Edwards AUTO 306 Manuale utente
EO86-67-880
Issue A
Description Item Number
Water Cooled Crystal Holder
Oscillator Unit
Crystals (pack of 5)
EO86-67-000
EO86-66-000
EO86-68-000
~
.
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: (01293) 528844 Fax: (01293) 533453 Telex: 87123 Edivac G
CONTENTS
Section Title Page
1
1.1
1.2
1.3
1.3.1
1.3.2
1.3.3
1
1
1
2
2
2
4
INTRODUCTION
Scopeof this manual
Definition of terms
Generaldescription
Water CooledCrystal Holder
Oscillator Unit
Crystals
2
2.1
2.2.1
2.2.2
2.2.3
2.2
2.3
5
5
5
5
5
5
5
TECHNICAL DATA
Water Cooled Crystal Holder
Performance
Mechanicaldata
Materials
Oscillator Unit
Crystals
3
3.1
3.2
3.3
3.4
3.4.1
3.4.2
3.5
3.6
7
7
8
8
9
10
13
13
13
INSTALLA TION
Unpack and inspect
Safety
Generalinstallation requirements
How to install the Water Cooled Crystal Holder
Install into an AUTO 306
Install into other coatingunits
How to install the Oscillator Unit
How to prepare and install acrystal into thecrystal head
4
4.1
4.2
4.3
4.4
4.4
15
15
15
15
16
16
MAINTENANCE
Safetyinfonnation
Removalof deposits from tl\e crystal
Crystal electricalcontacts
Crystal check
Routine maintenance
5
5.1
5.2
STORAGE AND DISPOSAL
Storage
Disposal
17
17
17
6
6.1
6.2
SPARES AND ACCESSORIES
Introduction
Spares
18
18
18
RETURN OF EDW ARDS EQUIPMENT
N
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,
8
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Water Cooled Crystal Holder i
Illustrations
Figure Title Page
1
2
3
4
5
6
1
3
6
11
12
12
Definition of processtenns
Application of theWater Cooled Crystal Holder
Dimensions
Component parts of theWater CooledCrystal Holder
Cooling-water connections
Quick-fit water connectors
Associated publications
Publication title Publication Number
FTMS Film Thickness Monitor EO86-6S-000
ii Water Cooled Crystal Holder
1INTRODUCTION
1.1 Scope of this manual
Thismanual provides installation, operationandmaintenanceinstructions for theWater Cooled
Crystal Holder, Crystals and Oscillator Unil You must usetheWater Cooled Crystal Holder,
Crystalsand Oscillator Unit asspecifiedin this manual.
Readthis manual before you install and operatetheWater Cooled Crystal Holder, Crystals and
Oscillator Unit. Important safety information is highlighted as WARNING and CAUTION
instructions; you must obey theseinstructions. The use of WARNINGS and CAUTIONS is
defined below.
The units used throughout this manual conform to the SI international system of units of
measurement.
Definition of terms
1.2
Figure 1defines the processterms usedin this instruction manual.
1.
2.
3.
4.
5.
6.
7.
Substrate
Crystal head
Crystal
Deposition {deposition rate)
Deposition source
Evaporation {evaporation rate)
Deposited layer
<
,
...
0;
0
,
a
<
Figure 1 -Definition of process terms
Water Cooled Crystal Holder 1
General description
Water Cooled Crystal Holder
TheWater Cooled Crystal Holder is usedin conjunction with acrystal,anOscillator Unit and a
film thicknessmonitor {suchasthe Edwards FrM5) asshown in Figure 2. You canmount the
Water Cooled Crystal Holder in a vacuum chamberof acoatingsystemto monitor the rateand
thicknessof deposition from adeposition source.
The crystal is held in a water cooled crystal headto shield it from radiated heatand to remove
heatgainedfrom thedepositedlayer. Thecrystalisfully shroudedandyou may useit in systems
using thermal, electron beam or sputter deposition techniques without modification. An
aperture in the crystal headdefines theareaof crystal exposedto thedeposited layer.
The cooling-water is delivered to the crystal headby coiled copper tubes. The copper tubes
support thecrystal headandaresemi-flexibletoallow you toposition thecrystalheadin position
for operation. The tubesare long enough to beusedin a largechamberand flexible enough to
bebent into a complete loop in a small chamberif required. Becausethe internal diameter of
the coiled copper tubesis small, they must beconnectedin parallel with themain cooling-water
supply for thecoating system. A filter isincluded in thewater supply tube toprevent thecrystal
head from becoming clogged with water-borne debris.
Water and electrical connections to the vacuum side of the Water Cooled Crystal Holder are
made through a single vacuum leadthrough which will fit a standard Edwards baseplate
leadthrough hole or other baseplateleadthrough holes.
