Edwards SCU-1601 Manuale utente

MT-96E-1B1-0

Description Voltage

SCU-1601 Control Unit 200 - 240 Va.c.

SCU-1601 Control Unit

for STP-XA2703BV155 / STP-XA3203BV155

Instruction Manual (C)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

STP pump specific information

Instruction Manual (C):

(This Instruction Manual)

STP control unit Instruction Manual

Supplied with STP control unit

Instruction Manual (D):

STC-U e-TMS unit for Turbomolecular

Pump

2022.06

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-96-001

This declaration of conformity is issued under the sole responsibility of the manufacturer:

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 276-8523

Japan

Documentation Officer

Jana Sigmunda 300

Lutín , 78349

Czech Republic

T: +42(0) 580 582 728

[email protected]

Product Name:

Control unit for turbomolecular pump

Model Number:

SCU-1601 series

Is in conformity with the relevant requirements of European CE legislation:

2014/35/EU

Low voltage directive (LVD)

2014/30/EU

Electromagnetic compatibility (EMC) directive

Class A Emissions, Industrial Immunity

2011/65/EU

Restriction of certain hazardous substances (RoHS) directive

as amended by Delegated Directive (EU) 2015/863

Based on the relevant requirements of harmonised standards:

EN 61010-1:2010 +A1:2019

Safety requirements for electrical equipment for measurement, control and

laboratory use. General requirements

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC

requirements

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 13th-Apr-2023

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Tanya Palmer

Vice President, Engineering, Semiconductor Chamber

Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

Declaration of Conformity

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-96-001

Edwards Japan Limited

1078-1,Yoshihashi,

Yachiyo-shi

Chiba, 276-8523

Japan

Documentation Officer

Innovation Drive

Burgess Hill

West Sussex

RH15 9TW

[email protected]

This declaration of conformity is issued under the sole responsibility of the manufacturer.

Product Name:

Control unit for turbomolecular pump

Model Number:

SCU-1601 series

The object of the declaration described above is in conformity with relevant statutory requirements:

Electrical Equipment (Safety) Regulations 2016

Electromagnetic Compatibility Regulations 2016

Class A Emissions, Industrial Immunity

Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012

Relevant designated standards or technical specifications are as follows:

EN 61010-1:2010 +A1:2019

Safety requirements for electrical equipment for measurement, control and

laboratory use. General requirements

EN 61326-1:2013

Electrical equipment for measurement, control and laboratory use. EMC

requirements. General requirements. Class A Emissions, Industrial Immunity

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on: 13th-Apr-2023

You must retain the signed legal declaration for future reference

This declaration becomes invalid if modifications are made to the product without prior agreement.

Signed for and on behalf of Edwards Ltd

Tanya Palmer

Vice President, Engineering, Semiconductor Chamber

Solutions

Chelmsford

Petr Tochacek

General Manager, PC Yachiyo

Yachiyo

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-96-001

ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION

RoHS (EU, UK):Material Exemption Information

This product is compliant with the following Exemptions

Annex III:

•6(a)-I Lead as an alloying element in steel for machining purposes containing up to 0,35 % lead by weight and in

batch hot dip galvanised steel components containing up to 0,2 % lead by weight

•6(b)-I Lead as an alloying element in aluminium containing up to 0,4 % lead by weight, provided it stems from lead

bearing aluminium scrap recycling

•6(c) Copper alloy containing up to 4 % lead by weight

•7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more

lead)

•7(c)-I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in

capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound

REACH (EU, UK)

This product is a complex article which is not designed for intentional substance release. To the best of our knowledge

the materials used comply with the requirements of REACH. The product manual provides information and instruction

to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.

Article 33.1 Declaration:

This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the

2015 European Court of Justice ruling in case C-106/14.

•Lead (Pb)

This substance is present in certain steel / aluminium / brass components.

•Imidazolidine-2-thione

This substance is present in certain rubber components.

This product has been manufactured under a quality management system certified to ISO9001:2015.

This declaration is based on the requirements of ENISO17050-1 and the relevant directives.

