Entegris IntelliGen LV Guida

IntelliGen®LV

Dispense System

Installation and use manual

ADVANCED MATERIALS HANDLING |MANUAL

INTELLIGEN LV DISPENSE SYSTEM

1Installation and Use Manual | Entegris, Inc.

TABLE OF CONTENTS

—

Overview ......................................................................... 2

Liability Ownership .......................................................... 2

General Manual Notes .................................................. 2

Changes to the Manual ................................................ 2

Intended Audience ........................................................ 2

Intended Scope and Use ............................................. 2

Safety ............................................................................... 3

Registration for Safety Updates ................................. 3

Contacting the Supplier with Emergency

Health Issues ................................................................... 3

Handling ........................................................................... 4

Chemical Leaks .............................................................. 4

Specifications ................................................................ 6

Compatibility ................................................................... 7

System Overview .......................................................... 8

Appearance ....................................................................... 8

Two-stage Technology Operating Principle ........... 9

Quick Filter Changeout .............................................. 10

Installation .................................................................... 11

Handling .......................................................................... 11

Facility Requirements .................................................. 11

Tools and Materials ...................................................... 11

Installing the Pump ..................................................... 12

Storage ........................................................................... 14

MMI Software ............................................................... 14

Installing Software ....................................................... 14

Connect Tab ................................................................. 15

System Tab .................................................................... 17

Priming Tab ................................................................... 18

Status Tab ...................................................................... 21

Alarms Tab ..................................................................... 23

Recipe Tab ..................................................................... 24

Recharge Tab ................................................................ 24

Utility Tab ....................................................................... 24

Info Tab .......................................................................... 25

Self Test Tab .................................................................. 25

Profiling Tab .................................................................. 25

Confirmation Tab ......................................................... 27

Maintenance ................................................................ 32

Changing the Filter ...................................................... 32

Flushing the System .................................................... 33

Updating the Firmware .............................................. 34

Troubleshooting ........................................................... 35

Appendix: Priming Recipe Information .................... 37

Manufacturing Information ...................................... 38

Product Warranties .................................................... 38

Limited Warranty ........................................................ 39

For More information ................................................ 39

Terms and Conditions of Sale .................................. 39

INTELLIGEN LV DISPENSE SYSTEM

Installation and Use Manual | Entegris, Inc.

OVERVIEW

—

Entegris, Inc. provides this information for end

user reference.

Prior to using this manual, the user should verify

with the product manufacturer that the user has

the most recent copy of the product manual.

This manual is owned by Entegris, Inc., an aliated

company for its suppliers, and the title shall not pass

to the user as a result of the use of the manual.

LIABILITY OWNERSHIP

—

Read the following carefully before continuing:

In no event shall Entegris or its suppliers be liable for

any damages whatsoever (including, without limita-

tion, damages for loss of business proﬁts, business

interruption, loss of business information, or any

pecuniary loss) arising out of the use of or inability to

use this manual, even if Entegris has been advised of

the possibility of such damages.

GENERAL MANUAL NOTES

—

CHANGES TO THE MANUAL

The manufacturer reserves the right to make changes

to the product covered in this manual to improve

performance, reliability, or manufacturability.

Although every eort has been made to ensure ac-

curacy of the information contained in this manual,

the manufacturer assumes no responsibility for

inadvertent errors. Contents of the manual are

subject to change without notice.

INTENDED AUDIENCE

This manual is intended for technicians involved in

semiconductor manufacturing, and assumes that

each individual is familiar with the proper handling

of photochemicals and other potentially hazardous

materials. Users must also be familiar with installing

and using software on a computer running the

Windows®operating system.

INTENDED SCOPE AND USE

This manual is intended to be used by experienced

technicians for the planning, installation, and operation

of the described system. This manual contains basic

safety information for the installation and use of the

pump system. This manual covers this system only.

MISHANDLING products exposed to

a hazardous substance may result in death or

serious injury. Always follow the recommenda-

tions and guidelines provided by the chemical

suppliers and manufacturers. Always wear

appropriate personal protective equipment

(PPE) as required for the chemicals in use. Refer

to the Material Safety Data Sheets (MSDS) for

each chemical.