The electrical connection from the Oscillator Unit to the crystal is made through coaxial cable
and a BNC plug. On the vacuum side of the leadthrough, coaxialcableis used to connectthe
leadthrough to the crystal head. Thecrystal hastwo connections,'live' and 'earth'. Thecentre
conductor of the coaxial cableis live and the sheathis earthed. The side of the crystal which
receivesthedeposited is earthed.
Oscillator Unit
The Oscillator Unit is a sealeddevice, used with the Water Cooled Crystal Holder and a film
thickness monitor such as the FrMS. The unit contains an oscillator circuit, the oscillating
frequencyof which iscontrolled by thenatural frequencyof thecrystal. Asdepositedlayerforms
on the crystal, the natural oscillating frequency decreases,togetherwith the output frequency
of the oscillator. The changein frequency is detectedby the thicknessmonitor, which converts
the frequency changeinto deposition rateand thicknessinformation.
2Water Cooled Crystal Holder
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1" 1f11
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1.
2.
3.
4.
5.
6.
7.
8.
9.
Crystal, mounted in crystal head
Short coaxial cable
Earth connection
Oscillator Unit
Long coaxial cable
Input from crystal sensor 2 (if fitted)
Shutter 2 connection (if fitted)
Remote shutter control connections
Remote shutter control
10. FTM5 or similar film thickness monitor
11. Analogue device (chart recorder)
12. Shutter controller panel
13. Cooling water hoses
14. Source shutter actuator
15. Source shutter
16. Bell jar
17. Water Cooled Crystal Holder
Figure 2- Application of the Water Cooled Crystal Holder
Water Cooled Crystal Holder 3
--1
"'
0
,
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1.3.3 Crystals
The sensingelement of the Water Cooled Crystal Holder is a quartz crystal. The crystal is a
plano-convex plate which is excited into thicknessshear-modevibrations by signals from the
Oscillator Unit. When new, the crystal oscillatesat a frequencyof about 6MHz.
Thefrequencyof oscillation is determined by themassof deposited layer on thecrystal surface
when it is exposedto the deposition source. As the depositedlayer builds up, the oscillations
slow down. Edwards useaplano-convex crystalsincethisshapeinducesmost of theoscillations
to occurin the central exposedregion of the crystal. This increasesthe sensitivity of the crystal
to themassof thedeposited layer and meansthat thecrystalmay befirmly clamped around the
rim to improve heat transfer to the Water CooledCrystal Holder
4Water Cooled Crystal Holder
2TECHNICAL DA TA
2.1 Water Cooled Crystal Holder
Perfonnance
0.51.min-l at 10to 25°c
Less than 1 x 10-9mbar.ls-l
0.251.min-l
30°C
6OoC
Cooling-water requirement for substrate
operating temperatures up to 300°c
Maximum leak rate
Minimum cooling-water flow rate
Maximum cooling-water inlet temperature
Maximum cooling-water outlet temperature
2.2.2 Mechanical data
Dimensions
Mass(crystal holder complete)
Baseplateleadthrough hole size
Cooling-water hoseconnectors
SeeFigure 2
1.8kg
25 to 27 mm
Push-in connectors for 8 mm
old nylon tubing or riffled
connectors for 6 mm ild tubing
BNC male, 50,0.
Electrical connection
Materials
Crystal headenclosure
Internal water filter Nickel plated copper alloy
Stainless steel 0.75 mm mesh
2.2 Oscillator Unit
8Sx2Sx2Smm
6MHz
94
Size
Nominal unloaded oscillator frequency
Mass
2.3 Crystals
Crystal size
Crystal operating frequency (unloaded)
Materials
14rnmdiameter,
approximately 0.3 rnm thick
6MHz
Quartz, gold plated electrodes
Water Cooled Crystal Holder 5
15
/M3
1Adjustable to suit chamber size
Figure 3 -Dimensions
6Water Cooled Crystal Holder
3INSTALLATION
3.1 Unpack and inspect
Remove all packing ma terials and protecti vecovers and check the Water Cooled Crystal Holder,
Crystals and Oscillator Unit.
If any of the products is damaged,notify your supplier and the carrier in writing within three
days;statetheItem Number of theproduct togetherwith your order number andyou
invoice number. Retainall packing materialsfor inspection. Do not usethedamaged item.
Checkthat your packagecontainstheitemslisted below. If any of theseitems is missing, notify
your supplier in writing within threedays.
Water Cooled Crystal Holder
Oscillator Unit
Qty Description Check (.I')
1
1a
a
Oscillator Unit
Set of two co-axial cables
Crystals
Qty Description Check (./)
1Pack of 5 crystals 0
If anyitem isnot tobeusedimmediately, replacetheprotective covers. Storetheitem in suitable
conditions, asdescribedin Section5.
Water Cooled Crystal Holder 7
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