Spectris PARTICLE MEASURING SYSTEMS HPGP 101-C Manuale utente

HPGP™ 101-C with PDS-E

Ultra High Purity Gas Particle Counter

and Particle Detection System

P/N 1000025203

OPERATIONS MANUAL

Without measurement there is no control

HEADQUARTERS

5475 Airport Blvd

Boulder, Colorado 80301 USA

T: +1 303 443 7100

Instrument Service & Support

T: +1 800 557 6363

Customer Response Center

T: +1 877 475 3317

E: Info@pmeasuring.com

GLOBAL OFFICES

AUSTRIA

T: +43 1 71 728 285

E: pmsaustria@pmeasuring.com

BENELUX

T: +32 10 23 71 56

E: pmsbelgium@pmeasuring.com

BRAZIL

T: +55 11 5188 8227

E: pmsbrazil@pmeasuring.com

CHINA

T: +86 21 6113 3600

E: pmschina@pmeasuring.com

FRANCE

T: +33 (0)1 60 10 32 96

E: pmsfranc[email protected]

GERMANY

T: +49 6151 6671 632

E: pmsgermany@pmeasuring.com

ITALY

T: +39 06 9053 0130

E: pmssrl@pmeasuring.com

JAPAN

T: +81 44 589 3498

E: pmsjapan@pmeasuring.com

KOREA

T: +82 31 286 5790

E: pmskorea@pmeasuring.com

MEXICO

T: +52 55 2271 5106

E: pmsmexic[email protected]om

NORDIC

T: +45 707 028 55

E: pmsnordic@pmeasuring.com

PUERTO RICO

T: +1 787 718 9096

E: pmspuertoric[email protected]om

SINGAPORE

T: +65 6496 0330

E: pmssingapore@pmeasuring.com

SWITZERLAND

T: +41 71 987 01 01

E: pmsswitzerland@pmeasuring.com

TAIWAN

T: +886-3-5525300 Ext: 301

E: pmstaiwan@pmeasuring.com

HPGP™ 101-C RoHS with PDS-E

Ultra High Purity Gas Particle Counter

and Particle Detection System

Operations Manual

P/N 1000025203 Rev D

ii HPGP™ 101-C RoHS with PDS-E Operations Manual

HPGPTM 101-C RoHS with PDS-E Operations Manual

P/N 1000025203 Rev D

Cajon® and Swagelok® are registered trademarks of the Swagelok Company.

Viton® is a registered trademark of Dupont Dow Elastomers L.L.C.

All trademarks appearing in this manual are the property of their respective owners.

This confidential document contains proprietary information, which is protected by

distributed, or transmitted in any form without the prior written consent of Particle

Measuring Systems. The information contained in this document is subject to change

without notice.

Quality Statement

The Quality Policy of Particle Measuring Systems is to strive to meet or exceed the

needs and expectations of our customers, and to align the activities of all employees

with the common focus of customer satisfaction through continuous improvement in

the quality of our products and services.

Environmental Information

This equipment must be properly disposed of at end-of-life by means of an

authorized waste management system. Contact our Customer Response Center at

(877) 475-3317 or (303) 443-7100 (International Telephone +1 3034437100) for

dismantling and disposal information.

DO NOT REPRODUCE OR DISTRIBUTE CONFIDENTIAL DOCUMENT

HPGP™ 101-C RoHS with PDS-E Operations Manual iii

Manual Conventions

It is important that you observe cautions and warnings while performing the

procedures described in this manual. Caution and warning labels are located on and

inside the instrument to alert you to potentially hazardous conditions. Please

familiarize yourself with this information.

WARNING

A warning in the text is used to notify the user of the potential for bodily injury or death.

CAUTION

A caution in the text is used to highlight an item that if not done, or incorrectly done, could

damage the instrument and/or any materials or devices affected by the instrument.

– — NOTICE — –

A notice in the text is an instructional communication regarding requirements or policies

issued by Particle Measuring Systems.

NOTE: A note in the text is used to highlight an item that is of operational importance

to the user.

iv HPGP™ 101-C RoHS with PDS-E Operations Manual

and Declaration of Conformity

Application of Council Directive(s): CE 2014/30/EU, 2014/53/EU, 2014/35/EU, RoHS 2011/65/EU,

2015/863

UKCA Electromagnetic Compatibility Regulations 2016,

Electrical Equipment (Safety) Regulations 2016

The Restriction of the Use of Certain Hazardous Substances in

Electrical and Electronic Equipment Regulations 2012

Standard(s) to which Conformity is Declared: EMC EN 61326-1:2013

S.I. 2016 No. 1091

Safety EN61010-1: 2010, 3rd, Ed., S.I. 2016 No. 1101, EN60825-1:2014

RoHS BS EN 63000:2018

Manufacturer’s Name: Particle Measuring Systems, Inc.

