Edwards STP Series Manuale utente
MT-41E-AA1-A
STP Series Turbomolecular Pumps
STP-A2203C3
(First Edition - a)
Instruction Manual
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
This Manual has extracted difference of the
STP-A2203 series and the STP-A2203C3. For
the "Safety Precautions", installation,
operation and maintenance, read the STP
pump Instruction Manual (A), STP- A2203
series Instruction Manual (B), and STP control
unit Instruction Manual (C).
Keep this Manual in a place where you can
quickly access it at any time.
Jan. 2008
STP-A2203C3 Instruction Manual (excerpt)
1
INTRODUCTION
Thank you very much for purchasing Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to
exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-A2203C3 turbomolecular pump:
Model Name Specification
•STP-A2203C3 High-throughput type, chemical specific*1
For the specifications of other models of the STP-A2203C3 pump, contact
Edwards.
In this manual, the above STP pump series is collectively referred to as the "STP
pump".
This Manual picks up the points of difference between the STP-A2203 Series and
the STP-A2203C3. For the "Safety Precautions", installation, operation and
maintenance, read the STP-A2203 Series Instruction Manual (B)".
The difference is as follows:
•Maximum flow rate:Ar 3.04 Pa m3/sec (1,800 SCCM)
*1 Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)
STP-A2203C3 Instruction Manual (excerpt)
2
TABLE OF CONTENTS
1Specifications...................................................................................1-1
1.1 Specifications for the STP Pump ...........................................................................1-1
1.2 External Appearance of the STP Pump .................................................................1-2
TABLES
Table 1.1 Specifications for the STP Pump...............................................................................1-1
FIGURES
Figure 1.1 External Appearance of the STP Pump (STP-A2203C3).........................................1-2
STP-A2203C3 Instruction Manual (excerpt)
1-1
1 Specifications
1.1 Specifications for the STP Pump
Table 1.1 Specifications for the STP Pump
Items Specifications
Inlet port ISO250F
Outlet port KF40
Flange size
Purge port KF10
N2L/s 2,200
Pumping speed *1 H2L/s 1,700
N2>108
Compression ratio*1 H22.5×104
Ultimate pressure *1 Pa (Torr) 10-6 (10-8 order)
Allowable backing pressure Pa (Torr) 400 (3)
Maximum gas flow rate <Ar>*1 *2 Pa m3/sec (SCCM) 3.04 (1,800)
Purge flow rate<N2> Pa m3/sec (SCCM) 8.45×10-2 (50) to 1.69×10-1 (100)
Usable exhaust gas Chlorine or fluorine system gases *3
Rated speed rpm 27,000
(Speed range 13,500～27,000)
Starting time min 7
Stopping time min 8
Baking temperature °C <120
Lubricating oil Not necessary
Mounting position Free
Cooling method Water cooling
Temperature °C 5 to 25
Flow rate L/min 2
Cooling water
Pressure MPa <0.3
Cooling water fitting Rc1/4 (ISO Standard)
Material for fitting Stainless steel
Ambient temperature range °C 0 to 40
Storage temperature range °C –25 to 55
Recommended backing-pump L/min >1,300
Mass kg 61
The values shown in the table are typical.; They are not guaranteed.
*1 : Pumping speed, compression ratio, ultimate pressure and maximum gas flow are measured via a Edwards method. (Ultimate
pressure is measured after baking.)
*2 : The maximum gas flow rate is measured under the following conditions.
･Backing pump: Dry pump, maximum pumping speed is 1,300L/min.
･N
2purge gas flow rate: 50 sccm.
･Ar is vacuumed continuously.
When using the STP pump under different conditions, the maximum gas flow rate may change. In this case, contact
Edwards.
*3 : If you use the following gases, contact Edwards.
･Gasses including alkaline metal, except "Li".
･Gasses including "Ga", "Hg", "In" and "Sn".
･HBr gas
STP-A2203C3 Instruction Manual (excerpt)
1-2
1.2 External Appearance of the STP Pump
φ335
φ296
φ324
φ289
Outlet Port
KF40
Cooling Water Port
2-Rc 1/4(ISO)
4-M16 Depth 32
8-M16 Depth 24
(Screw for Legs)
STP Cable
Connector
16
237
339
17.5ﾟ
20ﾟ
45ﾟ
168
φ284
55ﾟ
8ﾟ
38ﾟ
60ﾟ
(158)
172
173
309
335
347
396
399
(355)
(379)
φ231
Inlet port ISO250F
30ﾟ
15ﾟ
12-φ11
φ310
A
VIEW FROM A
Purge Port
Figure 1.1 External Appearance of the STP Pump (STP-A2203C3)
Copyright 2008 Edwards Japan Limited. All rights reserved.
For more information, contact the nearest Service Office.
Manufacturer:
Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN
Telephone: Domestic 047-458-8822
International +81-47-458-8822
Facsimile: Domestic 047-458-8833
International +81-47-458-8833
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