Varian L6280 Manuale utente
DRAFT 9/21/04
INSTRUCTION MANUAL
vacuum technologies
Block Valves
All Sizes
Manual No. 699912040
Revision L
September 2004
DRAFT 9/21/04
Copyright 2004
Vacuum Technologies
Block Valves: Instruction Manual for All Sizes
ConFlat Flange is a registered trademark of Varian, Inc.
Klamp-Flange and KF Clamp are registered trademarks of Varian, Inc.
Krytox is a registered trademark of DuPont Company
Loctite is a registered trademark of Loctite Corporation.
Scoth-Brite is a trademark of 3M.
Viton is a registered trademark of E. I du Pont de Nemours and Company.
Block Valves: Instruction Manual for All Sizes
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iii
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam-
ination may be made on Products so returned.
3/1/00
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Block Valves: Instruction Manual for All Sizes
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Contents
Preface ............................................................................................................................................. xi
Document Conventions ............................................................................................................... xi
Contacting Vacuum Technologies ................................................................................................ xi
Declaration of Conformity
Introduction and Installation ........................................................................................................ 1-1
Installation .................................................................................................................................. 1-3
Electrical Connections to Solenoid ........................................................................................ 1-4
Operation ................................................................................................................................... 1-5
Manually-Operated Valves.................................................................................................... 1-5
Pneumatically-Operated Valves ............................................................................................ 1-5
Maintenance............................................................................................................................... 1-6
Manual Valves ...................................................................................................................... 1-6
Pneumatic Valves................................................................................................................1-11
Appendix A. Technical Specifications ....................................................................................... A-1
Appendix B. Spare Parts Kits/Accessories and Replacement Parts ...................................... B-1
Request for Return Health and Safety Certification
Sales and Service Offices
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Block Valves: Instruction Manual for All Sizes
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List of Figures
Figure Caption Page
1-1 KF Coupling......................................................................................................................... 1-3
1-2 Solenoid Assembly............................................................................................................... 1-4
1-3 Solenoid Operation.............................................................................................................. 1-5
1-4 Small and Large Manual Block Valve – Exploded View........................................................ 1-6
1-5 Small and Large Pneumatic Block Valve – Exploded View ................................................. 1-11
1-6 Positioning the Quad Ring in the Air Cylinder....................................................................1-15
1-7 Removing the Stem from the Seal Disc............................................................................... 1-15
1-8 Position of Quad Ring In its Groove................................................................................... 1-17
1-9 Position Indicator Assembly Exploded View....................................................................... 1-19
1-10 Wiring Diagram – Position Indicator .................................................................................. 1-23
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Block Valves: Instruction Manual for All Sizes
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List of Tables
Table Title Page
1-1 Valve Ordering Information NW16 – NW25........................................................................1-2
1-2 Valve Ordering Information NW50 – NW80........................................................................1-2
1-3 Small Block Valves: Manual Valve Parts List ........................................................................ 1-7
1-4 Large Block Valves: Manual Valve Parts List ........................................................................ 1-7
1-5 Small Valves: Pneumatic Valve Parts List ........................................................................... 1-12
1-6 Large Block Valves: Pneumatic Valve Parts List.................................................................. 1-13
1-7 Position Indicator Parts List ................................................................................................1-20
1-8 Connector Base Wiring ...................................................................................................... 1-21
A-1 Block Valve Specifications ..................................................................................................A-1
B-1 Spare Part Kits .....................................................................................................................B-1
B-2 KF Clamp®and Centering Ring Ordering Information .........................................................B-2
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