OPTO-EDU A63.7080 Manuale utente

A63.7080/81

Scanning Electron Microscope (SEM)

Instruction Manual

Catalogue:

1. Getting Started....................................................................................................................................... 2

2. Structure Feature and Operating Principle..................................................................................... 8

3. Scanning Control Window of A63.7080/81.................................................................................... 15

4. Automatic sample stage.................................................................................................................... 26

5. SEM operating procedure.................................................................................................................. 42

6. Maintenance during operation......................................................................................................... 55

7. Transportation and storage .............................................................................................................. 60

8. Unpacking and Inspection ................................................................................................................ 60

9. Other....................................................................................................................................................... 63

1. Getting Started

1.1 General Description

1.1.1Features of A63.7080/81 Scanning Electron Microscope

A63.7080/81 Scanning Electron Microscope (A63.7080/81 for short) is a large- scale,

high precise electron optics instrument used to research microscopic structure

sof objectives. It receives the stimulated electron signals and forms images by

focusedelectron beam scanning on the specimen surface spot by spot. A63.7080/81

has following features:

1. It uses a field emission electron gun with high brightness and large depth of field,

which is suitable for analyzing and observing rough surfaces and fractures; the mirror

image is vivid and easy to identify and explain.

2. It can be used to observe the surface structure of large solid samples; sample

diameter can reach 15mm; sample preparation and pretreatment are very simple.

3. The resolution can reach 1.5nm.

4. Large magnification range; from low magnification to low magnification to soft

magnification. For multi-phase and multi-component heterogeneous materials, low

magnification is easy for general leaf preservation, and high magnification analysis

can be accurately performed.

5. Simple operation: users can perform main scan after receiving short-term training.

6. Electronics and computer science can appropriately improve image quality. For

example, the image processing modulator can improve the blackness and contrast of

the image to appropriately improve the brightness of each part of the image.

7. More image observation modes: For example, multi-channel scanning can help

users observe images from different detectors at the same time.

8. According to the observation purpose, users can conduct dynamic tests by

changing different stages such as high temperature, low temperature and traction

stage to observe the phase change and transformation under different stages

condition.

9 The scalability of the instrument is very good; users can perform multi-functional

analysis by adding different signal detection equipment, for example, can use X-ray

energy spectrometer (EDS) for micro area component analysis, or perform qualitative

and quantitative analysis in different micro areas analysis.

10. Windows operating system; friendly interface, simple and easy to master; the

image is displayed on the same screen, and can be enlarged or reduced; the image

resolution is optional; USB2.0 peripheral equipment standard communication

interface and support plug.

11. The pre-installed image processing software supports a variety of common image

formats, and can be converted between different image formats; optional image

processing software can enhance a series of image processing functions, such as

particle analysis.

1.2 Main Purpose and Scope of Application

Scanning electron microscope (SEM) can be used to observe one-dimensional,

two-dimensional and three-dimensional materials of metals, ceramics,

semiconductors, minerals, biology, polymers, composite materials and surface

morphology (secondary electron images, backscattered electron images); On it, on

the entire electrode, microscopic, electric field, surface, surface, surface, molecule,

surface, metal, metal, metal, metal, metal, ceramic, metal, ceramic, metal, ceramic,

copper, aluminum, copper, copper, Analysis on the surface of aluminum, copper,

copper, copper, copper, copper, copper, copper, copper, copper, aluminum and other

materials. , Macro molecular material, criminology, agriculture and forestry, etc. SEM

can be used for microstructure analysis, and normal micro-area analysis, including

quantitative and qualitative analysis of components. For micro structure analysis,

spatial resolution can reach to submicron grade. State measurement of grain

boundary, phase identification of crystal / crystal grain. When making micro-area

components analysis, element distribution measurement can be carried out by rapid

multi-element mapping and line scan. In modernin industrial production and scientific

research, material analysis become necessary Methods, industrial and agricultural

process control, quality control and safe production methods. At the same time, the

application of SEM Rapid changes in the field of human survival, such as biology,

Environmental protection and medicine.

