Agilent Technologies TriScroll 800 Manuale utente

DRAFT 4/1/21

TriScrollTM 800 Inverter Dry Scroll

Vacuum Pump

Installation and Operation Manual

Manual No. 699904435

Revision C.00

February 2021

iii

Table of Contents

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v

Instructions for Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3

Environmental Conditions, Compliance and

Utility Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . .4

Instructions d'utilisation ....................................... 5

Avertissements CEM . . . . . . . . . . . . . . . . . . . . . . . . . . . .6

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7

Utilisation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7

Entretien . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8

Instrucciones de Uso . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Información general . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9

Instalación. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Uso . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Mantenimiento . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Istruzioni per l'uso ................................................12

Avvertenze CEM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13

Installazione . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14

Utilizzo . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14

Manutenzione . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15

Anwendungshinweise ..........................................16

Hinweise zur elektromagnetischen Verträglichkeit . . . . 17

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18

Betrieb . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Wartung . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19

使用上の注意 . . . . . . . . . . . . . . . . . 20

一般情報 . . . . . . . . . . . . . . . . . . 20

設置 . . . . . . . . . . . . . . . . . . . . 22

使用 . . . . . . . . . . . . . . . . . . . . 22

メンテナンス . . . . . . . . . . . . . . . . 22

使用说明 . . . . . . . . . . . . . . . . . . 23

包装 .....................................................................23

CEM 警告 . . . . . . . . . . . . . . . . . 24

安装 ..................................... 25

用途 . . . . . . . . . . . . . . . . . . . . 25

维护 . . . . . . . . . . . . . . . . . . . . 26

Mechanical Connections. . . . . . . . . . . . . . . . . . . . . . . . .28

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .29

TriScroll 800 Inverter Pump Components View . . . . . . 30

Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Pump Electrical Controller. . . . . . . . . . . . . . . . . . . . . . .33

Purge Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Exhaust Silencer Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Vibration Isolation Kit . . . . . . . . . . . . . . . . . . . . . . . . . . 36

HEPA Inlet filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Request for Return Health and Safety Certification

This page intentionally left blank.

Warranty

Products manufactured by Seller are warranted against

defects in materials and workmanship for twelve (12) months

from date of shipment thereof to Customer, and Seller’s

liability under valid warranty claims is limited, at the option

of Seller, to repair, to replace, or refund of an equitable

portion of the purchase price of the Product. Items expendable

in normal use are not covered by this warranty. All warranty

replacement or repair of parts shall be limited to equipment

malfunctions which, in the sole opinion of Seller, are due or

traceable to defects in original materials or workmanship. All

obligations of Seller under this warranty shall cease in the

event of abuse, accident, alteration, misuse, or neglect of the

equipment. In-warranty repaired or replaced parts are

warranted only for the remaining unexpired portion of the

original warranty period applicable to the repaired or replaced

parts. After expiration of the applicable warranty period,

Customer shall be charged at the then current prices for parts,

labor, and transportation.

Reasonable care must be used to avoid hazards. Seller

expressly disclaims responsibility for loss or damage caused

by use of its Products other than in accordance with proper

operating procedures.

Except as stated herein, Seller makes no warranty, express or

implied (either in fact or by operation of law), statutory or

otherwise; and, except as stated herein, Seller shall have no

liability under any warranty, express or implied (either in fact

or by operation of law), statutory or otherwise. Statements

made by any person, including representatives of Seller,

which are inconsistent or in conflict with the terms of this

warranty shall not be binding upon Seller unless reduced to

writing and approved by an officer of Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after

occurrence of circumstances giving rise thereto, and must be

received within the applicable warranty period by Seller or its

authorized representative. Such claims should include the

Product serial number, the date of shipment, and a full

description of the circumstances giving rise to the claim.

Before any Products are returned for repair and/or adjustment,

written authorization from Seller or its authorized

representative for the return and instructions as to how and

where these Products should be returned must be obtained.

Any Product returned to Seller for examination shall be

prepaid via the means of transportation indicated as

acceptable by Seller. Seller reserves the right to reject any

warranty claim not promptly reported and any warranty claim

on any item that has been altered or has been returned by

non-acceptable means of transportation. When any Product is

returned for examination and inspection, or for any other

reason, Customer shall be responsible for all damage resulting

from improper packing or handling, and for loss in transit,

notwithstanding any defect or non-conformity in the Product.