INTELLIGEN LV DISPENSE SYSTEM

3Installation and Use Manual | Entegris, Inc.

SAFETY

—

DANGER! Failure to follow these safety instruc-

tions may lead to ﬁre, electric shock, chemical

exposure, or other injuries, or damage to pro-

perty. Read all safety information before usage.

REGISTRATION FOR SAFETY UPDATES

The manufacturer requests that the user notiﬁes

the manufacturer of equipment installation, usage

and status, and provides appropriate contact informa-

tion for safety alerts and information regarding the

system. Please register usage with a local Entegris

service center.

CONTACTING THE SUPPLIER WITH

EMERGENCY HEALTH ISSUES

Please contact the manufacturer with any emergency

safety and health concerns.

WARNING! Safety is designed into every

product. When followed, these minimum

guidelines provide an acceptable level of

safety for operating and maintaining the

system but are not a substitute for deter-

mining internal safety procedures.

Failure to comply with the safety precautions or

warnings indicated in this manual violates the

safety standards that form a part of the intended

use of this equipment. The manufacturer assumes

no liability for the user’s failure to comply with

these requirements.

WARNING! Use of controls, adjustments, or

procedures other than those speciﬁed in this

manual without consulting a competent safety

professional may result in exposure to potential

hazards. Always follow established industrial

safety practices when operating the equipment.

CAUTION! End of life statement. De-commission-

ing of the system, or any part of the system shall

be in a manner that is consistent with appropriate

regulations and guidelines.

WARNING! Chemicals are not supplied with this

equipment. Refer to the chemical supplier’s

MSDS for speciﬁc health and safety information.

WARNING! POTENTIAL CHEMICAL LEAK! Use

one set of O-rings only. Check that the ﬁlter has

O-rings or the manifold has O-rings. NEVER use

O-rings on both the ﬁlter and the manifold or the

system may leak chemical.

WARNING! PINCH HAZARD! Keep

ﬁngers clear of jaw mechanism to

prevent personal injury.

WARNING! PINCH HAZARD! Pump

weight in excess of 15.0 kg (33 lbs).

Use care in lifting and carrying the

pump to prevent personal injury.

WARNING! Wear chemical-resistant garments

and eye protection while changing the ﬁlter

and during start-up. Use additional PPE as

directed by facility safety personnel, the MSDS,

or chemical safety guidelines.

CAUTION! Only technically qualiﬁed personnel

should install the equipment.

CAUTION! DO NOT use this equipment in any

manner not speciﬁed by the manufacturer. If

the equipment is used in a manner other than as

speciﬁed in this document, the safety protections

may be impaired.

CAUTION! Fittings and components

damage easily; handle all components

with extreme care. DO NOT scratch or

over-tighten any component.

CAUTION! EQUIPMENT DAMAGE HAZARD! Turn

o power before connecting or disconnecting

any cable to the device, or damage may occur.

INTELLIGEN LV DISPENSE SYSTEM

Installation and Use Manual | Entegris, Inc.

HANDLING

Each dispense system is manufactured with

strict assembly, test, and inspection processes

to ensure high-quality assembly and protection

from unintended chemical release. As with all

chemical handling systems, the dispense system

has chemical connection points that must be

handled with care, including:

• Fluid ports on the top surface

• Filter ﬁttings

• Pressure sensor ports on the back (under the

top cover)

• Between valve plate (front) and pump block

• Pump diaphragm mechanism in the pump block

A potential for chemical leak can occur at the above

cited points. Use care to ensure that O-rings are either

on the ﬁlter or on the manifold, never on both, or the

system will leak. Refer to ﬁlter installation instructions

in this manual.

Do not loosen any screws on the mechanism unless

speciﬁcally directed to do so by an Entegris service

engineer. Handle the dispense system with care to

prevent damage to any ﬂuid handling point.

