Talon TP-60BA Manuale utente
TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
HIGH VISCOSITY PR PUMP Pump & Controller –Built-in type
TALON TECH CO. LTD.
MODEL : TP-60BA
TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
1. System Configurations……………………………………………………….……………..……………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………..…………….
2
2-1. Pump [TP-60BA]……..……………………………………………………………………………………………………...……………...
2
2-2. Touch Pad [TTP-6008]……………………………………………………...…………………………………………………………….
3
3. System In/Exterior Names.……………………….………………………………………………………………………………………..
4
3-1. Pump In/Exterior Names.…………………………………………………...…………………………………….……………………
4
3-1-1. Pump Name Explanation..……….……….……………………………………………………………….………………..….
4
3-2. Touch Pad Exterior Names……………..……….……………………………………………………………………………..……..
5
3-2-1. Touch Pad Name Explanation………………………………………………………………………………………..……...
5
4. Wiring & Signal Interface……………………………………………………………………………………………………..…………..
6
4-1. Track Interface Signal……………………………………………………………………………………………………..……………..
6
4-2. Track Timing Chart…………………………………………………………………………………………………..……………………
7
4-3. Dispense Trigger Select………………………………………………………………………………………………………...……….
7
4-4. CON1 Pin Assign [Track Cable]………………….…………………………………………………………………………………..
8
4-5. CON2 Pin Assign [Start Sol Cable]…………………………………………………………………………………..…………..
9
4-6. 422 In/Out Pin Assign [Communication Cable]………………………………………………………………..…………
9
5. External Cable Length………….…………………………………………………………………………………………………..………..
10
5-1. CON1 Cable………………..………………………………………………………………….……………………………………..………
10
5-2. CON2 Cable……….………………………………………………………………………….………………………………………..…….
10
5-3. 422 In Cable………………………………...…………………………………………………………………………………………..……
10
5-4. 422 Out Cable……………………….……………………………………….....………………………………………………………….
10
6. Touch Pad Operation………………………………………………………………..………………………………………………………..
11
6-1. Operation……………………………………………………………………………..………….……………………………………………
11
6-1-1. Initial Screen…………………………………….……………………………..……….…………………………………………….
11
6-1-2. Pump Condition Indicate In Use..…..………………………………..……………………………………………………
11
6-1-3. Select Function………….……………………………………………...………..………………………………………………….
11
6-1-4. Dispense………………………………………………………………………………..……………………………………………….
12
6-1-5. Recipe……………………………………………………………………………………..………………………………………………
12
6-1-6. Configuration of Pump…………………………………………………………..……………………………………………...
13
6-1-7. ID Setting…………………………………………………………………………………..…………………………………………...
13
6-1-8. Maint Mode, Run Mode, Pump Reset Setting…………………………..………………………………………….
15
6-1-9. Calibration……………………………………………………………………………………..……………………………………….
15
6-1-10. Counter………………………………………………………………………………………..……………………………………..
16
CONTENTS
TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
6-2. Example….………………………………………………………………………..…………………………………………………………….
18
6-2-1. Dispense……………………………………………………………………..………………………………………………………….
18
6-2-2. Recipe Setting…....………………………………………………………..…………………………………………………………
19
6-2-3. ID Setting……………………………………………………………………..………………………………………………………...
20
6-2-4. Name Setting………………………………………………………………..……………………………………………………….
21
6-3. Reset on Pump Error………..………….………………………………………..……………………………………………………...
21
6-4. Log Data…………………………………………………………………………………..……………………………………………………
23
6-4-1. Log Data Analysis ……………………………………………………………..…….…………………………………………….
24
6-5. Touch Pad Menu Tree………………………………………………………………..………………………………………………….
25
6-6. Notice…….……………………………………………………………………………………..……………………………………………….
25
6-6-1. Dispense Cycle………………………………………………………………………………………………………………………..
25
6-6-2. Pump ID Setting……………………………………………………………………………………………………………………..
25
6-6-3. Recipe Setting………………………………………………………………………….…..…………………………………………
25
6-6. Notice on Pump Operation…...……………………………………………………………………………………………………...
26
7. Maintenance………………………………………….……………………………………………………..……………………………………..
27
7-1. Pump Parts Dis/Assembly.………..………………………………………………………….…..…………………………………...
27
7-1-1. Pump Cover Dis/Assembly..……..………………………………………………………..…………………………………..
27
7-1-2. Driving Shaft Condition Check & Grease up on Ball Screw.…...………..………………………………….
27
7-2. Suck-Back Setting………………………………………………………………………………………..………………………………..
28
8. Recommended Spares/Mechanical Dimensions……………………………………………..………………………………
30
8-1. TP-60BA Spare Parts……………………………………………………………………………….……..……………………………..
30
8-2. Pump Dimensions…………………………………………………………………………………………..…………………………….