1.3ProductnameandItsmodel

Product name: Scanning Electron Microscope Productmodel:A63.7080/81

1.4SpecificationandItsMeaning

A63.7080/81

Seriescode Modelcode

Code of SEM product

1.5 Key technical performance indicators

Resolution: SE 1.5nm@15kv BSE3nm @ 30kv Magnetization: 8 times~800,000 times

Electronic clamp: Schottky field emission electron gun Accelerating voltage: 0~30kV

Lens system: Electromagnetic lens Objective lens aperture: Three holes optional (the

position can be adjusted outside the vacuum) Chamber : Six switches connected to

two interfaces (1) Displacement of the standard manual sample stage: X = 80mm, Y =

60mm, Z = 50mm, T = -5°~+90°, R = 360° Maximum sample diameter: Ф175mm

Maximum sample height: 40mm (2) Medium-sized automatic sample stage

displacement: X = 80mm, Y = 50mm, Z = 30mm, T = -5°~+70°, R = 360°Maximum

sample diameter: Ф175mm Maximum sample height: 20m (3) Large automatic

Sample stage displacement: X = 150mm, Y = 150mm, Z = 60mm, T = -10°~+65°, R =

360°Maximum sample diameter: Ф340mm Maximum sample height: 50m Remarks:

The collision warning function is preinstalled in all series of sample chambers.

Vacuum system: secondary ion pump, single turbo molecular pump, a rotary pump;

the vacuum degree of the sample chamber is higher than 2Pa and the vacuum degree

is higher than 7Pa

1.6 Size and weight

1.6.1 Dimension of instrument

Mainengine:800×800×1480(mm)Electrical

cabinet:1340×850×740(mm)

1.6.2 Weight of instrument

Total weight of instrument: 4 50Kg

1.7 Using Condition

In order to obtain the best working condition of the instrument, before the instrument is

installed, the conditions of the stray magnetism of the environment, vibration, room

temperature, humidity and power supply should be ensured to meet the requirements

of the installation environment of the instrument.

1.7.1 Room requirements

A63.7080/81 is required to be installed with strong load-bearing capacity (floor load ≥

246500 Kg/m2) and shockproof effect is better in the independent laboratory. 5 The

instrument installation room should be able to block the light, part of the work needs to

be in the darkroom. At the same time, it is better for the user to provide a lamp so as to

examine samples and photos without

1.7.2 Temperature and humidity requirements

In the laboratory where A63.7080/81 is installed, the room temperature is required to

be constant and the humidity maintains low. The temperature should be kept between

2018℃and 2522℃, the relative humidity should be less than 670%, and the

instruments should be guaranteed to meet these requirements such as air conditioner,

dehumidifier, dry and wet thermometer.

1.7.3 Power supply requirements

1.7.3.1 Power requirements

A63.7080/81 main body (excluding X-ray analysis instrument), the power supply

should be: AC 220V,50Hz, 15A, equipped with a set of UPS power supply, power

output socket at least two (respectively 220V, 50Hz, 10A and 220V, 50Hz, 16A).The

switch of air equipment in the laboratory is AC 220V, 4063A. In addition, power supply

is required for the test equipment installing A63.7080/81 and accessories: 220V,50

hHz, 10 aA. The power output socket shall have three and two cores and terminal

blocks.

1.7.3.2 Power quality requirements

A63.7080/81 like other high-precision electronic instruments and equipment, is

sensitive to electronic noise and electrical drift. The required voltage is AC 220V±10%,

50Hz ±1hHz, the standard distortion free sine wave (wave shape distortion less than

±2%), no noise, transients, oscillations and pulses. When there's a problem with the

power supply, the effects on A63.7080/81 may be complicated, sometimes it affects

the resolution of the instrument, sometimes Linear or banded streaks may appear on

the image. If you have equipments with high power and large power consumption

variation, you can not share the power supply line with A63.7080/81.At the same time,

the user has the responsibility to ask professional to embed independent ground wire,

other devices shall not share the ground wire with the instrument, and guarantee the 6

grounding resistance less than 3 Ω.

