Pfeiffer Vacuum TSH 071 E Manuale utente

Operating Instructions

Turbomolecular Drag Pumping Stations,

Economy Version

TSH 071 E / TSU 071 E

PT 0067 BE/A (0105)

Index

Page

1. Safety Instructions.................................. 3

1.1. For Your Orientation........................................................... 3

1.2. Pictogram Definitions........................................................ 3

2. Understanding The

Pumping Station ...................................... 4

2.1. Main Features..................................................................... 4

2.2. Pumping Station Control ................................................... 4

2.3. Pumping Station Components.......................................... 4

3. Installation............................................... 5

3.1. Preparations For Installation............................................ 5

3.2. Laying The Exhaust Line ................................................... 5

3.3. Venting Units....................................................................... 5

3.4. Electrical Connections ...................................................... 6

3.5. Connecting The Vacuum System .................................... 6

3.6. Cooling ................................................................................. 6

3.7. Connecting The Casing Heating ...................................... 6

3.8. Connections Diagram........................................................ 7

4. Operations................................................ 8

4.1. Lubricant Filling .................................................................. 8

4.2. Before Starting ................................................................... 8

4.3. Starting ................................................................................ 8

4.4. Switching OFF..................................................................... 9

5. What To Do In Case

Of Breakdowns ? ..................................... 9

6. Maintenance............................................ 9

6.1. The Lubricant...................................................................... 9

7. Service.................................................... 10

8. Technical Data....................................... 10

8.1. Dimensions........................................................................ 11

9. Accessories .......................................... 12

10. Spare Parts............................................. 12

Declaration of Contamination .................... 13

Declaration Of Conformity............ (last page)

Please note: Current operating instructions are available via

www.pfeiffer-vacuum.de under ”Infoservice”

Page

1. Safety Instructions

☞Read and follow all instructions in this manual.

☞Inform yourself regarding:

– Hazards which can be caused by the pumping station;

– Hazards which can be caused by your system;

– Hazards which can be caused by the medium being

pumped.

☞Avoid exposing any part of the body to vacuum.

☞Observe the safety and accident prevention regulations.

☞Regularly check that all accident prevention measures are

being complied with.

☞Do not operate the turbo pumping station with open high

vacuum flange.

☞Use at least 4 bracket screws to connect the high vacuum

flange (ISO flange).

☞Do not disconnect the plug between the TC 600 and

accessory components during operations.

☞During operations temperatures of up to 65 °C can arise in

the lower part of the turbopump. Take care to avoid burns!

☞Keep leads and cables well away from hot surfaces

(>70 °C).

☞The unit has been accredited protection class IP 30. When

the unit is operated in environments which require other

protection classes, the necessary measures must be

taken.

☞Do not carry out any unauthorised conversions or

alterations to the turbo pumping station.

☞When returning individual components please observe the

shipping instructions (refer to the operating instructions

for the pumping station components).

Modifications reserved.

1.1. For Your Orientation

In the text

➡Working instruction: here, you have to do something.

Symbols used

The following symbols are used throughout in illustrations.

High vacuum flange

Fore-vacuum flange

Air cooling

Sealing gas connection

Venting connection

Electric connection

Abbreviations used

DCU = Display and Operating unit

TC = Electronic drive unit, turbopump

TPS = Power unit

1.2. Pictogram Definitions

Danger of personal injury.

Danger of damage to the pumping station or to

the system.

Danger of injury from rotating parts.

Danger of burns from touching hot parts.

Attention to particulary important information

on the product, handling the product or to a

particular part of the documentation.

☞

PLEASE NOTE

BEWARE

2. Understanding The Pumping Station

Improper Use

The following, inter alia, is regarded as improper:

– The pumping of corrosive or explosive gases,

– Operating the pumping stations in areas where there is a

danger of explosion,

– Operating in surroundings which require a protection type

superior to IP 30,

– The use of accessory parts not named in these operating

instructions or which have not been agreed with the

manufacturer.