VI-DOC-96-001

材料成分声明

China Material Content Declaration

有害物质

Hazardous Substances

部件名称

Part name

铅

Lead

(Pb)

汞

Mercury

(Hg)

镉

Cadmium

(Cd)

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated

biphenyls

(PBB)

多溴二苯醚

Polybrominated

diphenyl ethers

(PBDE)

铸铝及铝合金制品

Aluminium alloys

〇

电缆/电线/连接器

Cable/wire/connector

〇

印刷电路组件 (PCA)

Printed Circuit Assembly (PCA)

〇

电子元件和控件

Electronics and

Controls

〇

O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit

requirement in GB/T 26572.

X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is

above the limit requirement of GB/T26572.

The description of this product consists of the four-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link

•EdCentra

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Instruction Manual (D)

STC-U eTMS unit for Turbomolecular Pump:

•Introduction

•Technical data

•Installation

•Operation

•Maintenance and inspection

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

 
SCU-1601 Control Unit for Turbomolecular Pump 
 
MT-96E-1B1-0 
Page i 
PAGE 
i 
 
 
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1 Scope and definitions 1 
2 Electromagnetic compatibility 2 
3 Limited warranty 3 
3.1 Item warranted 3 
3.2 Disclaimer 3 
3.3 Spare parts 4 
4 Labels 4 
5 Label affixing positions 6 
6 General description 7 
6.1 Cable sets 8 
2TECHNICAL DATA 11 
1 SCU-1601 specifications 11 
3INSTALLATION 15 
1 Unpacking 15 
2 Front panel 15 
3 Rear panel 18 
4 Precautions before installation 19 
4.1 Operating environment 19 
4.2 Insulation test 19 
4.3 Installation area 20 
5 Attaching the SCU-1601 to a rack 21 
6 Cable connection 22 
6.1 STP connection cable 23 
6.2 STC-U remote branch cable 24 
6.3 STC-U remote cable 25 
6.4 Power extension cable 26 
6.5 Power cable 27 
7 Connecting to semiconductor equipment 30 
7.1 Connecting to power 30 
7.2 Emergency off circuit (EMO circuit) 30 
8 Remote communication 31 
8.1 Parallel communication 31 
8.2 Serial communication 31 
9 Adjustment methods 32 
9.1 Tuning 32 
9.2 Tuning method 32 
9.3 Change of data after tuning 35 
10 Confirmation mode 36 
10.1 Confirmation method 36 
11 Parameter set mode 39 
11.1 Remote operation setting 39 
11.2 Rotational speed setting 39 
11.3 TMS function setting 39 

 
SCU-1601 Control Unit for Turbomolecular Pump 
 
MT-96E-1B1-0 
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CONTENTS (CONTINUED) 
Section Title Page 
11.4 Rotational inhibit signal setting 39 
11.5 Second speed option setting 39 
11.6 Second speed setting 39 
11.7 Optional output signal setting 
(Emergency vent valve setting) 40 
11.8 Second Damage Limit setting 40 
11.9 Warning function setting 41 
11.10 Serial port COM1 setting 42 
11.11 Serial port COM2 setting 42 
11.12 Date/Time setting 42 
11.13 EdCentra setting 42 
11.14 Factory setting 42 
11.15 Parameter setting procedure 43 
12 Manual operation mode 50 
4OPERATION 53 
1 Before starting the STP pump 53 
1.1 Confirmation before starting 53 
1.2 Confirmation of vacuum system 53 
2 Powering ON 54 
2.1 Self test 54 
2.2 "CAUTION" message in the self test state 54 
3 How to start/stop the STP pump 55 
4 Manual start/stop the STP pump 55 
4.1 Starting the STP pump 55 
4.2 Stopping the STP pump 55 
4.3 Starting the STP pump after stopping 56 
5 Remote operation 58 
5.1 Input signal pins 58 
5.2 Output signal pins 62 
5.3 Remote setting 66 
5.4 Starting/Stopping the STP pump 66 
5.5 Rotation INHIBIT signal 67 
5.6 Second speed option 68 
5.7 Starting the STP pump after stopping 70 
5.8 Starting the STP pump after a safety function operates 70 
6 Powering OFF 70 
7 Operating the TMS unit (for use with the TMS unit) 71 
7.1 Before starting 71 
7.2 Starting/Stopping 71 
7.3 Setting the TMS unit function 71 
7.4 Temperature control 71 
5SERIAL COMMUNICATION PROTOCOL 73 
1 Introduction 73 
2 Connection and setting up 74 
2.1 Signal connection 74 
2.2 Connecting the RS485 76 