31
8-2-1. Front View…………………………………………………………………………………………………..…………………….……
31
8-2-2. Side View……………………………………………………………………………………………………..…………………………
31
8-3. Touch Pad Dimensions………………………………………………………………………………………..………………………..
32
8-3-1. Front View……………………………………………………………………………………………………..……………………….
32
8-3-2. Rear View………………………………………………………………………………………………………..………………………
32
8-3-3. Side View…………………………………………………………………………………………………………..……………………
32
8-4. Installation Method…………………………………………………………………………………………………..…………………..
33
8-4-1. Pump Installation Sequence..…..…………………………………………………………………………..………………..
33
8-4-2. Piping Method…………….....………….…………………………………………………………………………..………………
33
8-4-3. Touch Pad Installation Method…..…..………………………………………………………………………..…………...
34
8-4-4. Suggested Recipe Setting Value…….…………………………………………………………………………..…………
35
TP-60BA (Rev 2.2)
- 1 -
TALON TECH CO. LTD.
TP-60BA pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI Software
operates TP-60BA pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects should
be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. It’s the DC serve motor pump, which is suitable for a constant delivery pump.
3. Driving Method : Outer type Edgeless Bellows, No ripple & No shaking.
4. Touch pad has the same function of controller & It can control upto8 pumps.
5. Save Maintenance Time : Purge function, optimized buffer.
6. Normal trigger signal.
System Configurations
1
Touch Panel
Max 8ea
Pump Control
TP-60BA Pump
PR Bottle
Wafer
Dispense Nozzle
Suck-Back V/V
Filter
TP-60BA (Rev 2.2)
- 2 -
TALON TECH CO. LTD.
2-1 Pump [ TP-60BA ]
ITEM
SPEC
REMARKS
Dispense Volume Range
1.0cc ~ 10.0cc
Dispense / Reload Rate
0.3 cc/sec ~ 1.2cc/sec
Dispense Volume Resolution
0.05 cc
Dispense Repeatability
≤±0.05 (0.8cp, 23℃)
Viscosity
50cp ~ 10,000cp
Step Angle Degree
0.3deg / step
Drive System
DC Servo Motor
Pump Type
Outer Type Edgeless Bellows
Control System
Control Board Power : DC 24V (current consumption 2A)
Resist In/Out/Vent
⅜Inch Teflon
Ambient Temperature
5 ∼40 ℃
Weight
5.90kg
Pump Dimension
W : 72mm, D : 339mm, H : 296mm
System Specifications
2
TP-60BA (Rev 2.2)
- 3 -
TALON TECH CO. LTD.
2-2 Touch Pad [ TTP-6008 ]
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max. Connecting Pump No.
8 Pumps
Communication
RS422
Touch Pad Power
DC12~24V, current consumption: 5W (400~700mA)
Ambient Temperature
-10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm
TP-60BA (Rev 2.2)
- 4 -
TALON TECH CO. LTD.
3-1 Pump In/Exterior Names
3-1-1 Pump Name Explanation
①PR In
- Chemical supply. (⅜Inch Teflon)
②PR Out
- Chemical Dispense. (⅜Inch Teflon)
③PR Drain
- Chemical Drain. (⅜Inch Teflon)
④Toggle Valve
- One Touch Toggle Valve for chemical drain.
⑤Buffer Tank
- Bubble removal and buffering function of about 30cc PR.
⑥Pump Connector
- CON1(Track) => Connector for pump operation. (Round Panel Mount 12P Female)
- CON2(Motor) => Connector for pump operation. (Round Panel Mount 5P Female)
- 422IN => RS422 Connector for communication among pumps. (Round Panel Mount 6P Female)
- 422OUT => RS422 Connector for communication among pumps.
(Round Panel Mount 6P male)
System In/Exterior Names
3
②PR Out ⅜”
①PR In ⅜”
④Toggle Valve
⑤Buffer Tank
⑥Pump Connector
③PR Drain ⅜”
TP-60BA (Rev 2.2)
- 5 -
TALON TECH CO. LTD.
3-2 Touch Pad Exterior Names
3-2-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power Source
- Touch Pad Power DC12~24V Connector.
③Com Port (Not Use)
- No Use. (D-SUB 9P Male)
④Com Port
- Touch Pad RS-422 Communication Connector.
①Touch Panel
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)
TP-60BA (Rev 2.2)
- 6 -
TALON TECH CO. LTD.
4-1 Track Interface Signal
Wiring & Signal Interface
4
[Input Signal]
[Output Signal]
TP-60BA (Rev 2.2)
- 7 -
TALON TECH CO. LTD.
4-2 Track Timing Chart
4-3 Dispense Trigger Select
“0”Trigger Off
“1”Trigger On
Recipe
Select
Start1
[1]
Start2
[2]
Start3
[3]
Remark
1
1
0
0
2
0
1
0
3
1
1
0
4
Not supported
Cycle Recipe
5
1
0
1
6
0
1
1
7
1
1
1
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