Manufacturer’s Address: 5475 Airport Boulevard

Boulder, CO 80301 USA

Manufacturer’s Telephone/FAX: + 1 3034437100 / + 1 3034496870

Distributor’s Name: Particle Measuring Systems, S.R.L.

Distributor’s Address Via di Grotte Portella 34

00044 Frascati (Roma) ITALY

Distributor’s Telephone/FAX: + 39 06 90530130 / + 39 06 9051315

Type of Equipment: Particle Monitoring

Model No: HPGP 101-C RoHS with PDS-E

I, the undersigned, hereby declare that the equipment specified above conforms to the above Directive(s) and Standard(s).

Signature: Signature:

Full Name: Scott MacLaughlin Full Name: Frank Panofen

Position: Director of Engineering Position: Marketing Manager, Life Sciences

Place: Boulder Date: April 25, 2022 Place: Rome Date: April 25, 2022

CAUTION

All I/O cables and accessories must meet current factory specifications in order for this unit to

remain in compliance with CE marking requirements. Consult the factory for details.

If the equipment is used in a manner not specified by the manufacturer, the protection provided

by the equipment may be impaired.

HPGP™ 101-C RoHS with PDS-E Operations Manual v

Table of Contents

List of Figures - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - ix

List of Tables - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - xi

Chapter 1: Introduction - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-1

Overview - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-1

HPGP 101-C Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-5

HPGP 101-C Front Panel Features - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-6

HPGP 101-C Materials - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-7

PDS-E Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-8

PDS-E Side Panel Features- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-8

PDS-E Materials - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-9

Chapter 2: HPGP 101-C Safety Considerations - - - - - - - - - - - - - - - - - - - - - - - - - - - 2-1

Safety Sheet - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2-3

Warning Labels- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2-3

Chapter 3: Unpacking and Installation- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-1

Unpacking - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-1

HPGP 101-C Unpacking - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-1

PDS-E Unpacking - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-2

Recycling - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-3

Installation of HPGP 101-C- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-4

Installing the PDS-E Wall Mount - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-6

Installing the PDS-E Rack Mount - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-7

Configuration - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-8

Chapter 4: PDS-E Communications Setup - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-1

Serial Setup Interface - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-2

Serial Configuration Commands - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-3

Alphabetical List of Serial Commands- - - - - - - - - - - - - - - - - - - - - - - - - - - 4-4

Telnet - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-13

Ethernet Communication Set Up- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-14

Set Ethernet Parameters - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-14

Additional Settings- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-15

Ethernet Settings Record- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-15

PMS Protocol (Facility Net) Configuration and Operation - - - - - - - - - - - 4-16

Modbus Configuration and Operation- - - - - - - - - - - - - - - - - - - - - - - - - - - 4-16

OPC Configuration and Operation- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-17

vi HPGP™ 101-C RoHS with PDS-E Operations Manual

Retro Operational Mode - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-18

Chapter 5: Performance Check - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-1

Particle Size Calibration Check - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-1

Reference Voltage - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-1

Air Flowrate Calibration Check - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-1

Zero Count Check - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-2

Chapter 6: Maintenance and Troubleshooting - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-1

Low Reference Voltage Background - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-1

Checking for Leaks- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-4

Transient Induced Counts - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-4

Nitrogen Purging and Backfilling the Probe Containment Vessel - - - - - 6-5

Pressure Method of Purging and Backfilling/Pressurizing - - - - - - - - 6-5

Vacuum Method of Purging and Backfilling - - - - - - - - - - - - - - - - - - - 6-7

Required items - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-7

Appendix A: International Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

WARNING - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

AVERTISSEMENT - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

WARNUNG - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

ATTENZIONE - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

ADVERTENCIA - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

Hazard Symbols- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-2

Symboles de risque - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-2

Warnschilder - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-3

Simboli di pericolo- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-3

Simbolos de peligro- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-3

Appendix B: Modbus Protocol - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-1

Modbus Overview - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-1

Input Registers- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-2

Holding Registers- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-6

Coils - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-7

Data Packet Processing - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-8

Associated Values for Specific Registry Entries- - - - - - - - - - - - - - - - - - - - B-8