Improper use will cause all guarantees and liability claims to

be null and void.

2.2. Pumping Station Control

Turbomolecular Drag Pumping Station TSH 071 E

1 Turbomolecular Drag Pump TMH 071 P

2 Diaphragm Pump MVP 015-2

2a ON/OFF mains switch diaphragm pump

3 Display And Operating Unit DCU 001

8 Electronic Drive Unit TC 600

29 ON/OFF Pumping Station (located internally)

36 Air Cooling

The pumping stations are of plug and play type and are fully

automatic operating pumping units.

The mains cable is not included with the delivery consignmet

and must therefore be ordered separately (see

"Accessories").

The pumping station can be supplied with or without the

Display And Operating Unit DCU OO1.

The Display And Operating Unit DCU OO1 serves to control

and monitor the pumping station.

The DCU can be detached from the pumping station and ope-

rated with the 3 m long connecting cable as a remote control

and which is included with the delivery.

Cooling

Standard: Air cooling

(5 to 35 °C ambient temperature)

Alternative: Water cooling (Accessory)

Proper Use

– The turbomolecular pumping stations may only be used for

the purpose of generating vacuum.

– The turbomolecular pumping stations may only be opera-

ted in the configuration shown.

Pumping station Pumping station control1)

TSH 071 E TC 600 with TPS 100

TSU 071 E

1) Alteration to the operating parameters with the DCU 001 possible.

Accessory connection to

TC 600:

Air cooling

Venting Valve TVF 005

Turbopump heating

DCU 001 (Accessory):

Pressure gauges (Accessory)

2.3. Pumping Station Componets

Pumping stations TSH 071 E TSU 071 E Operating

Instructions

Pumping station

componets

Turbomolecular Drag- TMH 071 P TMU 071 P PM 800 504 BN

Pump with Electronic

Drive Unit TC 600

Diaphragm Vacuum Pump MVP 015-2 PU 0012 BN

Power Unit TPS 100 PM 800 521 BN

Air cooling PM 800 543 BN

Display And

Operating Unit DCU 001 PM 800 477 BN

(Accessory) and

PM 800 547 BN

36 8

2.1. Main Features

3.2. Fitting The Exhaust Line

When fitting the exhaust line take account of the

instructions in the operating instructions for the

backing pump (Operating Instructions

MVP 015-2; PU 0012 BN).

The exhausted process gases and vapours can

represent a health hazard and can also be envi-

ronmentally damaging.

Comply with all the gas manufacture's safety

instructions.

3.1. Preparations For Installation

Do not carry out any unauthorized

modifications or alterations to the turbo pumping

station.

– Only remove the blank flange on the high and fore-vacuum

side immediately before connecting.

– The lubricant reservoir on turbopumps is fitted and filled

ready for operation.

– Permissible magnetic field ≤4 mT.

– Set up the pumping station on a horizontal surface.

– In order to avoid the build-up of heat when operating the

pumping station, the minimum distances to walls and adja-

cent units should be observed (as shown in the following

illustration).

3. Installation

50 50

3.3. Venting Units

Turbomolecular Drag Pumps TMH/TMU 071 P can be

manually vented with the venting screw (condition on

delivery).

Venting time to atmospheric pressure minimum

30 seconds.

Venting Valve TVF 005 (Accessory)

The Venting Valve TVF 005 can be used in conjuction with the

TC 600 to vent the TMH/TMU 071 P.

Control is via the setting which has been pre-selected on the

Electronic Drive Unit TC 600.

The venting mode on the TVF 005 is selectable via the

DCU 001.

(Dimensions in mm)

3.5. Connecting The Vacuum System

The weight of a vacuum chamber freely flanged

onto the vacuum flange must not exceed 200 N

(corresponds to 20 kg). No unilateral loading on

the high vacuum flange.

Maintain maximum cleanliness when fitting all

high vacuum parts. Unclean components

prolong the pumping time.

