Edwards SCU-1600 Manuale utente

MT-76E-101-A

Description Voltage

SCU-1600 Control Unit 200 - 240 Va.c.

SCU-1600 Control Unit

Instruction Manual (C)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A): STP pump generic Instruction Manual

Instruction Manual (B): STP pump specific information

Instruction Manual (C):

(This Instruction Manual)

STP control unit Instruction Manual

Supplied with STP control unit

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System （TMS）

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link (except for SCU-750)

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan

EU Representative: Edwards Limited

Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised

to assemble the technical file, that the product(s)

Product Name: Control unit for turbomolecular pump

Model Number: SCU-1600

Accessories Covered: TMS Unit, Lon Communication Unit

to which this declaration relates is in conformity with the following standard(s) or other

normative document(s)

EN61010-1:2001 Safety requirements for electrical equipment for measurement,

control and laboratory Use. General requirements

EN61326-1:2006 Electrical equipment for measurement, control & laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN55011:2007, A2:2007 Industrial, scientific and medical (ISM) radio-frequency equipment.

Electromagnetic disturbance characteristics (Group1, Class A)

and fulfils all the relevant provisions of

2006/95/EC Low Voltage Directive

2004/108/EC Electromagnetic Compatibility (EMC) Directive

2002/95/EC* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates

only to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this

statement, which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply

to this vacuum equipment, we recognize that component compliance is relevant to many of our customers.

VI-DOC-76-001

EU representative:

Barrie D Brewster, Technical Manager, Edwards Limited

This product has been manufactured under a quality system registered

to ISO9001

Manufacture:

Yuji Kato, TMP Technical Senior Manager, Edwards Japan Limited

1st

Mar. 2010, Yachiyo

Date and Place

Mar. 2010,

Burgess Hill

Date and Place

This page intentionally blank

SCU-1600 Control Unit for Turbomolecular Pump

March 10 i Issue 1-a

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 2

1.3.3 Disclaimer 2

1.3.4 Spare parts 3

1.4 Labels 3

1.5 Label affixing positions 5

1.6 General description 6

1.6.1 Cable sets 7

2 TECHNICAL DATA 9

2.1 SCU-1600 specifications 9

3 INSTALLATION 13

3.1 Unpacking 13

3.2 Front panel 13

3.3 Rear panel 16

3.4 Precautions before installation 17

3.4.1 Operating environment 17

3.4.2 Insulation test 17

3.4.3 Installation area 18

3.5 Attaching the SCU-1600 to a rack 19

3.6 Cable connection 20

3.6.1 STP connection cable 21

3.6.2 TMS connection cable 22

3.6.3 Power cable 24

3.7 Connecting to semiconductor equipment 27

3.7.1 Connecting to power 27

3.7.2 Emergency off circuit (EMO circuit) 27

3.8 Remote communication 28

3.8.1 Parallel communication 28

3.8.2 Serial communication 28

3.9 Adjustment methods 29

3.9.1 Tuning 29

3.9.2 Tuning method 29

3.9.3 Change of data after tuning 32

3.10 Confirmation mode 33

3.10.1 Confirmation method 33

3.11 Parameter set mode 35

3.11.1 Remote operation setting 35

3.11.2 Rotational speed setting 35

3.11.3 TMS setting 35

3.11.4 Rotational inhibit signal setting 35

SCU-1600 Control Unit for Turbomolecular Pump

March 10 ii Issue 1-a

PAGE

ii CONTENTS (CONTINUED)

Section Title Page

3.11.5 Second speed option setting 35

3.11.6 Second speed setting 35

3.11.7 Optional output signal setting (Emergency vent valve setting) 36

3.11.8 Second Damage Limit setting 36

3.11.9 Warning function setting 37

3.11.10 Serial port COM1 setting 38

3.11.11 Serial port COM2 setting 38

3.11.12 Date/Time setting 38

3.11.13 Factory setting 38

3.11.14 Parameter setting procedure 39

3.12 Manual operation mode 45

4 OPERATION 47

4.1 Before starting the STP pump 47

4.1.1 Confirmation before starting 47

4.1.2 Confirmation of vacuum system 47

4.2 Powering ON 48

4.2.1 Self test 48

4.2.2 "CAUTION" message in the self test state 48

4.3 How to start/stop the STP pump 49

4.4 Manual start/stop the STP pump 49

4.4.1 Starting the STP pump 49

4.4.2 Stopping the STP pump 49

4.4.3 Starting the STP pump after stopping 49

4.5 Remote operation 51

4.5.1 Input signal pins 51

4.5.2 Output signal pins 55

4.5.3 Remote setting 59

4.5.4 Starting/Stopping the STP pump 59

4.5.5 Rotation INHIBIT signal 60

4.5.6 Second speed option 61

4.5.7 Starting the STP pump after stopping 63

4.5.8 Starting the STP pump after a safety function operates 63

4.6 Powering OFF 63

4.7 Operating the TMS unit (for use with the TMS unit) 64

4.7.1 Before starting 64

4.7.2 Starting/Stopping 64

4.7.3 Setting the TMS unit function 64

4.7.4 Temperature control 64

SCU-1600 Control Unit for Turbomolecular Pump

March 10 iii Issue 1-a

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5 SERIAL COMMUNICATION PROTOCOL 65

