Siargo FS4100 Series Manuale utente

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FS4100

User Manual

MEMSmassflowsensors

VA.0

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www.Siargo.com

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FS4100UserManual

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Gas Mass Flow Meter

withMEMSthermaltime‐of‐flightsensingtechnology

FS4100Series

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User Manual

DocumentNo. 08‐2021‐FSN1EN

Issuedate:  2021.08

Revision:  VA.0

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SiargoLtd.

3100DeLaCruzBoulevard,Suite210

SantaClara,CA95054

USA

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Tel:+1(408)969.0368

Email:[email protected]

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©Copyright2021bySiargoLtd.

SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions

withoutpriornotice.Forfurtherinformationandupdates,pleasevisit:www.Siargo.com

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www.Siargo.com

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FS4100UserManual

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Attention!

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Usewithcaution!

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Pleasecarefullyreadthismanualpriortooperatingthisproduct.

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Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable

damage.

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Donotusethisproductifyoususpectanymalfunctionsordefection.

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Donotusethisproductforcorrosivemediaorinastrongvibration

environment.

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Usethisproductaccordingtothespecifiedparameters.

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Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform

productservices.

Becautiousfortheelectricalsafety,evenitoperatesatalowvoltage,

anyelectricalshockmightleadtosomeunexpecteddamages.

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Thegastobemeasuredshouldbecleanandfreeofparticles.Donotapply

thismeterforliquidmedium.

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Donotapplyforanyunknownornon‐specifiedgasesthatmay

damagetheproduct.

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Forremotedata,pleasebesurethemeterisproperlyconfigured.

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www.Siargo.com

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FS4100UserManual

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TableofContents

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1.Overview..................................................................................................5

2.Receipt/unpackoftheproducts................................................................6

3.Knowingtheproducts...............................................................................7

3.1.Productdescription.................................................................................................7

3.2.Poweranddatacabledescription.............................................................................7

3.3.Mechanicaldimensions............................................................................................8

4.Installation...............................................................................................9

5.Operation................................................................................................11

5.1Checktheproductspecifications............................................................................11

5.2Checktheleakage.................................................................................................11

5.3Powertheproductanddigitaldataconnection........................................................11

5.4RS485Modbuscommunicationprotocol.................................................................12

5.4.1Hardwareconnection......................................................................................12

5.4.2Communicationparameters..........................................................................................12

5.4.3Frame............................................................................................................13

5.4.4Functioncodes................................................................................................13

5.4.5Registers........................................................................................................13

5.5Analogoutput(0.5~4.5Vdc).................................................................................16

5.6Pressureloss.........................................................................................................16

6.Productselectionandorderinformation...................................................18

6.1Productselection..................................................................................................18

6.2Ordercontactandcustomersupport.......................................................................18

7.Technicalspecifications............................................................................19

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www.Siargo.com

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FS4100UserManual

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8.Technicalnotesfortheproductperformance.............................................20

8.1Measurementprinciple..........................................................................................20

8.2Precautionsforthebestperformanceoftheproduct................................................20

8.2.1Comparisonwithathirdpartyreferencemeter...............................................................20

8.2.2Particlecontaminationandfluidiccleanness..................................................................21

8.2.3Applytoadifferentgasmedium....................................................................................21

9.Troubleshooting......................................................................................22

10.WarrantyandLiability..............................................................................23

11.Servicecontact........................................................................................25

AppendixI:Productevaluationkit.................................................................26

AppendixII:Documenthistory.......................................................................27

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FS4100UserManual

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1. Overview

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Allcontactinformationcanbefoundattheendofthismanual.

ThismanualprovidesessentialinformationfortheoperationoftheFS4100seriesofgasmassflow

sensorsforgeneral‐purposegasflowmonitorandcontrolapplicationswiththefull‐scalemassflow

ratefrom2to50SLPM,andbothanaloganddigitaloutputs.Theproductperformance,maintenance,

andtrouble‐shootingaswellastheinformationforproductorder,technicalsupport,andrepairare

alsoincluded.

FS4100massflowsensorsareanupgradedversionorthethirdgenerationoftheFS4000sensors

releasedin2008.Itcanbeappliedformedicalequipmentsuchasanesthesiaapplication,endoscope,

andcancertreatment;industrialapplicationsincludingweldingmachine,laserequipment,gas

mixture;andmanymore.Theseriescoversawidedynamicflowrangewithaworkingpressurerating

ofupto0.5MPa(5baror73PSI),andacompensatedtemperaturerangingfrom‐10to55°C.

Theproductsaredesignedwithaneasychangeofmechanicalconnectors.Thestandardconnectors

areBSPT1/4”orone‐touchconnector,andothercustomizedonesareavailableuponrequest.

TheproductsareoperatedwithSiargo’sproprietaryMEMSthermaltime‐of‐flightsensing

technologytogetherwithsmartcontrolelectronics.Thesensorsurfaceispassivatedwithsilicon

nitrideceramicmaterialstogetherwithawater/oilproofnano‐coatingforperformanceand

reliability.Comparedtothepreviouscalorimetricflowsensingtechnology,thisuniquesensing

approachoffersabetterlinearity,removesgassensitivityforgaseswithsimilarthermaldiffusivities,

andimprovesthetemperatureperformance.Therefore,itisthefirstofthekindintheindustrythat

sensesthemassflowwithmultiplegaseswithoutchangingthegasconversionfactor.Assuch,it

ensuresthehighprecisionforgasmeasurementswithaircalibration.

