Agilent Technologies EasyEXPERT Manuale utente

Agilent Technologies

Agilent EasyEXPERT

Application Library Reference

Notices

No part of this manual may be reproduced

in any form or by any means (including

electronic storage and retrieval or transla-

tion into a foreign language) without prior

agreement and written consent from Agi-

lent Technologies, Inc. as governed by

United States and international copyright

laws.

Manual Part Number

B1500-90050

Edition

Edition 1, August 2006

Edition 2, June 2007

Edition 3, November 2007

Edition 4, October 2008

Edition 5, June 2009

Edition 6, November 2009

Edition 7, September 2012

Edition 8, June 2013

Agilent Technologies

5301 Stevens Creek Blvd 

Santa Clara, CA 95051 USA

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ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

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ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connection

with the furnishing, use, or perfor-

mance of this document or of any

information contained herein. Should

Agilent and the user have a separate

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terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technology Licenses

The hardware and/or software described in

this document are furnished under a

license and may be used or copied only in

accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of

a U.S. Government prime contract or sub-

contract, Software is delivered and

licensed as “Commercial computer soft-

ware” as defined in DFAR 252.227-7014

(June 1995), or as a “commercial item” as

defined in FAR 2.101(a) or as “Restricted

computer software” as defined in FAR

52.227-19 (June 1987) or any equivalent

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subject to Agilent Technologies’ standard

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ernment will receive no greater than

Restricted Rights as defined in FAR

52.227-19(c)(1-2) (June 1987). U.S. Govern-

ment users will receive no greater than

Limited Rights as defined in FAR 52.227-14

(June 1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

In This Document

Agilent EasyEXPERT software contains the application library which supports the

characteristic measurements of CMOS devices, TFT, BJT, diode, resistor, capacitor,

varactor, memory, nanotechnology devices such as CNT FET, and so on. The application

library includes more than one hundred test definitions. And they are classified into the

following categories.

•BJT

•CMOS

•Discrete

• GenericTest

•MCSMU_IV

•Memory

• MixedSignal

• NanoTech

•Organic

• PwrDevice

• Reliability

•Sample

•SolarCell

• SPGU_PLSDIV

• Structure

•TFT

• Utility

•WGFMU

• WGFMU Utility

•WGFMU_IV

•GaNDiode

•GaNFET

•IGBT

• Interconnection

•MISCAP

•PowerBJT

• PowerDiode

• PowerMOSFET

•PMIC

•SiC

What is described in the reference sections

Reference section contains detailed description of test definitions. The test definitions are

listed in alphabetical order. Each entry explains one test definition and provides the

information following to the next terms. Some sections may not follow to some terms and

may follow to the terms not in this table.

Term Description

Description Brief explanation of the test definition.

Device Under Test DUT name. The number of terminals, the connection

information, and the other information may be included.

Required Modules and

Accessories Lists the required accessories, modules, and/or equipment.

The connection information may be included.

Required Test Definition Lists the test definitions if they are used in this test

definition.

Device Parameters Lists the parameters changeable in the Device Parameters

area of the EasyEXPERT Application Test screen.

Test Parameters Lists the parameters changeable in the Test Parameters

area of the EasyEXPERT Application Test screen.

Extended Test Parameters Lists the parameters changeable in the dialog box opened

by clicking the Extended Setup button.

Measurement Parameters Lists the parameters measured by this test definition.

User Function and

Analysis Function Lists the parameters used for the user function or the

analysis function.

X-Y Plot or X-Y Graph Lists the parameters to be displayed in the X-Y Graph Plot

area, List Display area, or Parameters area on the Data

Display window.

List Display

Parameters Display Area

Auto Analysis Lists the parameters used for the auto analysis function.

Test Output: X-Y Graph Lists the parameters defined in the Test Output tab screen

of the Test Definition window. The parameters will be

displayed in the X-Y Graph Plot area, List Display area, or

Parameters area on the Data Display window.

Test Output: List Display

Test Output: Parameters

Revision number

The test definitions are managed by using the revision number shown below.

NOTE

Application Library

The application library is a set of test definitions effective for the EasyEXPERT application

test execution mode. The application test can be performed by selecting a test definition

and setting the test condition for the actual DUT (device under test). And the setup can be

saved as the dedicated test setup for the DUT.

All test definitions are just sample. If the samples damage your devices, Agilent

Technologies is NOT LIABLE for the damage.

NOTE

If you delete a test definition

Application library should be recovered. Import the test definition by using the Import Test

Definition... function of the Library button. The original test definitions are stored in the

following folders.

