Note1)Inputimpedance offlow rate settingsignalis 100kΩ. Valve override impedance is 100kΩ.
·Theinitialflowrate settinginputis thesingle endinputmode. Pleasechangethe sideswitchinto
thelowerpositionwhenyou use the quasi-differentialinputmode.
·Pleasedo notconnectanythingwithN.C..
(2) Input switch
The toggle switch on the side of the CV is the selection switch for changing the
input setting mode. The single end mode is the upper position. The quasi-
differential input mode is the lower position.
1) Quasi-differential input
Use the quasi-differential input mode when both the COMMON of the power
supply and the COMMON of the setting signal make a common. Using the CV
in the single end mode will result in voltage error in the COMMON due to signal
transportation.
2) Single end input
Use the single end mode when both the COMMON terminal of the CV power
supply and the COMMON terminal of the setting signal are in a floating condition.
8. Valve characteristics
(1) Flow rate Characteristics
The relation between the setting voltage and the flow rate of the CV is not linear,
as shown in the figure. Also, the piezoelectric actuator exhibits hysteresis.
Therefore care should be taken if the CV is used in the open-loop mode. The valve
fully closes with zero 0VDC, and fully opens with five 5VDC of the valve setting
voltage, for both normally open and normally closed valves.
(2) Flow range
The maximum flow range isnot accurate. It changesgreatly depending on the type
of fluid, the pressure, and the environmental temperature, etc.
10. Operation
(1) Procedure
1) This product is packed in a clean room before shipment. Please break the
seals in a clean room after taking it out of its box.
2) Check the gas type and flow rate, and check the direction of the gas flow
and the CV before installation.
3) Check for gas leaks from the tubing with a helium (He) leak detector.
4) Connect the interface connectors according to the Connector tale.
5) Power requirements are +15VDC: 50mA and -15VDC: 50mA. Check the
voltage, polarity, and capacitance of the power supply voltage.
6) Turn on power supply and let the equipment warmup for at least 5 minutes
(Recommended time: 30min).
7) Complete shut off cannot be achieved with the CV. If complete shut off is
desired, a shut-off valve should be installed.
8) When a highly reactive gas is used, thoroughly purge all foreign matter
from the tubing and the CV before operation.
9) When contaminated gas is used, install a filter at the equipment inlet.
10)Use the CV within the range of the operating temperature (5 to 50°C).
11)Donotswitchthepowersupplyonandoffwithinonesecond.Itmaycausefailure.
12)When it is used as a feedback control of flow rate and pressure, the operation
output voltage of the PID controller should be 0 to 5 VDC. Choose a device with
output voltage of 0 to 5 VDC.
13)When using the Lintec MFC power supply, the built-in power supply and signal
setting generator make it easy to set up a system like an MFC.
(2) Valve control signal
The CV features a forced valve open/close input function.
The connector pin No.1 is used to input the internal valve open/close signal.
By inputting this signal, a forced opening/closing of the internal valve can be
performed without depending on the value of the flow rate preset signal.
When +15VDC is input: fully open
When –15VDC is input: fully closed.
11. Product warranty
(1) Period
This product is guaranteed for a period of 1 year from date of shipment. Defects
are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage caused
by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty:
1) Failure caused by by-product of fluid used.
2) Failurecausedbymisuse(includingcarelessoperation)orincorrectrepairormodification.
3) Failure caused by dropping after purchasing.
4) Failure caused by a natural disasters.
Even if the warranty period isstill in effect, the following items may not be repaired.
1) When the kind of fluid used in the product is unclear.
2) The product is returned with fluid remaining inside and safety cannot be
confirmed.
This device is a precision instrument. Control may become unstable if electric
noise, temperature change of fluid, pulsation of fluid pressure etc. occurs.
Please be forewarned.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
CorporateHeadquarters
4-1-23Sekinotsu,OtsuCity,ShigaPref.520-2277,Japan
TEL. +81-(0)77-536-2210FAX.+81-(0)77-536-2215
TokyoBranchOffice
3FHattoriBuild.,4-30-14YotsuyaShinjyuku-kuTokyo160-0004, Japan
TEL. +81-(0)3-5366-2801FAX.+81-(0)3-3341-3513
