INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
2P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
Introduction
This manual is for use with a standard
InVue®Integrated Flow Controller,
Models NT6510 and NT6520. These
instruments have been designed for
use in high-purity fluid applications
within industries that need tightly
controlled chemical processes such
as the semiconductor, biomedical,
and solar cell industries. The wetted
parts are constructed with Modified
PTFE, PTFE, PFA, or other similar
high-purity inert materials.
WARNING! Attempting to install or
operate standard InVue Integrated
Flow Controllers without reviewing
the instructions contained in this
manual could result in personal
injury or equipment damage.
IDENTIFYING NONSTANDARD
PRODUCT CONFIGURATIONS
—
This User Guide applies to product
manufactured as the standard InVue
Integrated Flow Controller. Entegris
also manufactures nonstandard
product to meet the needs of specific
applications. Nonstandard product
may have dierent materials of
construction, accuracy specifications,
performance, and other specifications
that dierentiate the nonstandard
product from the standard oering.
NOTE: Nonstandard InVue Integrated
Flow Controllers may be identified
by the model number found on the
product label. Specifications for
nonstandard InVue Integrated Flow
Controllers are available by contacting
Entegris.
Nonstandard InVue Integrated Flow
Controllers, Model NT6510, are
identified with an “N" followed by
a number code.
For example, in part number
6510-T2-F03-B06-A-P7-U3-N02,
the “N02" designates the product
as a nonstandard product manu-
factured to certain specifications
designated under the “N02" code.
Nonstandard InVue Integrated Flow
Controllers, Model NT6520, are
identified with an “R" followed by
a number code.
For example, in part number
6520-T6-F03-B06-A-P7-U3-R02,
the “R02" designates the product
as a nonstandard product manufac-
tured to certain specifications
designated under the “R02" code.
Contact Entegris for assistance with
nonstandard product applications.
PRINCIPLE OF OPERATION
—
The user provides a setpoint signal
that corresponds to the desired
amount of flow. The standard InVue
Integrated Flow Controller compares
the setpoint to the actual flow signal
from the flow module. If the actual
flow is greater than the setpoint, the
unit closes the valve. If the actual
flow is less than the setpoint, the unit
opens the valve. The flow controller
does this in a precise manner until
the actual flow signal is equal to
the setpoint.
