MKS HPS 917 Manuale utente
HPSTM Products Series 917
PiraniVacuum Sensor System
OPERATION AND
MAINTENANCE MANUAL
Pirani Vacuum Sensor System
HPS™ Products Series 917
PiraniVacuum Sensor System
AUGUST 1999
PART #109170020 REV.B
Pirani Vacuum Sensor System
Part#1091700XX
– __ __
Serial # __ __ __ __ __ __
Please fill in these numbers and have
themreadily availablewhen callingfor
serviceoradditionalinformation.
(The part number can be found on your
packing slip, and the serial number is
located on the back panel of the Pirani
controller.)
© 1994, 1996 by MKS Instruments Inc., HPSTM Products Inc. All rights reserved.
SensaVacisatrademarkofMKSInstruments,Inc.
TeflonisaregisteredtrademarkofDuPontCo.
VCR®isaregisteredtrademarkofSwagelok®Company.
Formoreinformation orliterature,contact:
MKS Instruments Inc., HPSTM Products, Inc.
5330SterlingDrive
Boulder,CO80301USA
Phone: 303-449-9861
800-345-1967
FAX: 303-442-6880
Pirani Vacuum Sensor System
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual.................................................... 1
Safety Precautions and Other Procedures ................................ 2
Specifications............................................................................ 4
Controller................................................................................................. 4
SensorTube ............................................................................................ 5
Feature and Control Locations .................................................. 6
Typical Applications for the Series 917 Pirani System .............. 7
About the HPS™ Series 917 Pirani Vacuum Sensor System.... 8
Installing the Series 917 Pirani System..................................... 9
Pirani Sensor Installation ........................................................................ 9
Location............................................................................................................................ 9
Orientation........................................................................................................................ 9
Contamination .................................................................................................................. 9
Venting to Atmosphere.................................................................................................... 9
Vacuum Connection ........................................................................................................ 9
PiraniControllerInstallation....................................................................10
Controller Mounting ....................................................................................................... 10
Electrical Connection of the Pirani Sensor to the Controller ...................................... 10
AC Power Cord.............................................................................................................. 11
Fuse Replacement ........................................................................................................ 12
Accessory Connector................................................................................................... 12
Relay Inductive Loads and Arc Suppression .............................................................. 13
Operating the Series 917 Pirani System.................................. 14
Reading Pressure ...................................................................................14
Adjusting the Set Points ................................................................................................ 15
Buffered Analog Output................................................................................................. 16
Use with Computers...................................................................................................... 16
Leak Detection............................................................................................................... 16
Using the Series 917 Pirani System with Other Gases............ 18
CalibratingforOther Gases ....................................................................18
CalibratingforDirect Measurement ........................................................18
Maintaining the Series 917 Pirani System............................... 19
TroubleshootingandService...................................................................19
CleaningtheSeries917Pirani ControllerFront Panel.............................19
Testing the Pirani Sensor ............................................................................................. 20
Cleaning the Pirani Sensor ........................................................................................... 20
Accessories............................................................................. 21
ProductWarranty ..................................................................... 22
Notes....................................................................................... 23
Pirani Vacuum Sensor System
1Pirani Vacuum Sensor System
Please be sure that your Series 917 Pirani Vacuum Sensor System package
contains these items:
1 Series 917 Pirani Controller
1female,15-pin,subminiatureD(D-sub)accessoryconnector
1 power cord
1 HPS™ Series 917 Pirani Vacuum Sensor System
User'sManual
The Series 917 System's Pirani Sensor and its connecting cable are sold
separately.Pleaserefer to page21for necessaryorderinginformation.
If any items are missing from the package, call HPSTM Customer
Serviceat1-303-449-9861or1-800-345-1967.
If the unit has been damaged in shipping, notify the carrier immediately. Keep
all shipping materials and packaging for claim verification.
Package Contents
The first two symbols below, located on your Series 917 Controller and/or
Sensor, identify critical safety concerns. They are used throughout this
manual to further define the safety concerns associated with the part.
The last two symbols identify other information in this manual that is
essential to highlight or useful in achieving optimal performance from the part.
CAUTION: Risk of electrical shock.
CAUTION: Refertomanual.
Failure to heed message could result in personal injury and/or
seriousdamage tothe equipment.