In all cases, Seller has the sole responsibility for determining

the cause and nature of failure, and Seller’s determination

with regard thereto shall be final.

If it is found that Seller’s Product has been returned without

cause and is still serviceable, Customer will be notified and

the Product returned at its expense; in addition, a charge for

testing and examination may be made on Products so

returned.

This page intentionally left blank.

DRAFT 4/1/21

Instructions for Use

General Information

This equipment is designed for use by trained personnel. The

user should read this instruction manual and any other addi-

tional information supplied by Agilent before operating the

equipment. Agilent will not be held responsible for any events

that occur due to non-compliance with these instructions,

improper use by untrained persons, non-authorized interfer-

ence with the equipment, or any action contrary to that pro-

vided for by specific national standards.

The TS800 is a dry scroll vacuum pump. This pump is suitable

for pumping air or inert gases. The pump is not intended to

pump corrosive, explosive, or particulate-forming gases.

The following paragraphs contain all the information necessary

to guarantee the safety of the operator when using the equip-

ment. Detailed information is supplied in “Technical Specifica-

tions” on page 33.

This manual uses the following standard safety protocol:

Storage

When transporting and storing the pump, the following envi-

ronmental requirements should not be exceeded:

Preparation for Installation

The pump is supplied in a special protective packing. If this

shows signs of damage, which may have occurred during

transport, contact your local sales office.

Total weight of the packing, TS800 pump included, is approxi-

mately 42 kg (93 lbs).

ADVERTENCIA The warning messages are for attracting

the attention of the operator to a particu-

lar procedure or practice which, if not fol-

lowed correctly, could lead to serious

injury.

PRECAUCIÓN The caution messages are displayed before

procedures, which if not followed, could

cause damage to the equipment.

NOTA The notes contain important information

taken from the text.

Temperature: 20 °C to +60 °C (4 °F to 140 °F)

Relative humidity: 0 to 95% (non-condensing)

ADVERTENCIA The TS800 pump itself weighs 32 kg (71

lbs). To avoid injury, use lifting aids and

proper lifting techniques when moving the

pump.

ADVERTENCIA When unpacking the pump, be sure not to

drop it and avoid any kind of sudden

impact or shock vibration to it.

NOTA Normal exposure to the environment can-

not damage the pump. Nevertheless, it is

advisable to keep the pump inlet closed

until the pump is installed in the system.

DRAFT 4/1/21

2 TriScroll 800 Inverter Vacuum Pump

EMC Warnings

EN 55011 Class A Warning

This is a Class A product. In a domestic environment this

product may cause radio interference in which case the user

may be required to take adequate measures.

FCC

This device complies with Part 15 of the FCC rules. Opera-

tion is subject to the following two conditions: (1) This device

may not cause harmful interference, and (2) this device must

accept any interference received, including interference that

may cause undesirable operation.

NOTE The equipment has been tested and found

to comply with the limits for a Class A dig-

ital device, pursuant to Part 15 of the FCC

rules. These limits are designed to provide

reasonable protection against harmful

interference when the equipment is oper-

ated in a commercial environment. This

equipment generated, uses, and can radi-

ate radio frequency energy and, if not

installed and used in accordance with the

instruction manual, may cause harmful

interference to radio communications.

Operation of this equipment in a residen-

tial area is also likely to cause harmful

radio communications interference in

which case the user will be required to

correct the interference at his own

expense.

DRAFT 4/1/21

Installation

The TS800 is NOT intrinsically safe. Do not install or use the

pump in an environment exposed to atmospheric agents (rain,

snow, ice), dust, aggressive gases, or in explosive environ-

ments or those with a high fire risk.

During operation, the following environmental conditions must

be respected:

Connect the pump to the power supply using an IEC-320 style

power cord of at least 10 A capacity (see Table 1 on page 27).

Use

In order to reach maximum vacuum, the pump must be left

running for at least an hour with the inlet sealed.

There are no special instructions for starting the pump; it need

only be switched on using the On/Off switch.

The optional inlet valve will open 30 seconds after the pump is

started.

There are no special instructions for stopping the pump; it need

only be disconnected from the electric power source by the

On/Off switch.

