Inficon PGE500 Manuale utente

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Pirani Gauge Enhanced

PGE500

With DeviceNet

Operating Manual

Incl. EU Declaration of Conformity

2tinb60e1 (2020-07)

Product Identification

In all communications with INFICON, please specify the infor-

mation given on the product nameplate. For convenient refer-

ence copy that information into the space provided below.

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Validity

This document applies to products with part numbers:

The part number (PN) can be taken from the product nameplate.

This User Manual is applicable to the INFICON® model PGE500

product with Device Net interface manufactured with firmware

number FW 2998-101 and higher (last three digits of 101 or

higher). See STATUS menu described in section 4.6.4of this

manual to determine the firmware version of your PGE500

We reserve the right to make technical changes without prior

notice.

4tinb60e1 (2020-07)

Important User Information

There are operational characteristic differences between solid

state equipment and electromechanical equipment. Because of

these differences, and because there are a variety of uses for

solid state equipment, all persons that apply this equipment must

take every precaution and satisfy themselves that the intended

application of this equipment is safe and used in an acceptable

manner.

In no event will INFICON be responsible or liable for indirect or

consequential damages that result from the use or application of

this equipment.

Any examples or diagrams included in this manual are provided

solely for illustrative purposes. Because of the many variables

and requirements imposed on any particular installation,

INFICON cannot assume responsibility or liability for any actual

use based on the examples and diagrams.

No patent liability is assumed by INFICON with respect to use of

information circuits, equipment, or software described in this

manual.

Throughout this manual we use notes, notices and apply inter-

nationally recognized symbols and safety messages to make

you aware of safety considerations.

tinb60e1 (2020-07) 5

Identifies information about practices or circumstances that can

cause electrical or physical hazards which, if precautions are not

taken, could result in death or serious injury, property damage,

or economic loss.

Identifies information about practices or circumstances that can

cause electrical or physical hazards which, if precautions are not

taken, could result in minor or moderate injury, property damage,

or economic loss.

Identifies information that is critical for successful application and

understanding of the product.

Labels may be located on or inside the device to alert people

that dangerous voltages may be present.

CAUTION

NOTICE

SHOCK HAZARD

6tinb60e1 (2020-07)

General Safety Instructions

•Adhere to the applicable regulations and take the necessary

precautions for the process media used.

Consider possible reactions with the product materials.

Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

•Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the

safety instructions in this document.

•Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations

and take the necessary precautions when handling contamin-

ated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null

and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.)

on the product

•use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the

process media used.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. Pirani filament), are not covered by the

warranty.

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Contents

Product Identification 2

Validity 3

Important User Information 4

General Safety Instructions 6

Liability and Warranty 6

1Introduction / General Information 9

1.1 Description 9

1.2 Specifications 10

1.3 Dimensions 12

2Important Safety Information 13

2.1 Safety Precautions - General 13

2.2 Safety Precautions - Service and Operation 14

2.3 Electrical Conditions 15

2.3.1 Proper Equipment Grounding 16

2.3.2 Electrical Interface and Control 16

2.4 Overpressure and use with hazardous gases 17

2.5 Gases other than Nitrogen / air 18

3Installation 18

3.1 Mechanical Installation 18

3.2 Electrical Installation 21

3.2.1 Grounding 21

3.2.2 Electrical Connections 22

4Setup and Operation 23

4.1 User Interface Basics 23

4.2 DeviceNet and Module Status LEDs 24

4.3 DeviceNet Setup Switches 25

4.3.1 Data Rate Switch Setting 26

4.3.2 Node Address Switch Setting 26

4.4 Initial Setup 27

4.5 Factory-Set Default Parameters 28

4.6 Programming 30

4.6.1 DISPLAY 30

4.6.2 STATUS 32

4.6.3 DEFAULTS 32

4.6.4 CALIBRATION 33

4.6.5 RELAYS 34

8tinb60e1 (2020-07)