Failure to heed message could result in damage to the
equipment.
Informationcallingattentiontoimportantprocedures,
practices, or conditions.
Symbols Used in this Manual
2Pirani Vacuum Sensor System
Do not use te Serie 917 System's Pirani Sensor with
explosive gas mixtures or with gases that are
combustible in air.
If the control circuit fails or an exothermic catalytic reaction occurs at the
sensor wire, the wire could ignite the gas mixture.
Prevent chances of explosion when using with gases other
than air or nitrogen.
The sensor is calibrated for air/nitrogen, so the measured pressure will differ
fromthetrue pressure of anothergas.Calibrations diverge widelyathigher
pressures. With no linear relationship for the gases, a gas correction factor
couldleadtohazardousoverpressure.Capacitancemanometersand
mechanical dial gauges are best suited for higher pressures. Refer to page 18
for use with other gases.
Takeprecautionstoavoidoverpressureduring
systembackfill.
When backfilling, do not use the Series 917 Pirani System to read pressures
above 100 Torr. In a system which is filled with a pressurized source, install a
safety relief valve or burst disc to safely limit pressure and prevent an
explosion.
The Series 917 Pirani Controller contains lethal voltages
within the casing.
Avoid the danger of electrical shock. Disconnect the power cord before
openingtheControllercase.
Turn off power to the Controller before plugging or
unplugging cables to the Sensor.
TheControlleris groundedthroughthe conductorofthe powercord.Plug the
cord only into a properly grounded outlet. If the protective ground connection
is lost, all accessible conductive parts may pose a risk of electrical shock.
Prevent personnel injury by making sure that only qualified
techniciansservice theSeries 917Pirani System.
Safety Precautions and
Other Procedures
3Pirani Vacuum Sensor System
Nooperations personnelshould removecovers, casings,or plug-in
components. Any part replacement or internal adjustments must be
performed by a qualified technician only.
To prevent damage to the Series 917 Pirani Controller, use
the correctlinevoltage.
The Controller must be used with only the specified line voltage. Use only a
fuse of the correct type, voltage, and current rating. Only qualified personnel
should change line voltage or fuse ratings if required.
Outside of the U.S., use only a harmonized, detachable cord set that has
conductors with a cross-sectional area equal to or greater than 0.75 mm2.
Power cables should be approved by a European agency such as VDE,
Semko, or SEV.
The Series 917 Pirani System and all its accessories must be
used as instructed by MKS Instruments, HPS
TM
Products, to
ensure safe operation. Use or modification of the equipment
in a manner notconsistentwith specificationsmayrender
theproduct'sinherentprotectionuseless.
4Pirani Vacuum Sensor System
Specifications
Controller
MeasuringRange 1.0 x 10-3 to 7.6 x 10+2 Torr
1.0 to 7.6 x 10+5 mTorr
1.0 x 10-3 to 1.0 x 10+3 mbar
1.0 x 10-1 to 1.0 x 10+5 Pa
UsefulSetPointRange 5.0 x 10-3 to 1.0 x 10+2 Torr
5.0 to 1.0 x 10+5 mTorr
6.5 x 10-3 to 1.3 x 10+2 mbar
6.5 x 10-1 to 1.3 x 10+4 Pa
OperatingTemperatureRange 0oto 50oC (32oto 122oF)
StorageTemperatureRange -10oto55oC(14oto131oF)
OperatingHumidity 95%maximum(noncondensing)
InstallationCategory OvervoltageCategoryII,
PollutionDegree2
NumberofChannels 1
FrontPanelControls 2nonvolatile,independentrelayset
points; power on-off switch
RelayContactRating SPDT, 2 A @ 50 VAC resistive
2 A @ 30 VDC
RelayResponse 150 msec maximum
PowerRequirement 90 to 130 VAC, 50/60 Hz
or
210 to 250 VAC, 50/60 Hz
PowerConsumption 7 W
Output Voltage 0.03to3.25VDCbuffered analog,
1 kWmaximum impedance
Fuse Rating, Size T 0.1 A, Ø 5 mm x 20 mm
for 90 to 130 VAC,
T 0.04 A, Ø 5 mm x 20 mm
for 210 to 250 VAC
Indice
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