BRONKHORST VDM Series Manuale utente

Doc. no.: 9.17.079D Date: 06-02-2018

ATTENTION

Pleaseread this Instruction Manual carefully beforeinstalling and operating the instrument.

Not following the guidelines could resultin personal injury and/or damage to the equipment.

Vapor Delivery Module

Instruction Manual

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079D2

Disclaimer

The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is

assumed for inaccuracies. The material in this manual is for information purposes only.

Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to

change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its

products and modify the contents without being obliged to inform any particular persons or organizations. The device

specifications and the contents of the package may deviate from what is stated in this document.

Symbols

Important information. Disregarding this information could cause injuries to people or damage to the instrument or

installation.

Helpful information. This information will facilitate the use of the instrument and/or contribute to its optimal

performance.

Additional info available on the internet or from your local sales representative.

Receipt of equipment

Check the outside package box for damage incurred during shipment. If the box is damaged, then the local carrier must be

notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales

representative.

Carefully remove the equipment from the box. Verify that the equipment was not damaged during shipment. Should the

equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same

time a report should be submitted to your local sales representative.

Check the packing list to ensure that you received all of the items within the scope of delivery.

Do not discard spare or replacement parts with the packaging material and inspect the contents for damage.

Refer to Removal and return instructions about return shipment procedures.

Equipment storage

The equipment should be stored in its original package in a cupboard warehouse or similar. Care should be taken not to

subject the equipment to excessive temperatures or humidity.

Bronkhorst®

Instruction Manual Vapor Delivery Module9.17.079D 3

Warranty

Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date

of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical

damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are

normally warranted for one year or the balance of the original warranty, whichever is the longer.

See also section 9 (Guarantee) of the Conditions of sales:

www.bronkhorst.com/about/conditions-of-sales/

The warranty includes all initial and latent defects, random failures, and indeterminable internal causes.

It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock

etc.

Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be

charged for.

Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is

performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to

our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping

methods/carriers are paid by the customer.

General safety precautions

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety

precautions required to avoid possible injury. Read the operating information carefully before using the product.

Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting

cables for cracks or breaks before each use.

The equipment and accessories must be used in accordance with their specifications and operating instructions, otherwise

the safety of the equipment may be impaired.

If required, replace fuses with the same type and rating for continued protection against fire hazard.

Opening of the equipment is not allowed. There are no repairable parts inside. In case of a defect please return the

equipment to Bronkhorst High-Tech B.V.

One or more warning signs may be present on different parts of the product. These signs have the following meaning:

Consult the instruction manual for handling instructions

Surface may get hot during operation

Shock hazard; electrical parts inside

To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standard

fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are

not safety related may be obtained from other suppliers, as long as they are equivalent to the original component. Selected

parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsure

about the relevance of a replacement component, contact Bronkhorst for information.

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079D4

Bronkhorst®

Instruction Manual Vapor Delivery Module9.17.079D 5

Table of contents

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Introduction 1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this manual

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.3 Other documents

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Starting up 2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.1 Functional properties

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.2 Rated pressure test inspection

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.3 Install module

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.4 Model key

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Technical specifications 3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.1 Physical dimensions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.2 Ambient conditions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.3 Ingress protection class

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.4 Fluidic connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Flow ranges of used components 3.4.1

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11Pressure rating 3.4.3

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113.6 Electrical connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11Mains 3.6.1

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Installation 4

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Starting up without using vacuum 4.6.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Filling system 4.6.1.1

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Starting up using vacuum 4.6.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Filling system 4.6.2.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Starting process 4.6.2.2

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Operation 5

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079D6

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19Buttons 5.2.1

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Troubleshooting and service 6

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246.1 Common issues

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.2 Maintenance

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.3 Service

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Removal and return instructions 7

Bronkhorst®

Instruction Manual Vapor Delivery Module9.17.079D 7

1Introduction

1.1 Scope of this manual

This manual contains general product information, installation and operating instructions and troubleshooting tips for the

Vapor Delivery Module (VDM).

1.2 Intended use

The VDM is a compact integrated system to realize mass flow control of a vapor. The VDM is intended to generate a

predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately controlled carrier

gas flow with subsequent evaporation inside a temperature controlled chamber.