<program folder>\Agilent\B1500\EasyEXPERT\Application Tests

<program folder>\Agilent\B1500\EasyEXPERT\Contribution\Application Tests

Revision Number Description

A.01.xx Test definitions supported by EasyEXPERT A.01.xx and later.

A.01.20 Test definitions updated from A.01.xx or supported by

EasyEXPERT A.02.00 and later.

A.02.00 This number is used by the Subsite move test definition only.

A.03.00 Test definitions supported by EasyEXPERT A.03.00 and later.

A.03.10 Test definitions supported by EasyEXPERT A.03.10 and later.

A.03.11 Test definitions supported by EasyEXPERT A.03.11 and later.

A.03.20 Test definitions supported by EasyEXPERT A.03.20 and later.

A.04.00 Test definitions supported by EasyEXPERT A.04.00 and later.

A.05.00 Test definitions supported by EasyEXPERT A.05.00 and later.

A.05.01 Test definitions supported by EasyEXPERT A.05.01 and later.

A.05.02 Test definitions supported by EasyEXPERT A.05.02 and later.

A.05.03 Test definitions supported by EasyEXPERT A.05.03 and later.

A.05.50 Test definitions supported by EasyEXPERT A.05.50 and later.

Supported Analyzer and Required Equipment

Each test definition (Library) supports the following analyzer, and requires the following

accessories, modules, and/or equipment.