5.1 Introduction 65

5.2 Connection and setting up 65

5.2.1 Signal connection 65

5.2.2 Connecting the RS485 68

5.2.3 Communication parameter setting 69

5.3 Protocol specifications 69

5.3.1 General description 69

5.3.2 Standard transmission frame

(in the RS232/RS485 single point connection) 70

5.3.3 Control command

(in the RS232/RS485 single point connection) 71

5.3.4 Query command

(in the RS232/RS485 single point connection) 72

5.3.5 Transmission data format 73

5.3.6 Frame control (checksum) 74

5.3.7 Error control 74

5.3.8 Transmission frame in the RS485 multi-point connection 74

5.3.9 Control command in the RS485 multi-point connection 76

5.3.10 Query command in the RS485 multi-point connection 77

5.3.11 Broadcasting command in the RS485 multi-point connection 78

5.4 Command specifications 79

5.4.1 Command list 79

5.4.2 ReadMeas 80

5.4.3 Command 80

5.4.4 ReadFailMess 81

5.4.5 ReadModFonct 84

5.4.6 ReadVersion 86

5.4.7 ReadCounters 87

5.4.8 ReadSetPoint 88

5.4.9 ReadMotorTemp 88

5.4.10 ReadStatus 89

5.4.11 ReadEvents 90

5.4.12 SetSpeedSetPoint 91

5.4.13 ReadSpeedSetPoint 92

5.4.14 ReadModFonctWithWarning 93

5.4.15 ReadMeasValue 96

5.4.16 SetOptions 98

5.4.16.1 Second speed option setting 98

5.4.16.2 Second speed selection 99

5.4.17 ReadOptions 100

5.4.17.1 Second speed function setting 100

5.4.17.2 Second speed select 101

SCU-1600 Control Unit for Turbomolecular Pump

March 10 iv Issue 1-a

PAGE

iv CONTENTS (CONTINUED)

Section Title Page

6 STP-LINK 103

7 MAINTENANCE 105

7.1 Safety functions 105

7.1.1 Power failure 105

7.1.2 Operation after a power recovery 106

7.1.3 Abnormal state of magnetic bearing 107

7.1.4 Excessive vibration 107

7.1.5 Motor driver overload 107

7.1.6 Overheating inside the STP pump 107

7.1.7 Overheating inside the SCU-1600 107

7.1.8 Overspeed 108

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 108

7.2 "WARNING" message function 109

7.2.1 "WARNING" message display function 109

7.3 "WARNING" message description 110

7.3.1 Damage point function 110

7.3.2 First damage limit 110

7.3.3 Second damage limit 110

7.3.4 Imbalance X_H, X_B, Z 111

7.3.5 Pump run time over 111

7.3.6 Pump overload 111

7.3.7 Low RTC battery 112

7.4 "WARNING" function setting 113

7.5 Error at self test state 114

7.5.1 Error after self test 115

7.5.2 Error messages 115

7.5.3 Troubleshooting immediately after power failure occurs 115

7.5.4 Troubleshooting immediately

after other abnormality/errors occur 116

7.6 When error message is not displayed on LCD 124

7.6.1 Abnormalities when powering ON 124

7.6.2 Abnormalities when performing rotational operation 124

7.6.3 Other abnormalities 125

7.7 "Error Record" message display function 125

7.8 Maintenance and inspection 126

7.8.1 Cleaning 126

7.8.2 Overhaul 126

8 STORAGE, TRANSPORTATION AND DISPOSAL 127

8.1 Storage of the SCU-1600 127

8.2 Transporting for repair or overhaul 127

8.3 Disposal 128

SCU-1600 Control Unit for Turbomolecular Pump

March 10 v Issue 1-a

PAGE

CONTENTS (CONTINUED)

Section Title Page

9 SERVICE, SPARES AND ACCESSORIES 129

9.1 Introduction 129

9.2 Service 129

9.3 Spares 129

9.4 Accessories 130

SCU-1600 Control Unit for Turbomolecular Pump

March 10 vi Issue 1-a

PAGE

vi ILLUSTRATIONS

Figure Title Page

1 High voltage device caution label 3

2 Safety instruction label 4

3 Caution label 4

4 Connector caution label 4

5 Voltage rating label 4

6 Label affixing positions 5

7 SCU-1600 control unit 6

8 Configuration of the STP pump with the TMS 7

9 SCU-1600 dimensions (mm) 11

10 SCU-1600 front panel 13

11 SCU-1600 rear panel 16

12 Installing the SCU-1600 18

13 Example of securing the SCU-1600 19

14 STP pump connection cable 21

15 TMS connection cable (with distribution box) 22

16 TMS connection cable (without sensor cable) 23

17 TMS connection cable (with sensor cable) 23

18 Power cable (without plug) 24

19 Power cable (with plug) 25

20 Connecting method of the power cable without plug 26

21 REMOTE X7 connector 28

22 Connector X3A, X3B (D-sub 9) 28

23 Tuning procedures 31

25 Parameter setting method 40

26 Parameter setting method (continued) 41

27 Parameter setting method (continued) 42

28 Parameter setting method (continued) 44

29 Manual operation method 45

30 Operational procedures 50

31 REMOTE X7 input signal pins 54

32 REMOTE X7 output signal pins 58

33 Serial communication 65

34 Connector X3A/X3B (D-sub 9) 66

35 Connector X7 (D-sub 37) 66

36 RS485 connections 68

37 PC to SIM communication 69

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