Edwards STP Series Manuale utente

MT-41E-AA1-A

STP Series Turbomolecular Pumps

STP-A2203C3

(First Edition - a)

Instruction Manual

This Manual has extracted difference of the

STP-A2203 series and the STP-A2203C3. For

the "Safety Precautions", installation,

operation and maintenance, read the STP

pump Instruction Manual (A), STP- A2203

series Instruction Manual (B), and STP control

unit Instruction Manual (C).

Keep this Manual in a place where you can

quickly access it at any time.

Jan. 2008

STP-A2203C3 Instruction Manual (excerpt)

INTRODUCTION

Thank you very much for purchasing Edwards’ turbomolecular pump.

The turbomolecular pump is designed to be installed in the vacuum equipment to

exhaust gases from it.

This manual covers all items necessary to ensure safe installation, operation and

maintenance of the following series of the STP-A2203C3 turbomolecular pump:

Model Name Specification

•STP-A2203C3 High-throughput type, chemical specific*1

For the specifications of other models of the STP-A2203C3 pump, contact

Edwards.

In this manual, the above STP pump series is collectively referred to as the "STP

pump".

This Manual picks up the points of difference between the STP-A2203 Series and

the STP-A2203C3. For the "Safety Precautions", installation, operation and

maintenance, read the STP-A2203 Series Instruction Manual (B)".

The difference is as follows:

•Maximum flow rate:Ar 3.04 Pa m3/sec (1,800 SCCM)

*1 Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

STP-A2203C3 Instruction Manual (excerpt)

TABLE OF CONTENTS

1Specifications...................................................................................1-1

1.1 Specifications for the STP Pump ...........................................................................1-1

1.2 External Appearance of the STP Pump .................................................................1-2

TABLES

Table 1.1 Specifications for the STP Pump...............................................................................1-1

FIGURES

Figure 1.1 External Appearance of the STP Pump (STP-A2203C3).........................................1-2

STP-A2203C3 Instruction Manual (excerpt)

1-1

1 Specifications

1.1 Specifications for the STP Pump

Table 1.1 Specifications for the STP Pump

Items Specifications

Inlet port ISO250F

Outlet port KF40

Flange size

Purge port KF10

N2L/s 2,200

Pumping speed *1 H2L/s 1,700

N2>108

Compression ratio*1 H22.5×104

Ultimate pressure *1 Pa (Torr) 10-6 (10-8 order)

Allowable backing pressure Pa (Torr) 400 (3)

Maximum gas flow rate <Ar>*1 *2 Pa m3/sec (SCCM) 3.04 (1,800)

Purge flow rate<N2> Pa m3/sec (SCCM) 8.45×10-2 (50) to 1.69×10-1 (100)

Usable exhaust gas Chlorine or fluorine system gases *3

Rated speed rpm 27,000

(Speed range 13,500～27,000)

Starting time min 7

Stopping time min 8

Baking temperature °C <120

Lubricating oil Not necessary

Mounting position Free

Cooling method Water cooling

Temperature °C 5 to 25

Flow rate L/min 2

Cooling water

Pressure MPa <0.3

Cooling water fitting Rc1/4 (ISO Standard)

Material for fitting Stainless steel

Ambient temperature range °C 0 to 40

Storage temperature range °C –25 to 55

Recommended backing-pump L/min >1,300

Mass kg 61

The values shown in the table are typical.; They are not guaranteed.

*1 : Pumping speed, compression ratio, ultimate pressure and maximum gas flow are measured via a Edwards method. (Ultimate

pressure is measured after baking.)

*2 : The maximum gas flow rate is measured under the following conditions.

･Backing pump: Dry pump, maximum pumping speed is 1,300L/min.

･N

2purge gas flow rate: 50 sccm.

･Ar is vacuumed continuously.

When using the STP pump under different conditions, the maximum gas flow rate may change. In this case, contact

Edwards.

*3 : If you use the following gases, contact Edwards.

･Gasses including alkaline metal, except "Li".

･Gasses including "Ga", "Hg", "In" and "Sn".

･HBr gas

STP-A2203C3 Instruction Manual (excerpt)

1-2

1.2 External Appearance of the STP Pump

φ335

φ296

φ324

φ289

Outlet Port

KF40

Cooling Water Port

2-Rc 1/4(ISO)

4-M16 Depth 32

8-M16 Depth 24

(Screw for Legs)

STP Cable

Connector

237

339

17.5ﾟ

20ﾟ

45ﾟ

168

φ284

55ﾟ

8ﾟ

38ﾟ

60ﾟ

(158)

172

173

309

335

347

396

399

(355)

(379)

φ231

Inlet port ISO250F

30ﾟ

15ﾟ

12-φ11

φ310

VIEW FROM A

Purge Port

Figure 1.1 External Appearance of the STP Pump (STP-A2203C3)

For more information, contact the nearest Service Office.

Manufacturer:

Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN

Telephone: Domestic 047-458-8822

International +81-47-458-8822

Facsimile: Domestic 047-458-8833

International +81-47-458-8833

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