Agilent Technologies TriScroll 320 Series Manuale utente

INSTALLATION AND

OPERATION MANUAL

Vacuum Products Division

TriScrollTM 320 Series

Dry Scroll

Vacuum Pump

Manual No. 699904342

Revision F

October 2014

Agilent, Inc.

TriScroll™320

Dry Scroll Vacuum Pump

TriScroll is a trademark of Agilent, Inc.

TriScroll 320 Series Vacuum Pump

Contents

Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . . . . 1

Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Installation Requirements . . . . . . . . . . . . . . . . . . . . . 2

Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Start up Procedure . . . . . . . . . . . . . . . . . . . . . . . . 2

Shutdown Procedure . . . . . . . . . . . . . . . . . . . . . . 2

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . 3

Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . 5

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . 7

Single Phase Motor Connection . . . . . . . . . . . . . . 7

Mechanical Connections . . . . . . . . . . . . . . . . . . . . . 8

Pump Location . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Rotation of the Pump Inlet

with Respect to the Motor Frame . . . . . . . . . . . . . 8

Pump Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Pump Exhaust. . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Optional Isolation Valve. . . . . . . . . . . . . . . . . . . . . . 8

Gas Ballast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Bearing Purge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Purge Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

General Information . . . . . . . . . . . . . . . . . . . . . . 11

Related TriScroll Manuals. . . . . . . . . . . . . . . . . . 11

Maintenance and Tooling Kits . . . . . . . . . . . . . . 11

Factory Service Options . . . . . . . . . . . . . . . . . . . 12

Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Contacting Agilent . . . . . . . . . . . . . . . . . . . . . . . 12

Request for Return Health and Safety Certification

List of Figures

Figure Caption Page

1 Interface Drawing with Dimensions . . . . . . . .4

2 Pumping Speed Curves . . . . . . . . . . . . . . . . .4

3 TriScroll 320 Vacuum Pump . . . . . . . . . . . . . .5

4 Single Phase Motor Electrical Connections . . .7

5 Isolation Valve Location . . . . . . . . . . . . . . . . .8

List of Tables

Table Title Page

1 Specifications . . . . . . . . . . . . . . . . . . . . . . . . 3

2 Full Load Motor Currents . . . . . . . . . . . . . . . 7

3 VPI Valve Installation Data . . . . . . . . . . . . . . 9

4 Troubleshooting Chart . . . . . . . . . . . . . . . . 10

5 Other Related Manuals . . . . . . . . . . . . . . . . 11

6 Maintenance and Tooling Kits . . . . . . . . . . 11

7 Factory Service Options . . . . . . . . . . . . . . . 12

8 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . 12

TriScroll 320 Series Vacuum Pump

This page intentionally left blank.

TriScroll 320 Series Vacuum Pump

Instructions for Use

General Information

This equipment is designed for use by professionals. The

user should read this instruction manual and any other

additional information supplied by Agilent before

operating the equipment. Agilent will not be held

responsible for any events that occur due to

non-compliance with these instructions, improper use by

untrained persons, non-authorized interference with the

equipment, or any action contrary to that provided for by

specific national standards.

The TriScroll™ 320 is a dry, scroll vacuum pump

specifically optimized for helium leak detection

equipment. This pump is suitable for pumping air or inert

gases. The pump is not intended to pump toxic, corrosive,

explosive, or particulate-forming gases.

The following paragraphs contain all the information

necessary to guarantee the safety of the operator when

using the equipment. Detailed information is supplied in

“Technical Information” on page 3.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following

environmental requirements should not be exceeded:

Preparation for Installation

The pump is supplied in a special protective packing. If

this shows signs of damage, which may have occurred

during transport, contact your local sales office.

Total weight of the packing, including the pump, is

approximately 34.2 kg (75 lbs).

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

Temperature: –20 °C to 60 °C (–4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

WARNING When unpacking the pump, be sure not

to drop it, and avoid any kind of sudden

impact or shock vibration to it.

