vi
9.2.1. Pressure display state..............................................................................................................................26
9.2.2. Description of front panel keys..............................................................................................................26
9.3. Setting Operation........................................................................................................................26
9.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................26
9.3.2. Front panel, external I/O operation setting: “AJ”................................................................................27
9.3.3. Method of setting....................................................................................................................................27
9.4. Connection with Sensor Unit.....................................................................................................28
9.5. Connection to External Device..................................................................................................28
9.6. Various Signals...........................................................................................................................28
9.6.1. Output voltage.........................................................................................................................................28
9.6.2. Filament burnout signal..........................................................................................................................29
9.6.3. ADJ adjustment.......................................................................................................................................29
9.6.4. Setpoint....................................................................................................................................................29
9.6.5. RS485 communication...........................................................................................................................29
9.7. Zero Point Adjustment and Atmospheric Pressure Adjustment............................................29
9.7.1. Adjusting Method...................................................................................................................................29
10. COLD CATHODE GAUGE SC1.............................................................................30
10.1. Setting the Sensor Unit...............................................................................................................30
10.2. Front Panel...................................................................................................................................30
10.2.1. Pressure display.......................................................................................................................................30
10.2.2. Front panel key description....................................................................................................................30
10.3. Settings Operation.......................................................................................................................30
10.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................30
10.3.2. Front panel, external I/O operation setting: “Hi”.................................................................................30
10.3.3. Operation setting method.......................................................................................................................31
10.4. Connection to the Sensor Unit: “SENSOR” Connector.........................................................32
10.5. Connection with External Devices: “I/O” connector..............................................................32
10.6. Signals..........................................................................................................................................32
10.6.1. Output voltage.........................................................................................................................................32
10.6.2. HV ON signal: Pin 5...............................................................................................................................33
10.6.3. Discharge check signal: Pin 4................................................................................................................33
10.6.4. Setpoint: Pins 3, 7, 11.............................................................................................................................33
10.6.5. RS485 communication: Pins 10, 12......................................................................................................33
11. Pirani Gauge BPR2, SP1..........................................................................................34
11.1. Sensor Unit Setting: “SP1”........................................................................................................34
11.2. Front Panel...................................................................................................................................34
11.2.1. Pressure display.......................................................................................................................................34
11.2.2. Description of front panel keys..............................................................................................................34
11.3. Setting Operation........................................................................................................................34
11.3.1. RS485 communication operation setting “L1”, “L2”.........................................................................34
11.3.2. Operation setting method.......................................................................................................................35
11.4. Connecting to the Sensor Unit...................................................................................................36
11.5. Connection with External Devices............................................................................................36
11.6. External Input/Output Signal.....................................................................................................36
11.6.1. Output voltage.........................................................................................................................................36
Burnout signal.............................................................................................................................37
11.7.1. Setpoint....................................................................................................................................................37
11.7.2. RS485 communication...........................................................................................................................37
12. Hot Cathode Gauge BMR2 ......................................................................................38
12.1. Sensor Unit Setting: “Sn1” ........................................................................................................38
12.2. Front Panel...................................................................................................................................38
12.2.1. Pressure display.......................................................................................................................................38
12.2.2. Description of front panel keys..............................................................................................................38
12.3. Setting Operation........................................................................................................................38
12.3.1. Setting Overview ....................................................................................................................................38
12.3.2. RS485 communication operation setting “L1”, “L2”.........................................................................39
12.3.3. Front panel, external I/O operation setting...........................................................................................39
12.3.3.1. Filament operation setting “F1” ......................................................................................................39
