Contents OM-SC7610
SC7610 Sputter Coater 4 Issue 1
1.2 Chapter Contents
Chapter 1 - Contents ................................................................................................3
1.1 Manual Layout ................................................................................3
1.2 Chapter Contents ...........................................................................4
1.3 Illustrations .....................................................................................6
1.4 Tables ............................................................................................6
Chapter 2 - Health and Safety .................................................................................7
2.1 Control of Substances Hazardous to Health (COSHH) .................7
2.2 Safety Policy ...................................................................................7
2.3 Conformity ......................................................................................7
2.4 Servicing ........................................................................................8
2.4.1 Disclaimer ...............................................................................8
2.4.2 Operators and Service Engineers ..........................................8
2.5 Hazard Signals and Signs ..............................................................8
2.5.1 Hazard Signal Words .............................................................8
2.5.2 Hazard Labels used on Equipment ........................................8
2.5.3 Hazard Warning Labels used in Equipment Manuals ............9
2.5.4 Instrument Functionality Signs ...............................................9
2.5.5 Serious Damage to Instruments .............................................9
2.5.6 Hazard to Operator .................................................................9
2.6 Risk Analysis ..................................................................................10
2.6.1 Personal Operational Risks ....................................................10
2.6.2 Hazardous Materials ...............................................................10
2.7 Good Working Practices ................................................................11
2.8 SC7610 Sputter Coater Specific Safety Hazards ...........................11
2.8.1 Contamination ........................................................................11
Chapter 3 - Introduction............................................................................................12
3.1 Return of Goods..............................................................................12
3.2 Returns Procedure..........................................................................12
Chapter 4 - Description ............................................................................................13
4.1 Equipment ......................................................................................13
4.1.1 Optional Items ........................................................................13
4.1.2 Accessories ............................................................................13
4.2 Overview ........................................................................................14
4.3 Technical Specification ..................................................................14
4.3.1 SC7610 Sputter Coater Specification .....................................14
4.4 Physical Description .......................................................................15
4.4.1 Operational Description ..........................................................16
4.4.2 Pumping Requirements ..........................................................16
4.5 Interlocks ........................................................................................16
4.6 SC7610 Panel Details ....................................................................17
4.6.1 SC7610, Front Panel Controls ................................................17
4.6.2 SC7610, Rear Panel Connections ..........................................18
Chapter 5 - Installation .............................................................................................19
5.1 Unpacking Checklist ......................................................................19
5.1.1 Preparation .............................................................................19
5.2 SC7610 Installation ........................................................................20
5.2.1 Connections ............................................................................20