Thecurrentproductisalsohasamuchsmallerformfactorcomparedtothepreviousversions.

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www.Siargo.com

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FS4100UserManual

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2. Receipt/unpackoftheproducts

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Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking

materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand

notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe

orderisnotplaceddirectlywiththemanufacturer,otherwise,themanufacturershouldbeinformed

aswell.Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.

Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct.The

poweranddatacable(partnumber:SN5‐50)asshownbelowmayalsobefoundaccordingtothe

samepackingmaterials.

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 







Figure2.1:FS4100flowsensorFigure2.2:poweranddatacableSN5‐50

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Pleasecheckimmediatelyfortheintegrityoftheproductaswellasthepoweranddatacable,ifany

abnormalisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoonas

youcan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal

saleschannel.Thisusermanualshallalsoeitherbeincludedinthepackingboxorviaanonline

requestforanelectronicversion.Inmostcases,thismanualshallbemadeavailabletothecustomer

beforetheactualorder.

Thestandardcable(partnumber:SN5‐50)hasanAMPMODUMTE(5positions)compatible

connectorwithalengthof0.5meters.



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www.Siargo.com

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FS4100UserManual

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

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3. Knowingtheproducts

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3.1. Productdescription

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Figure3.1:FS4100partsdescription

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3.2. Poweranddatacabledescription



     Table3.1:FS4100pin/wireassignments.



 



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Figure3.2:FS4100connectionandcable

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Note:

1.Thestandardcable(partnumber:SN5‐50)hasanAMPMODUMTE(5positions)compatible

connectorwithalengthof0.5meters.

2.TheRS485Modbusisasynchronous,half‐duplexcommunication.Whenthedataaretransmitted

orreceivedfromtheproduct,theotherpinisservingastheground.



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Wire Color Definition

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Blue

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(RS485)

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/SDA(I

C)

2GreenAnalogoutput,0.5~4.5Vdc

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3RedPowersupply,8~24Vdc

4BlackGround

5YellowA(RS485)/SCL(I

C)

Exchangeable

connector

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Excahngeable

Connector,inlet

Flowdirection

Electricalinterface,AMP

MTE,5positions

Meterbody

Installationscrews(M3X4)

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www.Siargo.com

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FS4100UserManual

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

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3.3. Mechanicaldimensions

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Figure3.3:FS4100dimensionswithBSPT1/4”(R1/4”)connectors

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Figure3.4:FS4100dimensionswithone‐touchconnectors

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Note: *Otherthreadsorcompressivetypescanbecustomized.

**Themountingscrewlength<4mm;andthesuggestedmountingtorque<0.25N∙m.

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www.Siargo.com

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FS4100UserManual

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

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4. Installation

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Donotopenoralteranypartoftheproductwhichwouldleadtomalfunctionandirrecoverable

damage.Itwillalsoforfeitthetermsofthewarrantyandcauseliability.

Theproductatthetimeofshipmentisfullyinspectedforitsqualityandmeetsallsafetyrequirements.

Additionalsafetymeasuresduringtheinstallationshouldbeapplied.Thisincludes,butisnotlimited

totheleakageverificationprocedures,standardEDS(electrostaticdischarge)precautions,DC

voltageprecautions.Othertaskssuchascalibration,partreplacement,repair,andmaintenance

mustonlybeperformedbytrainedpersonnel.Uponrequest,themanufacturerwillprovide

necessarytechnicalsupportand/ortrainingofthepersonnel.

Therearenopreferredspacedirectionsfortheinstallation.Flowdirectionshouldbealignedwiththe

arrowmarkonthemeterbody.Iftheflowingfluidmayhaveparticlesordebris,afilterisstrongly

recommendedtobeinstalledupstreamofthemeter.

Pleasefollowthefollowingstepstocompletetheinstallation:

a)Uponopeningthepackage,theproduct'sphysicalintegrityshouldbeinspectedtoensureno

visualdamage.

b)Beforeinstallationoftheproduct,pleaseensurethatthepipedebrisorparticlesoranyother

foreignmaterialsarecompletedremoved.

c)Closetheupstreamvalve,ifany,completely.

d)Duringinstallation,pleasemakesurenoforeignmaterials(suchaswater,oil,dirt,particles,etc.)

enteringintotheinstallationpipeline.

e)ConnectelectricalwiresperthewiredefinitioninTable3.1.Pleasebesureofthepowersupply

range(i.e.,8~24VDC)andpowersupplypolarization.Ifanadapterisused,makesurethe

adaptermeetsindustrialstandardsandhasallsafetycertifications.Alternatively,thisproduct

canalsobepoweredbya9Vdcbattery.

f)Forthedatacommunicationwireconnection,pleasefollowthedescriptioninTable3.1andmake

surethatthewiresarecorrectlyconnectedtotheproperportsonyourdatadevice/equipment.

Pleasemakesurethedatacablemeetsindustrialstandardswithpropershielding.

g)Slowlyopenthevalve(s)ofthegassupplyifany,upstreamordownstream,orbothofthe

pipeline.theproductshouldthenstarttomeasuretheflowinthepipeline.

Note:becausethemeterhasalargedynamicalmeasurementrange,itcouldbenormalif

youseethesmallinstantflowrateevenifthereis“no‐flow”inthepipeline.Ifthe

valueconsistentlypresent,double‐checkthepipeleakageandthenresettheoffsetif

youaresurethereisnoleakageorflow.

h)Thiswillconcludetheinstallation.

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