➡Only remove the blank cover on the high vacuum flange

when the apparatus is ready for connection so that no

moisture can precipate in the pump; this would prolong the

pumping time needed for attainment of final vacuum.

➡Insert splinter shield for protection against the ingress of

foreign particles in the high vacuum flange (see

”Accessories” for the turbopump).

3.6. Cooling

The pumping stations are equipped with air cooling as

standard; this can be used up to an ambient temperature of

35 °C. If required, a change to water cooling is possible.

Where operations involve casing heating and/or

gas loads, water cooling is necessary (see

"Accessories).

3.7. Connecting The Casing Heating

In order to accelerate the attainment of final pressure, turbo-

pumps and vacuum chambers can be heated. The heating

duration is dependent on the degree of contamination and the

required final pressure. The heating duration should be at

least 4 hours.

Where casing heating is involved, the

turbopump must be water cooled.

High temperatures are generated when heating

turbopumps. There is a danger of burns when

coming into contact with hot parts even after the

casing heating is switched off. As far as

possible, thermally insulate the heating sleeve

and pump casing during installation.

When heating, do not touch the pump casing and heating

sleeve.

The relay box of the casing heater can be secured to the

pumping station casing with 4 screws M4 (see also Section

8.1. Dimensions).

For details on casing heating and its installation please refer

to Operating Instructions PM 800 542 BN.

BEWARE

☞

PLEASE NOTE

☞

PLEASE NOTE

3.4. Electrical Connection

The electrical connection should be carried out

in accordance with local regulations.

Alternating current is required to operate the

pumping station.

Change-over the voltage selection switch

The diaphragm pump has a change-over single phase wide

range motor.

➡Before the installation of the pumping station the local

mains voltage must be ascertained.

➡Using a suitable screwdriver set the voltage change-over

(on the diaphragm pump terminal box cover) to the range

of mains voltage available ( see the adjacent illustration).

Works setting: X = 230 (voltage range 190 - 260 V)

Voltage change-over switch on the diaphragm pump

A Setting marking

X Setting ”230” voltage range 190-260V; 50/60 Hz

Y Setting ”115” voltage range 90-127V; 50/60 Hz

Only change the voltage range on the diaphragm

pump when the pumping station is disconnected

from the mains.

Always check the set voltage range before

switching on the pumping station.

➡Plug in the mains plug (the mains connection cable for the

pumping station is not included in the delivery

consignment, see "Accessories").

➡The pumping station can now be operated.

Accessory Connections

The electrical connection of the accessories:

See 3.8. Connections Diagram.

3.8. Connections Diagram

TC 600

RS 485

REMOTE

HEAT/TMS

VENT

FV PUMP

FAN

n.c.

+24 VDC*/max. 200 mA (supply voltage, DCU)

n.c.

RS 485+/ (DO/RI)

GND* (mass connection, DCU)

RS 485- / (DO/RI)

+24 VDC*/max. 50 mA

Venting release

Motor, turbopump

Pumping station

Heating/Reset

Standby

PWM ON (touch relation 25 -75%)

Switching output 1 (24 VDC / max. 50 mA)

Switching output 2 (24 VDC / max. 50 mA)

GND*

Relay box

Heating

Mains input, heating

115/208/230 VAC

Protection conducter (PE)

Supply voltage, TC

GND

Relay box, Pumping station

FAN

Contact current max.

6 mA / Contact

HEATING

VENTING VALVE

TVF 005

GY/YE

L’

Pressure gauge

MVP 015-2

LNPE

DCU 001

TPS 100

Mains input

115/208/230 VAC

PM 051 668 -S

4.1. Lubricant Filling

– The bearing on the turbomolecular Drag Pump has been

filled with the required amount of lubricant. Changing the

lubricant reservoir should be carried out in accordance

with the instructions in the respective operating

instructions.

– The diaphragm vacuum pump is lubricated for the duration

of its working life.

4.2. Before Starting

The rotor on the turbopump rotates at great

speed. When the high vacuum flange is open

there is a danger of injury and of damage to the

pump resulting from objects falling in.

