +14.5 V to +30 V d.c.
Internal fuse 1 A (T)
Maximum power consumption
Operating 7 W
Degas 14 W
Electrical connector FCC 68 (RJ45)
Measurement range 0.7 V to 8.7 V
Gauge disabled 9.0 V
Emission error 9.5 V
Over-pressure trip 9.7 V
Minimum load impedance 10 kW
D048-50-880 Issue E
Page 4 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
2.3.3 Gauge and Degas Enable
2.3.4 Set-point
2.3.5 Gauge Identification
2.3.6 Electrodes
Control sense Active low
Active level < 1.5 V
Trip level 0.6 V to 8.8 V
Hysteresis 500 mV
Set-point output load rating 30 V d.c., 100 mA max
Back EMF suppression diode *
Min surge rating 1 A
Min reverse voltage rating 100 V
* required when you use an external d.c. relay connected to the set-point output
Identification resistance 162 k?
Emission current
Normal 0.1 or 1 mA
Degas 10 mA
Grid voltage
Normal 180 V
Degas 500 V
Filament bias voltage + 30 V
Collector voltage 0 V
© Edwards Limited 2013. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
D048-50-880 Issue E
2.4 Materials Exposed to Vacuum
Figure 2 - Dimensions (mm)
Collector Tungsten
Grid Tantalum Pt Clad Mo
Filament Yttria coated iridium
Body Stainless Steel
Feedthrough Stainless Steel and UHV compatible, glass/ceramic
A
Dim A
NW25 85 mm
DN16CF 106 mm
DN40CF 98 mm
D048-50-880 Issue E
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Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.
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