Additional points of critical assembly and perfor-

mance include pneumatic tubing, pressure and

vacuum connecting points, and solenoid manifold

tubes (inside cover or backplane). Use care to pre-

vent any damage to the unit which could result in

chemical leakage.

CHEMICAL LEAKS

In the event of a suspected or conﬁrmed chemical

leak from the pump or in the vicinity of the pump,

please follow the instructions below:

1. Determine chemical currently in use with pump.

2. Obtain MSDS.

a. Determine if any incompatible materials may

come in contact with the leaking material.

b. Isolate incompatibles with barriers, including

spill containment, closing valves and removing

the chemical supply, if it is safe to do so.

c. Identify appropriate chemical protection equip-

ment requirements, including gloves, face and

eye protection, and chemical protective clothing

to prevent exposure to or contact with chemicals.

d. Determine if the chemical has permissible

exposure limits or short-term exposure limits:

– Identify limits requiring respiratory protection.

– Ensure that appropriate monitoring devices

are available to measure air levels.

3. Only personnel properly trained to clean spills

of hazardous materials should conduct cleanup

activities. Consult local authorities or identiﬁed

hazardous materials emergency response agen-

cies or contractors for assistance if the facility

does not have trained personnel for spill cleanup

or containment.

4. Ensure adequate monitoring and protective

equipment is available for cleanup of hazardous

materials.

INTELLIGEN LV DISPENSE SYSTEM

5Installation and Use Manual | Entegris, Inc.

5. Obtain supplies for cleanup and containment

compatible with the chemical.

6. Obtain compatible containers to collect spilled

material and cleanup materials.

7. Ensure adequate ventilation is provided before

opening cabinet or equipment where a buildup of

vapors could occur. If ﬂammable chemical is in use:

a. Monitor area for ﬂammable levels with appropri-

ate monitoring devices.

b. Isolate all power sources or potential sources

of sparks.

c. Use intrinsically safe tools and monitoring

equipment.

8. Isolate pump from power sources to prevent ﬂuids

from ﬂowing through unit during cleanup of leak

or spill.

a. Use appropriate lockout/tagout procedures to

de-energize unit.

b. De-energize all areas of unit that may be in

contact with spilled or leaking material.

c. When disconnecting nitrogen and/or any

pressurized gas, wear appropriate PPE gloves,

then close the facility gas supply to prevent

gas release when disconnecting lines.

9. If spilled chemical is within equipment, wipe all

surfaces carefully with wipes appropriate for the

chemical.

10.If chemical is contained in the tubing or the pump,

provide collection container under the lines or

pump during removal to collect chemical and

prevent additional spills.

11. Decontaminate surfaces with appropriate decon-

tamination materials per recommendation of

chemical manufacturer.

12.Contain cleanup materials, contaminated debris,

and equipment.

13.Dispose of materials in accordance with local,

state, and national regulatory requirements.

14. Provide any required service to the equipment and

verify all spilled material is collected and cleaned

from surfaces.

15.Replace any equipment and secure lines in

accordance with normal maintenance and

service requirements.

16.Conﬁrm air levels are safe.

17. Return equipment to service per standard

procedures.

INTELLIGEN LV DISPENSE SYSTEM

Installation and Use Manual | Entegris, Inc.

SPECIFICATIONS

—

Dispense performance Volume 0.01–10.0 mL in 0.001 mL increments

Rate 0.01 – 3.0 mL/sec in 0.001 mL/sec increments

Repeatability ≤

0.02 mL 3 sigma

Viscosity range* 1–100 cP or at higher viscosities when dispense pressure

does not exceed 29 psi

Maximum dispense

design pressure**

0.20 MPa (29 psi)

Recharge performance Fill rate, ﬁltration rate,

vent rate, purge rate

0.1–3.0 mL/sec in 0.001 mL/sec increments

Vent frequency Auto-venting or 1–10,000 dispense cycles

Mechanical Wetted surfaces Modiﬁed PTFE, PTFE, Kalrez®

Connection type Insert style, Super Type Pillar®, or Flowell™60 Series

Filter Impact®8G or Impact 2 V2 (OF style)

