Temescal FC-2800 Manuale utente

FACILITY AND INSTALLATION GUIDE FOR

FC/BCD-2800 EVAPORATION SYSTEMS

Temescal, a division of Ferrotec (USA) Corporation

4569-C Las Positas Road, Livermore, CA 94551

Tel: 1-800-522-1215; Fax: 925-449-4096

0101-8603-0

Revision F, March 2011

Revision History

0101-8603-0

Revision Change Description Reason/

Application Date Approved

A First published version of FC-2800 F

& I Guide Applies to all FC-2800

systems July

2006 SS

B Revised sections 1.4, 2.2.1, and

3.2.7. Modified Figures 3-4 through

3-14.

Clarified specifications and

instructions regarding cold

water supplies #2 and #3.

Nov.

2006 SS

C Throughout manual, deleted

information related to Simba 2 power

supply. In Section 1, expanded Site

Preparation Checklist to include

cable length selections. In Sections 1

and 2, updated current specifications

for CV-16SLX and CV-12SL power

supplies. Added Figs. 3-3 and 3-4,

updated Fig. 3-5, and deleted former

Figs. 3-7 through 3-12.

Phase-out of Simba 2

power supply. Received

updated Engineering info

regarding current specifi-

cations for CV-6SLX and

CV-12 SL power supplies.

Aug.

2009 CK

D In sections 1.4 and 2.5, corrected

values for power drops to be

provided for vacuum system and e-

beam power supply..

Updated specifications

provided by Temescal Field

Service and Temescal

Engineering.

July

2010 LW

E Updated Figure 3-2. Minor corrections to

drawing. Oct.

2010 LW

FIn sections 1.4 and 2.4, corrected

input power specifications for

vacuum system.

Updated information

provided by Temescal Field

Service.

March

2011 LW

0101-8603-0, Rev. F i FC/BCD-2800 F & I Guide

TABLE OF CONTENTS

Section Page

Table of Contents.........................................................................................i

Safety Instructions for Operating and Service Personnel............................ iii

Special Amendment for U.K. Users: Electrical Safety Precautions ............. iv

User Responsibility.......................................................................................v

Guidelines and Good Practices....................................................................v

Health Hazard ............................................................................................. vi

1 INTRODUCTION AND SITE PREPARATION CHECKLIST

1.1 Scope and Purpose of this Guide...............................................................1-1

1.2 Temescal Contact information....................................................................1-1

1.3 General Safety Information.........................................................................1-2

1.4 Site Preparation Checklist..........................................................................1-2

2 FACILITY REQUIREMENTS

2.1 Environment...............................................................................................2-1

2.2 Water .........................................................................................................2-1

2.3 Compressed Gases.................................................................................... 2-2

2.4 Electrical Power Requirements ..................................................................2-3

2.5 Electrical Grounding Requirements............................................................ 2-3

3 UNPACKING and INSTALLATION

3.1 Unpacking by Customer..............................................................................3-1

3.2 Customer’s Site Preparation Responsibilities..............................................3-2

3.3 Temescal Installation Responsibilities.........................................................3-5

3.4 Installation Drawings...................................................................................3-6

LIST OF ILLUSTRATIONS

Fig. Number Page

2-1 Facility and System Grounding Requirements ................................................................................... 2-4

2-2 Low-Z Grounding Requirements for the E-Beam Power Supply......................................................... 2-5

3-1 Vacuum Cubicle Height and Width..................................................................................................... 3-6

3-2 System Plan View, Showing Dimensions of Major Components........................................................ 3-7

3-3 Mounting Hole Locations for System Power Distribution Box............................................................. 3-8

3-4 Vacuum Cubicle Footprint, Showing Precise Locations of Casters, Leveling Feet, and

Seismic Brackets................................................................................................................................ 3-9

3-5 Utility Connection Points on Rear of Vacuum Cubicle...................................................................... 3-10

3-6 Routing of Customer Supplied Utility Lines in 208-V Installations .................................................... 3-11

3-7 Routing of Customer Supplied Utility Lines in 400-V Installations .................................................... 3-12

3-8 Routing of Helium Lines (Temescal Supplied)..................................................................................3-13

3-9 Routing of EMO Cables and Copper Grounding Straps (Temescal Supplied).................................. 3-14

3-10 Routing of Power and Control/Data Cables (Temescal Supplied) .................................................... 3-15

FC/BCD-2800 F & I Guide 0101-8603-0, Rev. F

This page has been intentionally left blank for pagination purposes.