Category Test definition name Supported analyzer Required equipment and quantity

BJT BC Diode Fwd B1500A,4155B/C,4156B/C SMU 2

BC Diode Rev B1500A,4155B/C,4156B/C SMU 2

BVcbo B1500A,4155B/C,4156B/C SMU 2

BVcei B1500A,4155B/C,4156B/C SMU 3

BVceo B1500A,4155B/C,4156B/C SMU 2

BVebo B1500A,4155B/C,4156B/C SMU 2

CS Diode Fwd B1500A,4155B/C,4156B/C SMU 2

CS Diode Rev B1500A,4155B/C,4156B/C SMU 2

Ctc-Freq Log B1500A MFCMU 1

Ctc-Vc B1500A MFCMU 1

Cte-Ve B1500A MFCMU 1

Cts B1500A MFCMU 1

EB Diode Fwd B1500A,4155B/C,4156B/C SMU 2

EB Diode Rev B1500A,4155B/C,4156B/C SMU 2

G-Plot ConstVce Pulse B1500A,4155B/C,4156B/C SMU 4

G-Plot ConstVce Pulse[3] B1500A,4155B/C,4156B/C SMU 3

G-Plot ConstVce B1500A,4155B/C,4156B/C SMU 4

G-Plot ConstVce[3] B1500A,4155B/C,4156B/C SMU 3

G-Plot Vbc=0V Pulse B1500A,4155B/C,4156B/C SMU 4

G-Plot Vbc=0V Pulse[3] B1500A,4155B/C,4156B/C SMU 3

G-Plot Vbc=0V B1500A,4155B/C,4156B/C SMU 4

G-Plot Vbc=0V[3] B1500A,4155B/C,4156B/C SMU 3

hfe-Vbe ConstVce B1500A,4155B/C,4156B/C SMU 4

hfe-Vbe Vbc=0V B1500A,4155B/C,4156B/C SMU 4

Ic-Vc Ib B1500A,4155B/C,4156B/C SMU 4

Ic-Vc Ib[3] B1500A,4155B/C,4156B/C SMU 3

Ic-Vc Pulse Ib B1500A,4155B/C,4156B/C SMU 4

Ic-Vc Pulse Ib[3] B1500A,4155B/C,4156B/C SMU 3

Ic-Vc Pulse Vb B1500A,4155B/C,4156B/C SMU 4

Ic-Vc Pulse Vb[3] B1500A,4155B/C,4156B/C SMU 3

BJT Ic-Vc Vb B1500A,4155B/C,4156B/C SMU 4

Ic-Vc Vb[3] B1500A,4155B/C,4156B/C SMU 3

Rb B1500A,4155B/C,4156B/C SMU 4

Re+Rc B1500A,4155B/C,4156B/C SMU 4

Re B1500A,4155B/C,4156B/C SMU 4

Simple Gummel Plot B1500A,4155B/C,4156B/C SMU 3

Vbe-Le B1500A SMU 4, B2200A/B2201A 1

Vbe-We B1500A SMU 4, B2200A/B2201A 1

CMOS BVdss B1500A,4155B/C,4156B/C SMU 4

BVgso B1500A,4155B/C,4156B/C SMU 3

Cgb-AC Level B1500A MFCMU 1, SMU 1

Cgb-Freq Log B1500A MFCMU 1, SMU 1

Cgb-Vg HighVoltage B1500A MFCMU 1, SMU 3, SCUU 1, GSWU 1

Cgb-Vg B1500A MFCMU 1, SMU 1

Cgc-Freq Log B1500A MFCMU 1, SMU 1

Cgc-Vg B1500A MFCMU 1, SMU 1

Cgg-Freq Linear B1500A MFCMU 1

Cgg-Freq Log B1500A MFCMU 1

Cgg-Vg 2Freq B1500A MFCMU 1

Cgg-Vg B1500A MFCMU 1

IdRdsGds B1500A,4155B/C,4156B/C SMU 4

Id-Vd pulse B1500A,4155B/C,4156B/C SMU 4

Id-Vd pulse[3] B1500A,4155B/C,4156B/C SMU 3

Id-Vd B1500A,4155B/C,4156B/C SMU 4

Id-Vd[3] B1500A,4155B/C,4156B/C SMU 3

Id-Vg pulse B1500A,4155B/C,4156B/C SMU 4

Id-Vg Vpulse[3] B1500A,4155B/C,4156B/C SMU 3

Id-Vg B1500A,4155B/C,4156B/C SMU 4

Id-Vg[3] B1500A,4155B/C,4156B/C SMU 3

IonIoffSlope B1500A,4155B/C,4156B/C SMU 4

Isub-Vg B1500A,4155B/C,4156B/C SMU 4

QSCV[4] B1500A SMU 5

QSCV C Offset Meas B1500A SMU 2

Simple Cgb B1500A MFCMU 1

Simple Vth B1500A,4155B/C,4156B/C SMU 4

Category Test definition name Supported analyzer Required equipment and quantity

CMOS Vth Const Id B1500A,4155B/C,4156B/C SMU 4

Vth gmMax B1500A,4155B/C,4156B/C SMU 4

Vth gmMax and Id B1500A,4155B/C,4156B/C SMU 4

VthAndCgg-Vg ASU B1500A MFCMU 1, SMU 1, ASU+SMU 2

VthAndCgg-Vg SCUU B1500A MFCMU 1, SMU 3, SCUU 1, GSWU 1

Vth-Lg B1500A SMU 4, B2200A/B2201A 1

Vth-Wg B1500A SMU 4, B2200A/B2201A 1

Discrete BJT GummelPlot B1500A,4155B/C,4156B/C SMU 3

BJT Ic-Vc Ib B1500A,4155B/C,4156B/C SMU 3

Diode IV Fwd B1500A,4155B/C,4156B/C SMU 2

Diode IV Rev B1500A,4155B/C,4156B/C SMU 2

FET Id-Vd B1500A,4155B/C,4156B/C SMU 3

FET Id-Vg B1500A,4155B/C,4156B/C SMU 3

GenericTest Generic C-f B1500A,B1505A MFCMU 1

Generic C-t B1500A,B1505A MFCMU 1

MCSMU_IV Id-Vds MCSMU B1500A [[MCSMU 1 and MP/HP/HRSMU 1] or

MCSMU 2] and [MP/HP/HRSMU 2 or

[MP/HP/HRSMU 1 and GNDU]]

Id-Vgs MCSMU B1500A

Id-Vgs MCSMU 2-stage B1500A

Memory Flash Ccf-V B1500A MFCMU 1

Flash Cfb-V B1500A MFCMU 1

Flash Cgg-Vcg B1500A MFCMU 1

NandFlash2 Endurance

3devices B1500A SMU 3, B2200A/B2201A 1, 81110A (2

outputs) 1

NandFlash2 Endurance B1500A ASU+SMU 3, 81110A (2 outputs) 1

NandFlash2 IV-Erase-IV B1500A SMU 1, ASU+SMU 2, 81110A (2 outputs) 1

NandFlash2 IV-Write-IV B1500A SMU 2, ASU+SMU 1, 81110A (2 outputs) 1

NandFlash2

Retention(ErasedCell) B1500A SMU 1, ASU+SMU 2, 81110A (2 outputs) 1

NandFlash2

Retention(WrittenCell) B1500A SMU 2, ASU+SMU 1, 81110A (2 outputs) 1

NandFlash2

Vth(ErasingTimeDependence

)

B1500A SMU 1, ASU+SMU 2, 81110A (2 outputs) 1

NandFlash2

Vth(WritingTimeDependence

)