WARNING The TriScroll 320 weighs 26.4 kg

(58 lbs). To avoid injury, use proper lift-

ing techniques when moving the pump.

NOTE Normal exposure to the environment

cannot damage the pump. Neverthe-

less, it is advisable to keep the pump

inlet closed until the pump is installed

in the system.

TriScroll 320 Series Vacuum Pump

Installation Requirements

Do not install or use the pump in an environment

exposed to atmospheric agents (rain, snow, ice), dust,

aggressive gases, or in explosive environments or those

with a high fire risk.

During operation, the following environmental

conditions must be respected:

Operation

In order to reach ultimate vacuum, the pump must be left

running for about an hour with the inlet sealed.

Unlike conventional oil-sealed pumps, Agilent’s dry scroll

pumps do not have fluid to cleanse them of accumulated

dust and debris. Run the pump periodically at atmosphere

for a minute or two to flush out the pump. Flush the pump

regularly and adjust this schedule according to your

specific conditions.

Start up Procedure

1. Ensure that the vacuum system isolation valve is

closed.

2. Turn on power to the pump.

3. Open the isolation valve.

Shutdown Procedure

1. Close the vacuum system isolation valve. This

prevents debris in pump from being transported into

the vacuum system.

2. Turn off pump.

Maintenance

Personnel responsible for pump operation and

maintenance must be well-trained and aware of the

accident prevention rules.

If a pump is to be discarded, it must be disposed of in

accordance with specific national and local standards.

Temperature: +5 °C to +40 °C (41 °F to 104 °F)

Relative humidity: 0 to 95% (non-condensing)

CAUTION As supplied from the factory, the pump

is configured for low voltage. Verify that

the configuration matches the supply

voltage.

If voltage changeover is required,

configure the voltage as described in

“Electrical Connections” on page 7.

WARNING During operation the outer surface of

the motor housing can become hot.

Avoid touching the motor housing

during pump operation.

WARNING The pump is designed for operation

with neutral or noncorrosive fluids. It

is absolutely forbidden to use it with

potentially explosive, inflammable or

poisonous substances.

WARNING ❑Death may result from contact with

high voltages. Always take extreme care

and observe the accident prevention

regulations in force.

❑When the machine is powered up,

be careful of moving parts and high

voltages.

❑If you have to perform maintenance

on the pump after a considerable time

in operation, allow the pump to cool as

the temperature of the outer surface

may be in excess of 60 °C (140 °F).

❑Always disconnect your power

supply to the pump before beginning

maintenance work.

NOTE Before returning the pump to the factory

for repair, the “Health and Safety” sheet

attached to this instruction manual must

be completed and sent to the local sales

office. A copy of the sheet must be

inserted in the pump package before

shipping.

TriScroll 320 Series Vacuum Pump

Technical Information

Table 1 Specifications

Model TriScroll™ 320 Dry Scroll Vacuum Pump

Interface dimensions See Figure 1

Peak pumping speed 50 Hz: 210 l/m, 12.6 m3/hr (7.4 cfm)

60 Hz: 250 l/m, 15 m3/hr (8.8 cfm)

Media Clean air. No toxic, corrosive, explosive or particulate forming gases

Ultimate pressure (Torr) 1.0 x 10-2 Torr (1.3 x 10-2 mbar)

Maximum inlet pressure 1.0 atmosphere (0 psig)

Maximum continuous inlet pressure 100 Torr

Maximum outlet pressure 1.1 atmosphere (1.5 psig)

Inlet connection NW25

Exhaust connection Female 1/4" National Pipe Thread (NW16 adapter provided)

Gas ballast Female 1/4" National Pipe Thread (40 Micron sintered filter provided)

Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)

Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)

Motor rating 0.75 HP (0.56 kW)

Operating voltages Single phase models:

❑50-60 Hz/100-115:200-230 VAC ±10%

Motor full load currents See Table 2 on page 7

Motor thermal protection Type U automatic

Operating speed 60 Hz: 1725 RPM, 50 Hz: 1425 RPM

Cooling system Air-cooled

Weight Pump only: 26.4 kg (58 lbs)