Inlet, outlet and

vent tubing

OD: 6.35 mm (0.25") or 6.0 mm (0.24")

ID: 3.97 mm (0.156") or 4.0 mm (0.16")

Inlet gas type Regulated N2

Operating conditions Minimum operating pneumatic pressure: 0.26 MPa (38 psi)

Maximum operating pneumatic pressure: 0.28 MPa (40 psi)

Pneumatic leak pressure: 0.30 MPa (43 psi)

Vacuum -68 kPa (20 in-Hg min)

Dimensions Height 200.1 mm (7.878")

Width 60.7 mm (2.39")

Depth 209.17 mm (8.235")

Weight Approximately 5 kg (11 lbs)

Electrical Current rating 1.25A maximum

Input voltage (system) 24 VDC ±10%

Serial communication Speciﬁcations are dependent on interface module use

Parallel communication Triggers and acknowledgments

Certiﬁcations See provided documentation

Environment Indoor use only

Altitude below 2000 m (2187.22 yd)

Ambient temperature 5°– 40°C (41° –104°F)

Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly

to 50% relative humidity at 40°C (104°F)

Main supply ﬂuctuations from 22–26 VDC

Transient overvoltages of overvoltage category II

Pollution degree 2

* Depends on tool configuration. Contact applications support for detailed window of operation.

** Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted

to comply with the pressure limits for a given viscosity, tubing diameter, tubing length, and tubing height.

INTELLIGEN LV DISPENSE SYSTEM

7Installation and Use Manual | Entegris, Inc.

COMPATIBILITY

The IntelliGen®dispense system has been optimized

for the dispense of photoresists and other photo-

chemicals. The system is uniquely designed to deliver

highly accurate dispenses even at very low volumes

with high repeatability.

The internal wettable surfaces of the dispense system

are PTFE, modiﬁed PTFE, and Kalrez.

The following is a partial list of compatible solvents.

Please contact Entegris for compatibility of a speciﬁc

solvent that is not included in the list.

Acetone

Adamantane (tricyclodecane)

n-Amyl acetate

Anisole (methyl phenyl ether,

methoxybenzene)

2-Butoxyethanol (ethylene glycol

monobutyl ether, butyl cellosolve)

n-Butyl acetate

Butyl alcohol

Butyl cyclohexane

Butyl ether (dibutyl ether)

Cyclopentanone

Cyclohexanone

Developer (positive, 0.26N TMAH)

Diacetone alcohol

DI water

Dichloromethane

(methylene chloride)

Diethyl maleate

DIGLYME

(diethylene glycol dimethyl ether)

Dimethyl acetamide

Dimethyl cyclohexane

Dimethyl maleate

Dimethyl sulfoxide

1,3-Dioxolane

(glycol methylene ether)

EEP (ethyl 3-ethoxypropionate)

ECA, EEA, EGMEA (cellosolve

acetate)

Ethanone (2,2-dimethoxy-

1,2-diphenyl, dimethoxy

phenylacetophenone)

Ethyl acetate

Ethyl acetyl acetate

(ethyl acetoacetate)

Ethyl alcohol

Ethyl benzene

Ethyl cyclohexane

Ethyl lactate

Ethyl malonate (diethyl malonate,

malonic ester)

Ethyl pyruvate

Gamma butyrolactone

2-Heptone (methyl amyl ketone)

Hexane

2-Hexanone (methyl butyl ketone,

propylacetone)

HMDS (hexamethyldisilazane)

Hexamethyldisiloxane

1,6-hexanediol diacrylate

2-hydroxy-2-methylpropiophenone

IPA (isopropyl alcohol, 2-propanol)

Isoamyl acetate

Isobutyl ketone (2,6-dimethyl-4-

heptanone, diisopropylacetone)

MCA (methyl cellosolve acetate,

2-methoxyethyl acetate)

Mesitylene (1,3,5 trimethylbenzene)

Methyl acetate (methyl acetic ester)

Methyl alcohol

Methyl ethyl ketone (2-butanone)