 
SCU-1601 Control Unit for Turbomolecular Pump 
 
MT-96E-1B1-0 
Page iii 
PAGE 
iii 
 
CONTENTS (CONTINUED) 
Section Title Page 
2.3 Communication parameter setting 78 
2.4 Recommended items about communication cable installation 79 
3 Protocol specifications 82 
3.1 General description 82 
3.2 Standard transmission frame 
(in the RS232/RS485 single point connection) 83 
3.3 Control command 
(in the RS232/RS485 single point connection) 84 
3.4 Query command 
(in the RS232/RS485 single point connection) 85 
3.5 Transmission data format 86 
3.6 Frame control (checksum) 86 
3.7 Error control 87 
3.8 Transmission frame in the RS485 multi-point connection 87 
3.9 Control command in the RS485 multi-point connection 88 
3.10 Query command in the RS485 multi-point connection 90 
3.11 Broadcasting command in the RS485 multi-point connection 91 
3.12 Application note 92 
4 Command specifications 96 
4.1 Command list 96 
4.2 ReadMeas 97 
4.3 Command 97 
4.4 ReadFailMess 98 
4.5 ReadModFonct 101 
4.6 ReadVersion 103 
4.7 ReadCounters 104 
4.8 ReadSetPoint 105 
4.9 ReadMotorTemp 105 
4.10 ReadStatus 106 
4.11 ReadEvents 107 
4.12 SetSpeedSetPoint 108 
4.13 ReadSpeedSetPoint 109 
4.14 ReadModFonctWithWarning 110 
4.15 ReadMeasValue 113 
4.16 SetOptions 115 
4.16.1 Second speed option setting 116 
4.16.2 Second speed selection 117 
4.17 ReadOptions 118 
4.17.1 Second speed function setting 119 
4.17.2 Second speed select 120 
4.17.3 External TMS unit setting 121 
4.17.4 External TMS temperature 124 
6STP-LINK 127 
7EDCENTRA 129 
 

 
SCU-1601 Control Unit for Turbomolecular Pump 
 
MT-96E-1B1-0 
Page iv 
PAGE
iv 
 
CONTENTS (CONTINUED) 
Section Title Page 
8MAINTENANCE 131 
1 Safety functions 131 
1.1 Power failure 131 
1.2 Operation after a power recovery 132 
1.3 Abnormal state of magnetic bearing 133 
1.4 Excessive vibration 133 
1.5 Motor driver overload 133 
1.6 Overheating inside the STP pump 133 
1.7 Overheating inside the SCU-1601 133 
1.8 Overspeed 134 
1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 134 
2 "WARNING" message function 135 
2.1 "WARNING" message display function 135 
3 "WARNING" message description 136 
3.1 Damage point function 136 
3.2 First damage limit 136 
3.3 Second damage limit 136 
3.4 Imbalance X_H, X_B, Z 136 
3.5 Pump run time over 137 
3.6 Pump overload 137 
3.7 Low RTC battery 138 
3.8 Much MotorCurrent 138 
4 "WARNING" function setting 139 
5 Error at self test state 140 
5.1 Error after self test 141 
5.2 Error messages 141 
5.3 Troubleshooting immediately after power failure occurs 141 
5.4 Troubleshooting immediately 
after other abnormality/errors occur 142 
6 When error message is not displayed on LCD 151 
6.1 Abnormalities when powering ON 151 
6.2 Abnormalities when performing rotational operation 151 
6.3 Other abnormalities 152 
7 "Error Record" message display function 152 
8 Maintenance and inspection 153 
8.1 Cleaning 153 
8.2 Maintenance 154 
9STORAGE, TRANSPORTATION AND DISPOSAL 155 
1 Storage of the SCU-1601 155 
2 Transporting for repair or overhaul 155 
3 Disposal 156 
SERVICE, SPARES AND ACCESSORIES 157 
1 Introduction 157 
2 Service 157 
3 Spares 157 
4 Accessories 158 