5Using the gauge with different gases 37

6Display 40

6.1 Display - Torr 40

6.2 Display - mBAR 44

7DeviceNet Operation 48

7.1 Supported DeviceNet Objects for ODVA compliance 48

7.2 Supported DeviceNet Objects compliant with Semi

Guidelines 49

7.3 Other supported DeviceNet Objects 49

7.4 Configuring the DeviceNet switches 49

7.5 Allocating DeviceNet connections to the PGE500 50

7.6 Configuring Expected Packet Rate 50

7.7 Configuring Polled I/O data format 51

7.8 UINT 2 byte integer pressure 52

7.9 DeviceNet Protocol for PGE500 52

7.9.1 Standard Objects 54

7.9.1.1 Identity Object 54

7.9.1.2 DeviceNet Object 55

7.9.1.3 Connection Object - Explicit Message Connection 56

7.9.1.4 Connection Object - Polled I/O Data 57

7.9.1.5 Discrete Output Point Object 58

7.9.1.6 S-Device Supervisor Object 59

7.9.1.7 S-Analog Sensor Object 60

7.9.1.8 S-Gas Calibration Object 61

7.9.1.9 Trip Point Object 62

8Service 63

8.1 Calibration 63

8.2 Maintenance 63

8.3 Troubleshooting 64

8.4 Contamination 66

8.5 Module and sensor replacement 68

9Factory Service and Support 74

10 Returning the Product 75

11 Disposal 75

12 Spare Parts 77

EU Declaration of Conformity 78

For cross-references within this document, the symbol (→XY)

is used.

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1 Introduction / General Information

1.1 Description

Thermal conductivity gauges measure pressure indirectly by

sensing the loss of heat from a sensor to the surrounding gases.

The higher the pressure of the surrounding gas, the more heat is

conducted away from the sensor. Pirani thermal conductivity

gauges maintain a sensor (usually a wire) at some constant tem-

perature, and measure the current or power required to maintain

that temperature. A standard Pirani gauge has a useful measur-

ing range of about 10-4 Torr to 10 Torr. By taking advantage of

convection currents that are generated above 1 Torr, convection-

enhanced Pirani gauges increase the measuring range to just

above atmosphere.

The INFICON®PGE500 module provides the basic signal condi-

tioning required to turn a convection vacuum gauge into a com-

plete measuring instrument. This version of the PGE500 pro-

vides a DeviceNet interface as well as two process control set-

point relays. Additionally a built-in OLED digital display provides

the measured pressure values and provides for a convenient

user interface for setup and operation of the vacuum gauge. The

INFICON PGE500 module will also directly replace the

DeviceNet version of the Granville-Phillips® / MKS Mini-Convec-

tron® vacuum gauge as the electrical connector pin-out and

DeviceNet commands are identical to the corresponding Mini-

Convectron®.

10 tinb60e1 (2020-07)

1.2 Specifications

Measurement range 1.3×10-4 … 1333 mbar

1×10-4 … 1000 Torr

1.3×10

-2

Pa … 133 kPa

Accuracy - N2(typical)

1×10-4 … 1×10-3 Torr

1×10-3 … 400 Torr

400 … 1000 Torr

0.1 mTorr resolution

±10% of reading

±2.5% of reading

Repeatability - N2(typical)

±2% of reading

Display

bright OLED

Scientific notation: 3 digits plus 2 digit exponent for user se-

lectable units in Torr, mbar or Pa.

Engineering notation is also user selectable for Torr/mTorr

only.

Materials exposed to vacuum gold-plated tungsten, 304 & 316

stainless steel, glass, nickel,

Teflon

Housing (electronics)

aluminum extrusion

Internal volume

26 cm

(1.589 in

)

Internal surface area

59.7 cm

(9.25 in

)

Weight

340 g (12 oz.)

Permissible temperature

Operating

0 … +40 °C

Storage

–40 … +70 °C

Bakeout temperature ≤150 °C (gauge only - electro-

nics removed)

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