Therefore never start the turbo pumping station

if the high vacuum flange is open.

➡With water cooling: Open the cooling water supply and

check flow.

➡Plug in mains plug.

The main switch 2a on the diaphragm pump must be set to the

Position ”ON”.

Take care when pumping dangerous gases.

Take account of all the safety

recommendations of the gas manufacturer.

4.3. Starting

Operations without DCU 001

➡Switch on the pumping station with the ON/OFF switch 29

(see Section 2.).

– After a successfully completed (duration approximately 10

seconds) the pumping station will start.

– If, after switching on, the vacuum pump does not start,

please refer to "What To Do In The Case Of Breakdowns ?"

in the respective operating instructions.

– The turbomolecular drag pump runs up automatically. The

running up phase up to the attainment of the rotation

speed switchpoint is dependent on the size of the vacuum

chamber. For the run-up time for the pump please refer to

"Technical Data" in the respective operating instructions.

Before starting the pumping station it is recom-

mended, particularly where the incidence of

water vapour is to be anticipated, to open the

gas ballast valve on the backing pump by hand.

If it is ascertained that the intake pressure

increases or is abnormally high, the valve can be opened

when the pumping station is running. Once the final pressure

has stabilized, the valve can be closed again.

HINWEIS

☞

345

Display And Operating Unit DCU 001

1 LCD Display

2 Status display

3 Key "malfunction

acknowledment”

4 Key ”Left"

5 Key "Right"

4. Operations

6 Key "Pumping Station ON/OFF"

7 Red illuminating diode for

malfunction status

8 Green illuminating diode for

operations status

Operations with DCU 001

The DCU 001 serves to control and monitor the pumping

station.

➡Switch on the ON/OFF switch 29 (see Section 2.).

➡Remove bridges 1–4 on the TC 600.

➡Select [P:794] «Param. Set» and set to «1».

➡Check relevant set value data and setting commands

(see operating instructions ”Pumping Operations

With The DCU”).

➡Select [P:023] «Motor TMP» and set to «ON».

➡Switch on the pumping station with the key on the DCU.

Turbopump Run-Up

If the self-test has been successfully completed, the

turbopump begins to run and the backing pump starts. During

the pre-set run-up time [P:700] the rotation speed switchpoint

[P:701] must be attained. Both parameters can be matched to

the process. If a malfunction code is displayed please refer to

the malfunction code table, Section Kap. 4. in the operating

instructions ”Pumping Operations With The DCU”.

When the malfunction has been acknowledged, the run-up

starting time will be renewed.

Operation with mains voltages 90 - 132 V

With this operations voltage the power output

of Power Pack TPS is reduced by 20% . For this

reason the power take-up on the pump must be

matched correspondingly with the help of a dri-

ve unit DCU via Parameter [P:794].

➡Select [P:794]

] «Param. Set» and set to «1».

➡Select [P:029]

➡Set to «1» = reduces the power take-up TC 600.

If matching is not carried out, during the run-up phase there

will appear the malfunction signal "E001” or "F007”.

Further details can be found in the following operating

instructions:

– PM 800 477 BN; Display And Operating Unit DCU

– PM 800 547 BN; Pumping Operations With DCU.

4.4. Switching OFF

Operations without DCU 001

➡The complete pumping station is switched off with the

ON/OFF switch 29 (see Section 2.).

– The pump and the vacuum chamber can be vented directly

after switching off (see Section 3.3.).

– Where Venting Valve TVF 005 is in use, when the venting

frequency undershoots 50% of the final rotation speed the

venting valve opens for 0.3 seconds and then closes again

for 10 seconds and re-opens on undershooting approxima-

tely 30% of the final rotation speed.

– The venting mode can be altered via the DCU 001.

The pumping station is only free of voltage

when the mains plug is disconnected.

6. Maintenance

5. What To Do In The Case Of Breakdowns ?

Maintenance of the individual components of

the pumping station should be carried out in

accordance with the relevant operating

instructions (see Section 2.3.).

