Telemark TT-10 Manuale utente
MODEL TT-10/15 (T2)
ELECTRON BEAM SOURCE
POWER SUPPLY
INSTRUCTION MANUAL
Part Number 108-0100-2
Copyright © TELEMARK, 1990-1999 - All rights reserved
November, 2000
www.telemrk.com
Brand or product names are trademarks or
registered trademarks of their respective companies
SAFETY WARNING
HIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN THESE
MODULES. GREAT CARE MUST BE EXERCISED WHEN PERFORMING
MAINTENANCE. HUMAN CONTACT WITH THE VOLTAGES CAN BE FATAL.
Make sure that the input power is turned off before removing covers. Short all
capacitors with a grounding hook. Do not test live circuits unless absolutely
necessary.
If it becomes necessary to test live circuits, all test meter connections must be
made with the power OFF. Test leads should be in good repair and have sufficient
insulation for a test voltage of at least twice that to be measured. The test meters
should be securely mounted and should not be touched after power is turned on.
Do not work in cramped spaces or cluttered areas. TROUBLESHOOTING OF
THIS NATURE SHOULD BE CARRIED OUT ONLY BY QUALIFIED PERSONNEL
UTILIZING STANDARD SAFETY PROCEDURES.
DANGER - HIGH VOLTAGE
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Telemark TT-10/15 Power Supplies
WARRANTY
The TT-10/15 Electron Beam Source Power Supplies are guaranteed against
faulty materials, function, and workmanship for a period of 12 months after
shipment from the Telemark factory. This warranty is valid only for normal use
when regular maintenance is performed as instructed. This warranty shall not
apply if repairs have been performed or alterations made by anyone other than an
authorized Telemark representative, or if damage occurs through abuse, misuse,
negligence, or accident. No charge will be made for repairs made at a Telemark
service facility during the warranty period. Simply return the malfunctioning
module, freight prepaid. Telemark reserves the right to determine the appropriate
warranty adjustment.
USER RESPONSIBILITY
The user is responsible for proper installation, operation and ordinary maintenance
of the equipment, following procedures described in this manual. If the user has a
doubt about use or installation of a component, your Telemark representative or
the factory should be called.
It is vitally important that the user properly installs the equipment, with particular
attention to correct grounding methods, as described in Chapter 3 (Installation) of
this manual. The Warranty will be void if the equipment is improperly installed
and/or improperly grounded.
Alteration of the design or any function of the equipment voids the warranty and is
entirely the responsibility of the user.
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Telemark TT-10/15 Power Supplies
TABLE OF CONTENTS
SAFETY WARNING
WARRANTY
USER RESPONSIBILITY
LIST OF ILLUSTRATIONS
1
GENERAL DESCRIPTION
Functional Description ...................1-1
System Components ...................1-2
2
SPECIFICATIONS
Control Module ......................2-1
HV/Power Cabinet .....................2-1
Filament Transformer ...................2-2
Standard XY Sweep with Memory Module ........2-2
3
INSTALLATION
Introduction ........................3-1
Mechanical.........................3-1
System Grounding Practice ................3-1
Inter-module Connections .................3-5
Control Module ......................3-5
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Telemark TT-10/15 Power Supplies
4
CONTROLS AND
INDICATORS
Control Module ......................4-1
HV/Power Cabinet .....................4-4
Standard Sweep Control Module Chassis.........4-5
XY Sweep Controller (with Memory Module) (Optional). . 4-6
Standard Sweep Select Module (Memory Module) ....4-7
5
OPERATION
Introduction ........................5-1
Preliminary Precautions ..................5-1
Startup ...........................5-1
Operation .........................5-2
XY Sweep (with Memory Module) Setup .........5-3
XY Sweep with Memory Module Operation ........5-4
Shutdown .........................5-4
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Telemark TT-10/15 Power Supplies
LIST OF ILLUSTRATIONS
Fig. Title Page
1-A Control General View ........................1-2
1-B Cabinet General View ........................1-3
3-A Single Source Vacuum Tank Grounding Installation. 3-2
3-B Multi Source Vacuum Tank Grounding Installation . . 3-3
3-C Source Filament Transformer Connections........3-4
3-D Source Inter-Module Connections...............3-6
3-E Control Module Connections ...................3-8
3-F HV/Power Cabinet Connections ................3-10
4-A Control Module, Front View....................4-2
4-B HV/Power Cabinet, Front View .................4-5
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Telemark TT-10/15 Power Supplies
1
GENERAL DESCRIPTION
Functional Description
The Telemark Model TT-10/15 Power supply is a direct current, regulated high
voltage power supply. It is intended for use with high volume production EB
(electron beam) sources as used in the vacuum evaporation industry. The
TT-10/15 can be operated from the controller or a remote station.
The TT-10/15 is compatible with EB sources that use electromagnetic deflection or
combinations of electromagnetic deflection and permanent magnet focusing.
Emission current regulated filament power is supplied to the EB sources.
The High Voltage/Power Cabinet is produced to accommodate one, two or three
sources. The number of Source Filament Control modules determines the number
of sources that can be driven.
There are two versions of the TT-10/15 control modules: Source 1 Control and
source 2/3 Control.
The Source 1 Control contains:
1High Voltage Control and digital indicators(There is only one
HV control for the main Power supply.)
2Source 1 Control
Note: Source 1 Control may be used stand-alone or with a Source 2/3 Control.
The Source 2/3 Control contains:
1Source Control
A system of safety interlocks with the vacuum system is provided to protect both
the operator and the equipment.
GENERAL DESCRIPTION 1-1
Telemark TT-10/15 Power Supplies
System Components
The TT-10/15 Electron Beam Power Supply consists of the following:
1HV Control / Source 1 Control Module
2Source 2 Control Module - 2 and 3 source systems only
3Source 3 Control Module - three source systems only
4Sweep Module - one per EB source is also needed in standard
operation
5High Voltage / Power Cabinet
6Filament transformer - one per EB source)
1-2 GENERAL DESCRIPTION
Telemark TT-10/15 Power Supplies
Figure 1-A
Control
General
View
GENERAL DESCRIPTION 1-3
Telemark TT-10/15 Power Supplies
Figure 1-B
Cabinet
General
View
1-4 GENERAL DESCRIPTION
Telemark TT-10/15 Power Supplies
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