Appendix C: OPC Communications - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - C-1

Connecting a PC to the PDS-E OPC Server - - - - - - - - - - - - - - - - - - - - - - - C-1

PDS-E OPC Data Access Tags- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - C-2

Appendix D: Ethernet Communications Overview - - - - - - - - - - - - - - - - - - - - - - - - D-1

IT Department - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-1

Ethernet Addressing Basics - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-1

HPGP™ 101-C RoHS with PDS-E Operations Manual vii

IP Address- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-2

Network Mask- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-2

Gateway Address - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-3

Multicast Address- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-3

MAC Address - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-3

Static IP Addresses versus DHCP Addresses - - - - - - - - - - - - - - - - - - - - - - D-4

Troubleshooting Ethernet Connectivity - - - - - - - - - - - - - - - - - - - - - - - - - D-5

Instrument to Laptop Ethernet Setup - - - - - - - - - - - - - - - - - - - - - - - - - - - D-7

Method 1: Modifying the IP Settings on a PC - - - - - - - - - - - - - - - - - - - D-7

Method 2: Modifying the Settings on an Instrument - - - - - - - - - - - - - D-10

Appendix E: Serial Communications Overview - - - - - - - - - - - - - - - - - - - - - - - - - - - E-1

Adapters and Cables - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-2

Useful Serial Adapters - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-2

USB Serial Port Adapter - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-3

USB Driver for Windows - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-3

Serial Cable - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-3

RJ-12 Cable and Adapter - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-4

Connector Signals - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-5

Communication Software Options - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-6

HyperTerminal - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-6

PuTTY - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-7

Tera Term- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-8

Communications Configuration - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-9

ENODE Specific Settings - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-9

Troubleshooting Serial Communications - - - - - - - - - - - - - - - - - - - - - - - - E-9

No Communications - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-9

Dropped Characters or Strange Characters- - - - - - - - - - - - - - - - - - - - E-9

Unexpected Characters - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - E-9

Appendix F: 有毒或有害的物质和元素 PDS-E - - - - - - - - - - - - - - - - - - - - - - - - - - - - F-1

Appendix G: 有毒或有害的物质和元素 HPGP 101-C - - - - - - - - - - - - - - - - - - - - - - G-1

Index - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Index-1

viii HPGP™ 101-C RoHS with PDS-E Operations Manual

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HPGP™ 101-C RoHS with PDS-E Operations Manual ix

List of Figures

Chapter 1: Introduction - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-1

Figure 1-1 The Particle Measuring Systems PDS-E and HPGP 101-C instruments - - - - - - - - - - - - - - 1-1

Figure 1-2 HPGP 101-C Dimensions - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-2

Figure 1-3 HPGP 101-C flow diagram - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-3

Figure 1-4 HPGP 101-C front panel - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-6

Figure 1-5 PDS-E side panel connectors - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 1-9

Chapter 2: HPGP 101-C Safety Considerations - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2-1

Chapter 3: Unpacking and Installation - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-1

Figure 3-1 HPGP 101-C shipping kit - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-1

Figure 3-2 PDS-E shipping kitRecycling - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-2

Figure 3-3 Attaching the Fill Gauge- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-4

Figure 3-4 PDS-E with wall mounting brackets- - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-6

Figure 3-5 Rack mount PDS-E (rear) - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-7

Figure 3-6 19” Rack mount PDS-E (front) - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 3-7

Chapter 4: PDS-E Communications Setup - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-1

Figure 4-1 Communication ports on side panel of the PDS-E. - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4-1

Chapter 5: Performance Check - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5-1

Chapter 6: Maintenance and Troubleshooting - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-1

Figure 6-1 HPGP 101-C Optical System diagram - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-2

Figure 6-2 HPGP 101-C cylinder assembly - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-3

Figure 6-3 Detail of HPGP 101-C cylinder assembly - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6-3

Appendix A: International Precautions - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - A-1

Appendix B: Modbus Protocol - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - B-1

Appendix C: OPC Communications - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - C-1

Appendix D: Ethernet Communications Overview - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-1

Figure D-1 Ethernet port connectivity LED - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-5

Figure D-2 Example for ping test - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-6

Figure D-3 Example for ipconfig command - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-6

Figure D-4 Local Area Connection Properties window - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-8

Figure D-5 The IP address and subnet mask defined - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - D-9

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