0101-8603-0, Rev. F iii FC/BCD-2800 F & I Guide

SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL

Operators and service personnel should always wear safety glasses. Operators shall not enter areas

intended for service access only. Only experienced service personnel should enter such areas, and

only after taking the preliminary precautions described in paragraphs 1 through 6 below.

DANGER

Potentially lethal voltages may exist within this unit, even with the line power switched off.

Service should only be attempted by qualified personnel. Failure to observe all safety

precautions may result in personal injury.

This component is designed to operate as part of a system containing high-voltage equipment.

Observe the precautions described below when servicing this system, especially when servicing

components where high voltages may be present.

1. Before servicing or operating this equipment, read all the component manuals supplied with the

system, paying special attention to safety instructions.

2. Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area.

3. Remove rings, watches, bracelets, and any other metal jewelry before working around high

voltage.

4. DO NOT WORK ALONE!

5. Be sure that all equipment is connected to a power receptacle having the correct polarity and

grounding, as prescribed by the local electrical codes. Refer to the power supply portion of the

documentation to determine the proper electrical ground for high-voltage components.

6. Before servicing any high-voltage component, switch off the electrical power at the component’s

main power switch. This switch should have a lockout feature. Lock the power off and keep the

key with you while you are working on the equipment.

7. Certain electrical parts (e.g., electrolytic capacitors) hold a lethal voltage even after the power is

switched off. Before entering any service area, use a grounding hook to discharge such parts. Be

sure that these parts are discharged before starting any repairs.

8. DO NOT touch high-voltage leads unless power is off and a grounding hook is connected to the

parts to be serviced.

9. The high-voltage components of the system should be equipped with electrical interlocks to

protect personnel from injury. DO NOT ATTEMPT TO DEFEAT, OVERRIDE, OR BYPASS

THESE PROTECTIVE DEVICES!

10. Never leave loose ends on high-voltage connections.

11. Observe the following warning if the system employs Radio Frequency (RF) power.

DANGER

RF radiation—even at modest power levels—can cause serious injury. If any of the RF

components (e.g., the RF power supply, the RF matching network, or the RF electrodes or

shielding inside the product chamber) are moved or changed in any way, the RF energy may

be radiated outside the equipment. Monitor the equipment to assure that external RF

radiation is below the levels prescribed by any and all applicable safety codes.

FC/BCD-2800 F & I Guide iv 0101-8603-0, Rev. F

Special Amendment for United Kingdom Users

All Electrical Power Sources: Safety Precautions

This component is designed to be used in an extra-high-voltage system. Only authorized personnel

should be permitted to carry out work on this system.

Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and

conductors in both the vacuum system and the high-voltage power supply. Screens protecting extra-

high-voltage conductors should be removed only if appropriate action has been taken to ensure that

extra-high-voltage conductors are dead and cannot be reenergized inadvertently.

In addition, all personnel should be aware of:

1. The Electricity (Factories Act) Special Regulations (1908 and 1944), in particular, Regulations

18(d) and 28 of the 1980 Regulations, as amended; and

2. The employer’s responsibility to set up suitable systems to safeguard the health and safety of

employees, according to the Health & Safety at Work etc. Act (1974).

0101-8603-0 v Rev. F

USER RESPONSIBILITY

This equipment will perform in accordance with the instructions and information contained in the

user’s manual and its referenced documents when such equipment is installed, operated, and

maintained in compliance with such instructions. The equipment must be checked periodically.

Defective equipment shall not be used. Parts that are broken, missing, plainly worn, distorted, or

contaminated, shall be replaced immediately. Should such repair or replacement become

necessary, a telephone or written request for service should be made to Temescal, Livermore, CA,

a division of Ferrotec (USA) Corp.

The equipment, or any of its parts, shall not be altered without the prior written approval of

Temescal. The user and/or purchaser of this equipment shall have the sole responsibility for any

malfunction which results from improper use, faulty maintenance, damage, improper repair, or

alteration by any party other than Temescal.