Shipping weight: 34.2 kg (75 lbs)

Noise level (per ISO 11201) 68 dB(A)

Vibration level at inlet (per ISO 10816-1) 6.3 mm/sec

Installation Pollution Degree: 2

Installation Category: II

Altitude: 2000 m, indoor usage and storage

TriScroll 320 Series Vacuum Pump

Figure 1 Interface Drawing with Dimensions

Figure 2 Pumping Speed Curves

TriScroll 320 Series Vacuum Pump

Figure 3 TriScroll 320 Vacuum Pump

1. Cowling Screws; M5 (3)

2. Cowling

3. Inlet (NW25)

4. Inlet Screen

5. NW16 Exhaust Adapter

6. Bearing Purge Port (1/4" National Pipe Thread)

7. Pump Frame

8. Frame Screws; M6 (4)

9. Gas Ballast Port (1/4" National Pipe Thread)

10. Mounting Holes; 11 mm diameter thru (8)

11. Rubber Feet (4)

12. Motor Cover Screws (3)

13. Motor Electrical Cover

Unpacking and Inspection

The shipping container is a double carton.

1. After opening the outer box, remove the foam

packing.

2. Slit open the inner box.

3. Lift the pump with the plywood base out of the inner

box.

4. Remove the four bolts securing the pump frame to the

plywood base.

5. Locate the NW16 exhaust fitting and set it aside.

6. Inspect the pump for damage. If there is shipping

damage, contact the freight carrier and your local

Agilent sales office immediately.

7. Save the carton and packing materials.

TriScroll 320 Series Vacuum Pump

Installation

Safety

Do not remove or modify any safety or insulating

equipment from the pump. To do so may create a serious

safety hazard and may void the warranty.

Startup

1. Check that the inlet screen is installed before

beginning operation.

2. Operate the pump at an ambient temperature of 5° C

to 40° C (41° F to 104° F), otherwise damage to the

pump or shortened operating life may result.

3. Close the isolation valve between the vacuum pump

and the vacuum chamber before startup or shutdown;

debris may be sucked back into the vacuum

chamber.

An optional isolation valve can be installed for this

purpose. See “Optional Isolation Valve” on page 8.

WARNING ❑This pump is designed to pump and

exhaust air and inert gases only; it is not

designed to pump explosive, flamma-

ble, toxic, or corrosive gases. They can

cause bodily injury, explosion, or fire.

❑Install in an area that is not exposed

to rain, steam, or excessive humidity.

They can cause electric shock, short cir-

cuits, and severe bodily injury.

❑Before inspecting or servicing the

pump, be sure the electrical supply is

disconnected.

❑Protect against short circuits by

installing a circuit breaker of the proper

capacity.

❑The circuit breaker must be suitably

located and easily reached.

❑The circuit breaker must be marked

at the disconnecting device for the

equipment with the on/off symbol I/O

and meet the relevant requirements of

IEC60947-1 and IEC60947-3.

❑An exhaust silencer option is avail-

able for those applications in which it is

desirable to diminish the sound level

produced by the pump.

❑To prevent bodily injury, avoid

exposing any part of the human body to

vacuum.

CAUTION Although the pump can pump trace

particulates normally found in the

atmosphere, it is not designed for pro-

cess solids, chemicals, powders, sol-

vents, condensates, or other

particulates. They can damage the

equipment, degrade its performance, or

shorten its useful life.

Consult a qualified electrician when-

ever wiring the pump.

TriScroll series pumps operate in a

clockwise direction when viewed from

the motor end. (Note the arrow on the

pump frame.) Improper rotation can

cause permanent damage to the pump.

WARNING Do not insert a finger or any foreign

object in the path of the fan; serious

personal injury may result or the pump

may be damaged.

CAUTION Do not block the fan ducts because the

pump can become overheated. A pump

surface temperature in excess of 55 °C

(131 °F) is potentially damaging. If such

conditions are observed, turn pump off

and allow to cool. Disassemble, inspect

for damage, and repair if necessary.

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