The user is considered to be familiar and to comply with the necessary safety precautions and appropriate protective

measures as described in the Material Safety Data Sheets of the media to be used in the system.

The end user is considered to be familiar with the necessary safety precautions, and to comply with the appropriate

protective measures as described in the Material Safety Data Sheets of the media to be used in the system (if applicable).

Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and corrosion resistance of the

used materials against the metered media lies solely with the end user.

Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper use or use for other than the

intended purpose.

1.3 Other documents

Manuals and guides for digital instruments are modular. General instructions give information about the functioning and

installation of instruments. Operational instructions explain the use of the digital instruments features and parameters.

Field bus specific information explains the installation and use of the field bus installed on the instrument.

The following documents contain information for basic and advanced operation, more detailed product information and

troubleshooting tips:

·Instruction manual FLOW-BUS interface (document nr. 9.17.024)

·Instruction manual RS232 interface with FLOW-BUS protocol (document nr. 9.17.027)

·Instruction manual E-8000 Readout and Control System (document nr. 9.17.076)

For RS232 or FLOW-BUS operation the following Bronkhorst software is available:

·FlowDDE

Interface between digital instruments and Windows software

·FlowView

Operating Bronkhorst digital instruments

·Flowfix

Fieldbus connection of digital instruments

·FlowPlot

Monitoring and optimizing digital instrument parameters

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079D8

Manuals and software tooling can be found at

http://www.bronkhorst.com/en/downloads

Bronkhorst®

Instruction Manual Vapor Delivery Module9.17.079D 9

2Starting up

2.1 Functional properties

Before installing the VDM, check if the functional properties match your requirements:

·Model key

·Pressure rate

·Temperature (ambient)

·Power supply

·Power consumption

2.2 Rated pressure test inspection

Bronkhorst® instruments are pressure tested to at least 1.5 times the specified working process

conditions and outboard leak tested to at least 2 * 10-9 mbar l/s Helium. The tested pressure is specified

on the instrument with a red sticker. If this sticker is missing or if the specified pressure is insufficient,

the instrument must not be used and should be returned to the factory.

Before installation, make sure that the tested pressure is in accordance with the safety factor of your application. The tested

pressure must always be higher than the maximum operating pressure.

Disassembling the instrument and/or replacing parts of it will invalidate the pressure test specification.

2.3 Install module

See section Installation for detailed installation instructions.

Before switching on power, please check if all external electrical and communication (if necessary) connections are properly

connected.

2.4 Model key

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079D10

3Technical specifications

3.1 Physical dimensions

For overall dimensions please consult supplied dimensional drawing 7.05.901. This document is available on

http://www.bronkhorst.com/en/downloads or can be obtained by contacting our local sales & service representatives

3.2 Ambient conditions

·Ambient temperature : 5°C - 40°C.

·Relative humidity : Maximum relative humidity 80%, for temperatures up to 31°C decreasing linearly

to 50% relative humidity at 40°C.

·Height altitude : Up to 2000 m.

3.3 Ingress protection class

IP20, according IEC standard 60529.

3.4 Fluidic connections

The VDM gas and liquid supply are equipped with compression type or face-seal-fittings. Normally these fittings are BSP

parallel threads types which have to be used in combination with elastomeric O-rings to seal to the VDM. Occasionally

fittings are orbital welded to the VDM.

For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting body

and that no dirt or dust is present on tube, ferrules or fittings.

For exact information on the fitting, please contact Swagelok for further instructions or documentation.

Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous fluids are

used.

3.4.1 Flow ranges of used components

Model

Heater

model

Thermal

power

Max. capacity*

Max temp.

SW-

10n

W-100A

10 W

1…30 g/h liquid

0.05…4 ln/min gas

200°C

SW-

20n

W-200A

100 W

10…120 g/h liquid

0.2…10 ln/min gas

200°C

*) Depending on liquid and process pressure; table based on water at 1 atmosphere.

For other liquids or pressure conditions please consult the manufacturer or your local sales representative.

3.4.2 Capacity

Capacity SW-100 Vaporizer

Capacity SW-200 Vaporizer

Indice

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