GUIDELINES AND GOOD PRACTICES

1. Follow applicable clean room procedures (smocks, masks, gloves, etc.).

2. Do not expose the vent and purge valves to excessive pressures. The nitrogen line regulator is

factory set at 15 psi and must not be adjusted above 20 psi.

3. Prevent oil, grease, water, sweat, etc. from getting into the vacuum chamber.

4. Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage

feedthroughs are protected from being coated.

5. Clean all mechanical parts and seals with lint-free paper/cloth soaked with isopropyl alcohol

(IPA). Dispose all IPA-exposed cleaning paper/cloth in a fireproof container, while ensuring

proper safety precautions are being followed.

6. Polish scratched surfaces with Scotch-Brite, taking care not to produce any cross scratches.

7. Shaft seals are all ferromagnetic. No lubrication is required.

8. Check the chamber door’s seal and sealing surfaces each time before closing it.

9. Check and clean with IPA the source tray seals and sealing surfaces each time before raising

the source tray into place.

10. Train staff by competent personnel. DO NOT allow staff to operate or do maintenance and

recovery work on the machine until they are trained by competent personnel.

11. Document all alarms, deviations, breakdowns, and servicings done on either a hardcopy or an

electronic equipment-log system.

FC/BCD-2800 F & I Guide vi 0101-8603-0, Rev. F

HEALTH HAZARD

The condensates deposited on the tank walls of a vacuum system are generally in the form of

extremely fine particles. The nature, as well as the form, of the materials poses the following

potential health hazards:

a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a

protective respirator mask with fine filter that has been approved by the National Institute for

Occupational Safety and Health (NIOSH) and the federal Mine Safety and Health

Administration (MSHA).

b) Some substances are toxic and inhaling them should be avoided. Take steps to ascertain

whether or not the material being deposited is a known toxic substance. Refer to the Material

Safety Data Sheet(s) covering the evaporant(s) in question.

c) Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or

other oxidizers. Therefore, when opening the chamber door after a deposition cycle, exercise

extreme caution and allow time for the coating surface to oxidize. Breakage of some of the

more reactive condensates may be hazardous, even when the above precautions are observed.

In this situation, fire-protective clothing should be worn.

d) Certain powders (platinum, for instance) are known to catalyze methyl alcohol vapors upon

contact, generating heat in the process and possibly causing a fire to erupt. Therefore, never

use methyl alcohol to wipe down or clean any internal tank surfaces of a vacuum system.

Use isopropyl alcohol (IPA), instead. Dispose of all IPA-exposed lint-free paper/cloth into a

fireproof container, while ensuring all proper safety procedures and precautions are being

followed.

0101-8603-0 vii Rev. F

Customer

Documentation

Survey

In an effort to provide continuous improvement and ensure technical accuracy regarding product

documentation, we invite you to comment on this Facilities & Installation (F & I) Guide.

Please fill out and return this form to Temescal as soon as possible. Thank You.

Company: __________________________________________ Today’s Date: _____________

System Ordered: _____________________________________ Delivery Date: _____________

1. Please rate the quality of the information provided using the following rating system:

1 = Excellent 2 = Good 3 = Acceptable 4 = Fair 5 = Poor

Sitepreparationchecklist 12345

Descriptions of facility requirements 12345

Installationinstructions 12345

Installationdrawings 12345

2. Was the information in this manual clearly presented and easy to understand?

YES NO

If NO, please cite specific references: _____________________________________

____________________________________________________________________

3. Did you find errors in this manual? YES NO

If YES, typographical or technical? (please cite the pages)

____________________________________________________________________

4. How important was this F & I Guide in preparing for your system (circle one)?

Essential Important Nice to Have Not Important

5. Do you currently own and operate any other Temescal Systems? YES NO

(please specify) ______________________________________________________

6. What kind of information would you like to see in future F&I Guides?

____________________________________________________________________

7. Do you have any additional comments/suggestions/complaints? If so, please explain:

____________________________________________________________________

Name: __________________________________ Telephone: ______________________

Fax #: __________________________________ E-mail: __________________________

Thank you for taking the time to review our documentation. Please mail or fax this form back to:

Temescal, a division of Ferrotec (USA) Corp.

Attn: Customer Support

4569-C Las Positas Road, Livermore, CA 94551

Telephone: 1-800-522-1215 Fax: 925-449-4096

FC/BCD-2800 F & I Guide viii 0101-8603-0, Rev. F

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