1.7.4 Vibration requirements

Although A63.7080/81’s electronic optical lens tube has vibration isolation device, the

vibration beyond the allowable range (frequency 0 ~ 200Hz) will bring bad influence

on the normal operation of the instrument. In the installation position of A63.7080/81,

the vibration in any direction should be less than 3 μm. The engineer of OPTOEDU

will make a comprehensive measurement of the instrument before installation and

analyze the data. If the analysis results show that there is something wrong with the

environment, the user will be suggested to make improvement. It should be noted that

the vibration caused by too much sound can also affect the high-resolution image of

A63.7080/81. It is the user's responsibility to provide a relatively "quiet" environment

for A63.7080/81. If it is found that the sound in the installation environment affects the

scanning electron microscope image, the user is responsible to take measures to

correct it. Depending on the sound source that affects the instrument, the sound

source can be eliminated or an appropriate place can be found to install the

instrument.

1.7.5 Low frequency stray magnetic fields requirements

Special attention must be paid to the transformers, motors and power supply lines

near the installation environment of A63.7080/81 to ensure that the magnetic

induction intensity in any direction should be less than 2×10-7T (2 mm gaussm gauss,

P--P). Any excess magnetic field may affect the resolution of the instrument

1.8 Influence on Environment and Energy Sources

The X-ray radiations of A63.7080/81 conform to the national standard, and will not

influence environment and energy sources.

1.9 Safety

The safety of A63.7080/81 conforms to the requirements of the national safety 7

standards of instruments.

2. Structure Feature and Operating Principle

2.1 General Structure

A63.7080/81 ultilizes the interaction a certain energy electron beam and sample, which will

produce various physical signals. The SE detector collects and amplifies secondary electronic

signal, then transmit the signal to electrics console, converts to digital signal. Finally, the

computer receive the signal and form a image. The main structures of A63.7080/81 are electron

optics column, chamber, automatic vacuum system, electronics and display console, etc.

2.2 Electron Optics Column

A63.7080/81 electron optics column can produce and focus electron beam to form a fine spot on

specimen. The electron optics column consists of Schottky field emission electron gun,

electromagnetic beam alignment system, column isolation valve (V1), objective lens, scanning

coil assembly, stigmator and electron detector. the electron optical column is shown in Fig.2-1.

The system has one set of electromagnetic shielding column outside the optical path, which can

eliminate the electromagnetic interference from the environment.

2.2.1 Schottky field emission electron gun

Schottky field emission electron gun has the characteristics of good monochrome and high

brightness. The electron beam emitted by the gun forms a very small beam spot on the sample

surface through electrostatic lens and magnetic focusing system.

2.2.2 Electromagnetic Beam Alignment System

The electromagnetic beam alignment system is adopted to ensure coincidence of electron

beam and the optical axes. A63.7080/81 adopts two sets of electromagnetic alignment coils to

form the electromagnetic alignment system, which can be conveniently adjusted by the control

software to make the electron beam coincide with the optical path axis.

2.2.3 Lens system

The objective lens forms the main lens system. Objective lens is an asymmetric lens with low

spherical aberration coefficients and small magnetic flux leakage. The final apertures are

installed between top and bottom pole piece of objective lens. Three apertures can be installed

in the final aperture holder, diameter of aperture is usually 70μm, 50μm or 30μm (customers can

choose other diameters according to actual needs). The adjusting device can help users select

final aperture according to 9 actual needs and align it with electron beam though adjust knobs in

X and Y directions. The final aperture influences depth of focus, resolution and electron beam

current.

2.2.4 Scanning Coil Assembly

Scanning coil assembly is installed inside of objective lens to make the electron beam deflect on

the surface of specimen along X direction and Y direction. When observing images at high

magnification, the operator usually needs to move the ROI(region of interest) image. This can be

completed by scan shift, which is realized by changing DC level on scanning coil X and Y.

2.2.5 Stigmator

The stigmator is installed inside of the scanning coil assembly, and can correct astigmatism

quickly. The adjustment of stigmator is realized by the software.

2.2.6 Electron Detector

Electron detector of OPTOEDU can collect low-energy secondary electrons (SE) and high

energy backscattered electrons(BSE). ETD: secondary electronic detector, used to receive

secondary electronic signals, used to characterize the morphology and contrast of the sample; A

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