The optional inlet valve will close immediately after the pump

is stopped.

Maintenance

Personnel responsible for pump operation and maintenance

must be well-trained and aware of the accident prevention

rules.

If a pump is to be discarded, it must be disposed of in accor-

dance with specific national standards.

Disposal

Meaning of the WEEE logo found in labels.

The following symbol is applied in accordance with the EC

WEEE (Waste Electrical and Electronic Equipment) Directive.

This symbol (valid only in countries of the European Commu-

nity) indicates that the product it applies to must NOT be dis-

posed of together with ordinary domestic or industrial waste

but must be sent to a differentiated waste collection system.

The end user is therefore invited to contact the supplier of the

device, whether the Parent Company or a retailer, to initiate the

collection and disposal process after checking the contractual

terms and conditions of sale.

For more information refer to: http://www.agilent.com/ envi-

ronment/ product/ index.shtml.

Temperature: +5 °C to +40 °C (41 °F to 104 °F)

Relative humidity: 0 to 95% (non-condensing)

CAUTION When installing the vacuum pump it is rec-

ommended that the pump be positioned in

a way that the power switch and power

cord connection remain easily accessible

to the user in order to be available as an

option to disconnect power to the pump

quickly if needed.

WARNING The pump is designed for operation with

neutral or noncorrosive fluids. It

is absolutely forbidden to use it with

potentially explosive or inflammable sub-

stances.

WARNING • Death may result from contact with

high voltages. Always take extreme care

and observe the accident prevention regu-

lations in force.

•When machine is powered up,

be careful of moving parts and high volt-

ages.

•If you have to perform maintenance on

the pump after a considerable time in

operation, allow it to cool as the tempera-

ture of the outer surface may be in excess

of 60 °C.

•Always disconnect your power supply

to the pump before beginning maintenance

work.

NOTE Before returning the pump to the factory

for repair, the “Request for Return” sheet

attached to this instruction manual must

be completed and sent to the local sales

office. A copy of the sheet must be inserted

in the pump package before shipping.

DRAFT 4/1/21

4 TriScroll 800 Inverter Vacuum Pump

Environmental Conditions,

Compliance and Utility

Requirements

Environmental Conditions

This equipment meets the following IEC classifications:

Pollution Degree 2 (See Note.)

Installation Category II (See Note.)

Equipment Class 1

Electromagnetic Compatibility

EN55011/CISPR11

Group 1 ISM equipment: Group 1 contains all ISM equip-

ment in which there is intentionally generated and/or used

conductively coupled radio-frequency energy which is neces-

sary for the internal functioning of the equipment itself.

Class A equipment is equipment suitable for use in all estab-

lishments other than domestic and those directly connected to

a low voltage power supply network which supplies buildings

used for domestic purposes.

This device complies with the requirements of CISPR11,

Group 1, Class A as radiation professional equipment. There-

fore, there may be potential difficulties in ensuring electro-

magnetic compatibility in other environments, due to

conducted as well as radiated disturbances.

Operation is subject to the following two conditions:

This device may not cause harmful interference.

This device must accept any interference received, includ-

ing interference that may cause undesired operation.

If this equipment does cause harmful interference to radio or

television reception, which can be determined by turning the

equipment off and on, the user is encouraged to try one or

more of the following measures:

Make sure that appropriate cables are used to connect the

device to peripheral equipment.

Changes or modifications not expressly approved by Agi-

lent Technologies could void the user's authority to operate

the equipment.

South Korean Class A EMC declaration

This equipment is Class A suitable for professional use and is

for use in electromagnetic environments outside of the home.

ICES/NMB-001

This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme à la norme NMB-001 du Can-

ada.

NOTE Pollution level describes the degree to

which a solid, liquid, or gas which deterio-

rates dielectric strength is adhering. 2

applies to a normal indoor atmosphere.

Installation category implies the regula-

tion for impulse withstand voltage. It is

also called the Over voltage category. II

applies to electrical equipment.

This equipment requires the following

space for ventilation, maintenances

access, and easy access to the Main Power

Breaker Switch. There must be a clear

space of at least 60 cm (24") on all sides of

the equipment. The bench in your labora-

tory must be able to support the entire sys-

tem and other laboratory equipment.

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