Strasbaugh 7AA Manuale utente

Version 1.2 - April 18, 1996

Model 7AA

Wafer Grinder

Operation

and

Maintenance

Manual

STRASBAUGH

825 Buckley Road

San Luis Obispo, CA 93401

Phone: (805) 541-6424

Fax: (805) 541-6425

Strasbaugh Table of Contents

Version 1.2 - April 18, 1996; Update 11/6/96 iii U

Table of Contents

Chapter 1 Introduction 1 - 1

About the 7AA Manual 3

About the Model 7AA Wafer Grinder 4

Guarantee/Warranty Certificate 5

Safety 7

General Operation 8

Visual Hazard Alerts 10

Hazard Magnitude Levels 10

Three-Panel Alert Graphics 11

Interlocks - Safety Interlock Door Switches 15

Sprayer Use 16

Slurry Compounds 16

Waste Disposal 16

Lockout Safety Procedure 17

Lockout Procedure 18

Appendix to Lockout Safety Procedure: 20

Training, Lockout/Tagout, Per 29 CFR 1910.147 20

Gallium Arsenide and Germanium Use 22

Material Safety Data Sheets for Products Used in Machine

Maintenance 30

Chapter 2 Installation 2 - 1

Receiving 4

Location 5

Leveling 5

Facilities Requirements 6

Operation and Maintenance Manual Model 7AA Wafer Grinder

iv U Version 1.2 - April 18, 1996; Update 11/6/96

Chapter 3 Machine Description 3 - 1

Control System Overview 3

Power Distribution 3

Servo Control Loop 4

24 VDC Inputs 4

24 VDC Outputs 5

AC Outputs 5

CRT Video 6

Mechanical Overview 7

Grind Assembly Bed 7

Work Spindle Carriage 7

Grind Spindle Support 7

Grind Spindle Feed Mechanism 8

Pneumatic/Fluid System Overview 9

Chapter 4 Operator Functions 4 - 1

Machine Operation Description 3

Overview - Machine Cycle Sequence With Wafer Transport System 3

Wafer Transport System 5

Machine Cycle Sequence Without Wafer Transport System 8

Control Panel 9

CRT Display Menus 10

Special Key Functions 11

Basic Operation 13

Summary 13

Step 1 - Machine Power Up 14

Step 2 - Machine Initialization 15

Step 3 - Grind Parameter Entry 17

Step 4 - Grind Mode Selection 22

Step 5 - Place Cassettes On Elevators 23

Step 6 - Start Machine Auto Cycle 24

Strasbaugh Table of Contents

Version 1.2 - April 18, 1996; Update 11/6/96 vU

Chapter 5 Machine Setup 5 - 1

Machine Parameter Entry 3

Adjust R.P.M.'S 5

Chapter 6 Preventive Maintenance 6 - 1

Daily Preventive Maintenance 3

Weekly Preventive Maintenance Schedule 4

Monthly Preventive Maintenance Schedule 6

Chapter 7 Mechanical Maintenance

Procedures 7 - 1

Manual Control Of Machine 4

Grind Operation Procedures 6

Spindle Speed Settings 6

Grind Wheel Replacement 7

Wheel Truing And Dressing 8

Grind Wheel Coolant 10

Work Chuck Replacement 11

Work Chuck Grinding 12

Chuck Grind Mode 12

Procedure 13

Grind Spindle Alignment 14

Spindle Pretravel Adjustment 17

Dynamic Offset 20

Wheel Wear Compensation 22

Determining Work Chuck Position 24

Elevator Calibration 25

Cassette In Place 25

Wafer In Slot 26

Cassette Slot Location 28

Lubrication 30

Operation and Maintenance Manual Model 7AA Wafer Grinder

vi U Version 1.2 - April 18, 1996; Update 11/6/96

Chapter 8 Software Calibration Procedures 8 - 1

Machine Diagnostics 4

Offline Storage Support Utilities 5

Installation 5

Operating Instructions 5

Transfer Grind Parameters From Machine To Disk 'F1' 5

Transfer Grind Parameters From Disk To Machine 'F2' 6

Edit/Create Single Grind Parameters 'F3' 6

Edit/Create Dual Grind Parameters 'F4' 7

Directory Of Grind Parameters 'F5' 7

Directory Of Wafer Data Files 'F6' 7

Active I/O Status Update 'F7' 8

Wafer Capturing Utilities 'F8' 8

Terminal Mode 'F9' 9

Exit To Dos 'F10' 9

Error Messages 9

Password And I.D. Numbers 9

Control Variables And Contacts 10

Chapter 9 Pneumatic Adjustments 9 - 1

Pneumatic Regulator Adjustment 4

Speed Controls 5

Air Bearing Spindle Maintenance 6

Vacuum Switch Adjustment 7

D.I. Water Flow Valves 9

Cooling Water Flow Valve 10

Strasbaugh Table of Contents

Version 1.2 - April 18, 1996; Update 11/6/96 vii U

Chapter 10 Troubleshooting 10 - 1

Frequently Encountered Problem Conditions 3

Error Conditions And Messages 5

Error Condition Lights 7

Servo Error Codes 8

Appendices

Engineering Drawings

Part Lists

Safety Reference

Manufacturers’ Data

Operation and Maintenance Manual Model 7AA Wafer Grinder

viii U Version 1.2 - April 18, 1996; Update 11/6/96

This page intentionally left blank.

Strasbaugh, Inc.

7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 1of 2

REVISION RECORD

for

Manual Update

Machine: Model 7AA Wafer Grinder

Manual Title, Volume (if

applicable), And Version: Operation and Maintenance

Manual; Version 1.1 - Undated

updated with this revision to

Version 1.2, 4/18/96

Revision Record No. and

Date: No. O/M-1.1; 4/18/96

Notes: Changes made in compliance with EC qualification safety requirements.

Summary of changes:

•Manual contents were reorganized and reformatted following organization, layout, and design

standard to current Strasbaugh manuals.

•Operator functions were isolated from maintenance procedures.

•Safety graphics were added to procedures.

•Strasbaugh “generic” safety information package was incorporated in Chapter 1

(Introduction).

•Multiple references were added directing users to Strasbaugh 7AA maintenance video three-

volume set and Giddings and Lewis PiC409 Family User’s Manual.

Strasbaugh, Inc.

7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 2of 2

DIRECTIONS:

1. Discard the manual pages listed in the left column below. Insert the replacement pages listed

in the right column.

2. File this notice after the Table of Contents.

Pages To Be Discarded Pages To Be Inserted

•pp. 1 through 66

(Version 1.1 - undated) •Version 1.2 - 4/18/96 (168 pp. of text -

title pages, detailed table of contents,

chapters 1 through 10, appendices)

Indice

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