B1500A SMU 2, ASU+SMU 1, 81110A (2 outputs) 1

NandFlash2

WordDisturb(ErasedCell) B1500A ASU+SMU 3, 81110A (2 outputs) 1

Category Test definition name Supported analyzer Required equipment and quantity

Memory NandFlash2

WordDisturb(WrittenCell) B1500A SMU 2, ASU+SMU 1, 81110A (2 outputs) 1

NandFlash3 Endurance B1500A [SPGU 1, ASU+SMU 3] or 

[SPGU 1, SMU 3, 16440A/16445A 2]

NandFlash3 IV-Erase-IV B1500A [SPGU 1, SMU 1, ASU+SMU 2] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3 IV-Write-IV B1500A [SPGU 1, SMU 2, ASU+SMU 1] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3

Retention(ErasedCell) B1500A [SPGU 1, SMU 1, ASU+SMU 2] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3

Retention(WrittenCell) B1500A [SPGU 1, SMU 2, ASU+SMU 1] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3

Vth(ErasingTimeDependence

)

B1500A [SPGU 1, SMU 1, ASU+SMU 2] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3

Vth(WritingTimeDependence

)

B1500A [SPGU 1, SMU 2, ASU+SMU 1] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NandFlash3

WordDisturb(ErasedCell) B1500A [SPGU 1, ASU+SMU 3] or 

[SPGU 1, SMU 3, 16440A/16445A 2]

NandFlash3

WordDisturb(WrittenCell) B1500A [SPGU 1, SMU 2, ASU+SMU 1] or

[SPGU 1, SMU 3, 16440A/16445A 1]

NorFlash Endurance B1500A [SPGU 2, SMU 1, ASU+SMU 3] or

[SPGU 2, SMU 4, 16440A/16445A 2]

NorFlash IV-Erase-IV B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash IV-Write-IV B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

Retention(ErasedCell) B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

Retention(WrittenCell) B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

Vth(ErasingTimeDependence

)

B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

Vth(WritingTimeDependence

)

B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

WordDisturb(ErasedCell) B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

WordDisturb(WrittenCell) B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

NorFlash

DataDisturb(ErasedCell) B1500A [SPGU 2, SMU 1, ASU+SMU 3] or

[SPGU 2, SMU 4, 16440A/16445A 2]

Category Test definition name Supported analyzer Required equipment and quantity

Memory NorFlash

DataDisturb(WrittenCell) B1500A [SPGU 1, SMU 2, ASU+SMU 2] or

[SPGU 1, SMU 4, 16440A/16445A 1]

MixedSignal BJT Varactor CV Mismatch B1500A MFCMU 1

Diff-R Mismatch B1500A SMU 8

Diode IV Fwd Mismatch B1500A SMU 3

Diode IV Rev Mismatch B1500A SMU 3

G-Plot ConstVce Mismatch B1500A SMU 6

G-Plot ConstVce

Mismatch[3] B1500A SMU 5

G-Plot Vbc=0V Mismatch B1500A SMU 6

G-Plot Vbc=0V Mismatch[3] B1500A SMU 5

Ic-Vc Ib Mismatch B1500A SMU 6

Ic-Vc Ib Mismatch[3] B1500A SMU 5

Ic-Vc Vb Mismatch B1500A SMU 6

Ic-Vc Vb Mismatch[3] B1500A SMU 5

Id-Vd Mismatch B1500A SMU 5

Id-Vd Mismatch[3] B1500A SMU 4

Id-Vg Mismatch B1500A SMU 5

Id-Vd Mismatch[3] B1500A SMU 4

MIM CV Mismatch B1500A MFCMU 1

MOS Varactor CV Mismatch B1500A MFCMU 1

Poly-R Mismatch B1500A SMU 7

NanoTech CNT Differential R[AC] B1500A MFCMU 1

CNT Gate Leak B1500A,4155B/C,4156B/C SMU 2

CNT Id-Time B1500A,4156B/C SMU 4

CNT Id-Vd B1500A,4155B/C,4156B/C SMU 4

CNT Id-Vg B1500A,4155B/C,4156B/C SMU 4

CNT Id-Vg-Time B1500A,4156B/C SMU 4

CNT IV Sweep B1500A,4155B/C,4156B/C SMU 2

CNT R-I Kelvin 2SMU B1500A,4155B/C,4156B/C SMU 2

CNT R-V Kelvin 2SMU B1500A,4155B/C,4156B/C SMU 2

CNT Vth gmMax B1500A,4155B/C,4156B/C SMU 4

Organic 2-terminal dual Vsweep B1500A [SMU 1 and GNDU] or SMU 2

PwrDevice BVdss[3] PwrDevice B1500A SMU 3

BVgso[3] PwrDevice B1500A SMU 2

Id-Vd pulse[3] PwrDevice B1500A SMU 3

Category Test definition name Supported analyzer Required equipment and quantity

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