2-Methoxy-1-propanol

(monopropylene glycol

methyl ether)

MIBK (methyl isobutyl ketone,

4-methyl-2-pentanone)

Mineral oil

Mineral spirits

MMP (methyl 3-methoxypropionate)

Morpholine

NMP (N-methyl pyrrolidinone)

Octamethyltrisiloxane

Orthodichlorobenzene

(1,2-dichlorobenzene)

2-Pentanone (methyl propyl ketone)

Petroleum spirits (petroleum ether)

PGE (propylene glycol monoethyl

ether, 1-ethoxy-2-propanol)

PGME (propylene glycol

monomethyl ether,

1-methoxy-2-propanol)

PGMEA (propylene glycol

monomethyl ether acetate,

1-methoxy-2-propyl acetate)

PGPE (propylene glycol propyl

ether, 1-propoxy-2-propanol)

2-Propenamide

(N,N-dimethylacrylamide)

2-Propenoic acid

Propyl alcohol

Tetrahydrofuran

Trichloroethylene

2.5% TMAH (tetramethyl ammonium

hydroxide) in DI water

Toluene

Xylene

INTELLIGEN LV DISPENSE SYSTEM

Installation and Use Manual | Entegris, Inc.

SYSTEM OVERVIEW

—

APPEARANCE Communications/

power cable

Vacuum

inlet

Pressure

inlet

Fluid

inlet

Vent

Fluid

outlet

Top View

6.35 mm

(0.25")

Back View

38.0 mm

(1.50")

60.7 mm

(2.39")

8.00 mm

(0.25”")

Front View

Side View

209.2 mm (0.23")

9.80 mm

(0.39")

216.5 mm (0.52")

2.0 mm (0.08")

7.50 mm

(0.29")

62.0 mm

(2.44")

60.7 mm

(2.29")

200.1 mm

(7.88")

200.1 mm

(7.88")

189.5 mm

(7.46")

INTELLIGEN LV DISPENSE SYSTEM

9Installation and Use Manual | Entegris, Inc.

TWO-STAGE TECHNOLOGY OPERATING PRINCIPLE

The IntelliGen dispense system uses a proven, unique

two-stage design to operate dispense and ﬁltration

functions independently. Filtration occurs at a reduced

rate, which prevents microbubble formation and

maximizes ﬁlter performance.

The system uses two motors (one for ﬁll and one for

dispense) and advanced ﬂuid paths to deliver extreme

repeatability at dispense rates down to 0.1 mL/sec.

During normal operation, the dispense system

cycles through the dispense/ﬁll, ﬁltration, vent,

purge, ﬁll/ready, and ready states.

1. READY State

– The inlet, external outlet, vent, and purge valves

are closed.

– The isolate and barrier valves remain open for

a time to allow the system to reach ambient

pressure, then the valves close.

– The dispense chamber is full of ﬂuid and is ready

to dispense.

2. DISPENSE/FILL State

– The external valve opens as the dispense

motor pushes ﬂuid through the outlet and

onto the wafer.

– The dispense rate and volume are motor-

controlled and independent of the ﬁll and

ﬁltration rate.

– Simultaneously during dispense, the inlet valve

opens and begins ﬁlling the inlet chamber.

3. FILTRATION State

– The isolate and barrier valves open and the

ﬁll motor pushes ﬂuid through the ﬁlter and

into the dispense chamber as the dispense

motor retracts.

– At the programmed ﬁltration rate, the dispense

chamber ﬁlls with ﬁltered ﬂuid.

4. VENT State

– The barrier valve closes and the vent valve opens.

– The ﬁll motor pushes ﬂuid and bubbles upstream

of the ﬁlter membrane through the vent port.

5. PURGE State

– The barrier valve closes as the purge valve opens

and the dispense motor pushes ﬂuid out of the

dispense chamber to the inlet source. This step

ensures that the dispense ﬂuid contains no

bubbles.

6. FILL/READY State

– The dispense chamber is full of ﬂuid and ready

to dispense.

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