Pfeiffer Vacuum BASIC Manuale utente

OPERATING INSTRUCTIONS

Translation of the Original

CALIBRATION SYSTEM BASIC

Calibration system for vacuum gauges

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new calibration system is designed

to support you in your individual application with full performance and without malfunctions.

The name Pfeiffer Vacuum represents high-quality vacuum technology, a comprehensive and

complete range of top-quality products and first-class service. From this extensive, practical

experience we have gained a large volume of information that can contribute to efficient

deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/42

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 14

2.4 Limits of use of the product 14

2.5 Proper use 15

2.6 Foreseeable improper use 15

3 Product description 17

3.1 Structure 17

3.2 Function 18

3.2.1 Comparing measuring range limits 18

3.2.2 Calibrating vacuum gauges 18

3.3 Identifying the product 19

3.4 Scope of delivery 19

4 Transportation and Storage 20

4.1 Transporting the calibration system 20

4.2 Removing transport lock 20

4.3 Storing the calibration system 20

5 Installation 22

5.1 Installing the calibration system 22

5.2 Connecting vacuum measuring instruments 22

5.3 Connecting nitrogen supply 22

6 Operation 24

6.1 Switching on the calibration system 24

6.2 Performing a zero point adjustment and offset correction 24

6.3 Calibrating vacuum measuring instruments 25

6.4 Switching off and venting the calibration system 27

6.5 Interpreting calibration data 28

6.6 Examples of measuring accuracies 29

7 Maintenance 31

7.1 General maintenance information 31

7.2 Replacing the turbopump 31

8 Decommissioning 33

9 Recycling and disposal 34

9.1 General disposal information 34

9.2 Disposing of the calibration system 34

10 Malfunctions 35

11 Service solutions by Pfeiffer Vacuum 36

Table of contents

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12 Technical data and dimensions 38

12.1 General 38

12.2 Notes on standards and guidelines 38

12.3 Technical data 39

12.4 Dimensions 40

Declaration of conformity 41

Table of contents

4/42

List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Stickers on the product 8

Tbl. 3: Abbreviations used in this document 9

Tbl. 4: Limits of use of the product 15

Tbl. 5: Conversion table: Pressure units 38

Tbl. 6: Conversion table: Units for gas throughput 38

Tbl. 7: Technical data for calibration system BASIC 39

List of tables

5/42

List of figures

Fig. 1: Position of the stickers on the product 9

Fig. 2: Structure 17

Fig. 3: Vacuum diagram 18

Fig. 4: Example of a calibration report, page 1 28

Fig. 5: Example of a calibration report, page 2 29

Fig. 6: Measuring accuracies CMR 36x 30

Fig. 7: Measuring accuracies CMR 37x 30

Fig. 8: Removing the vacuum chamber 32

Fig. 9: Dimensions 40

List of figures

6/42

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

"Turbo pumping station" operating instructions

HiCube 80 Eco

PT 0553 1)

"Pirani/cold cathode gauge" operating instructions

PKR 361

BG 5164

"Dosing valve" operating instructions

EVN 116

BP 5005

Declaration of conformity (part of these instructions)

Tbl. 1: Applicable documents

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document is valid for the calibration system BASIC.

Different variants are distinguished by the nominal diameter (DN) and the number of flange connections

on the vacuum chamber.

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

1) Including individual components

About this manual

7/42

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

The pictographs used in the document indicate useful information.

Note

Tip

Wear laboratory gloves

Perform a visual inspection

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meanings.

CUS

TÜV Rheinland

Fuse

S/N

Mod.

Calibration System BASIC

P/N

Input

Mass

D-35614 Asslar

xxxxxxxx

PS A30 xxx

Made in Germany 2020/08

16 A

115-230 V, 50/60Hz

22.1 kg

Rating plate

The rating plate is located on the back of the housing.

VOR INBETRIEBNAHME

TRANSPORTSICHERUNG LÖSEN

BEFORE USE UNFASTEN THE

TRANSPORT PROTECTION

Transport lock

This sticker indicates that the backing pump transport lock

must be released prior to commissioning.

warranty seal

Warranty seal

The product is sealed ex-factory. Damaging or removing a war-

ranty seal results in loss of the warranty.

Protection class

The sticker describes protection class 1 for the product. Its

placement indicates the position for the ground connection.

Electrical voltage warning

The sticker warns of the risk of electric shock when working

with the housing open.

Mandatory: disconnect mains plug

The sticker indicates that the mains plug is to be disconnected

from the device prior to installation and maintenance work.

Tbl. 2: Stickers on the product

About this manual

8/42

6 + 7

Fig. 1: Position of the stickers on the product

1 Electrical voltage (power supply pack) warning sign 5 Transport lock sticker

2 Transport lock sticker 6 Closure seal (vacuum pump)

3 Rating plate 7 Ground connection sticker (vacuum pump)

4 Mandatory disconnect mains plug sign

1.3.4 Abbreviations

Abbreviation Meaning in this document

ATM Atmospheric pressure

DAkkS Deutsche Akkreditierungsstelle (German Accreditation Body)

DCU Display and Control Unit from Pfeiffer Vacuum

DKD Deutscher Kalibrierdienst (German Calibration Service)

DN Nominal diameter as size description

HV High vacuum

ISO International Organization for Standardization

MVP Diaphragm vacuum pump

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

TC Turbopump electronic drive unit (turbo controller)

TPS Voltage supply for turbopump (turbo power supply)

UUC Unit under calibration

UUT Unit under test

Tbl. 3: Abbreviations used in this document

About this manual

9/42

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product’s life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►Take particular care and pay special attention when transporting products manually.

►Do not stack the products.

►Wear protective equipment, e.g. safety shoes.

Safety

10/42

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