6.1. Lubricant

– The bearing on the diaphragm vacuum pump is lubricated

for the duration of its working life.

– The lubricant reservoir on the turbopump should be

changed at least once a year; where extreme loads or

unclean processes are involved, more frequently.

☞

PLEASE NOTE

The elimination of malfunctions is described in the operating

instructions for the individual components (operating instruc-

tions see Section 2.3.).

Lubricant Reservoir, turbopump Order number

TMH 071 P PM 073 073 -T

TMU 071 P

Operations With DCU 001

➡Switch off the pumping station with key on the

DCU 001.

Further details can be found in the following operating

instructions:

– PM 800 477 BN; Display And Operating Unit DCU

– PM 800 547 BN; Pumping Operations With The DCU.

➡If the pumping station is switched off for longer periods,

the ON/OFF switch 29 (see Section 2.) should also be swit-

ched off.

The pumping station is only free of voltage

when the mains plug is disconnected.

8. Technical Data

Pumping Station Unit TSH 071 E TSH 071 E

TSU 071 E

Connection, nominal diameter DN 40 ISO-KF DN 63 ISO-K

DN 63 CF-F

Volume flow rate for

Nitrogen N2l/s 33 60

Helium He l/s 38 55

Hydrogen H2l/s 37 45

Compression rate

N2> 1011

He 1 · 107

H2> 105

Final pressure mbar < 10-8

Start-up time min 2

Working range

from mbar 1000

to mbar < 1 · 10-8 < 1 · 10-9

Backing pump volume flow rate

at 10 mbar 50 Hz l/min ≤3,8

60 Hz l/min ≤4,4

Duration-/max. power1) W 100/110

Mains connection VAC 90-132/ 185-265

Weight kg 15 15/16

Please refer to the relevant operating instructions for

technical data on the individual components (see Section

2.3.).

1) With maximum gas throughput.

7. Service

Do make use of our service facilities

In the event that repairs are necessary on your pumping stati-

on a number of options are available to you to ensure any

system down time is kept to a minimum:

– Have the pump repaired on the spot by our PFEIFFER

Service Engineers,

– Return individual components to the manufacturer for

repairs,

– Replace individual components.

Local PFEIFFER representatives can provide full details.

Before returning:

➡Please attach a clearly visible notice "Free of harmful sub-

stances" (both on the unit and also on the delivery note

and any accompanying letters).

"Harmful substances" are substances and preparations as

defined in the current, local, dangerous substances regulati-

ons; in the U.S.A. as

"materials in accordance with the Code of Federal

Regulations (CFR) 49 Part 173.240 Definition and Preparation".

We will carry out the decontamination and invoice this work

to you if you have not attached this note. This also applies

where the operator does not have the facilities to carry out

the decontamination work. Units which are contaminated

microbiologically, explosively or radioactively cannot be

accepted as a matter of principle.

Fill out the declaration of contamination

➡In every case the "Declaration of Contamination" must be

completed diligently and truthfully.

➡A copy of the completed declaration must accompany the

unit; any additional copies must be sent to your local

PFEIFFER Service Center.

Please get in touch with your local PFEIFFER representatives

if there are any questions regarding contamination.

Decontaminate units before returning or possi-

ble disposal. Do not return any units which are

microbiologically, explosively or radioactively

contaminated.

Returning contaminated units

If contaminated have to be returned for maintenance/repair,

the following instructions concerning shipping must be follo-

wed:

➡Neutralise the pump by flushing with nitrogen or dry air.

➡Seal all openings to the air.

➡Seal pump or unit in suitable protective foil.

➡Ship units only in appropriate transport containers.

Repair orders are carried out according to our

general conditions of sale and supply. If repairs

are necessary, please send the pump to your

nearest PFEIFFER Service Center.

Contact addresses and telephone hotline

Contact addresses and telephone numbers can be found on

the back cover of these operating instructions.

☞

PLEASE NOTE

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