Inficon LDS3000 AQ Manuale utente

Translation of the original operating instructions

LDS3000, LDS3000 AQ

Mass spectrometer module

jiqa54en1-07-(1803)

560-300, 560-600

From software version:

MS-Modul 2.71

INFICON GmbH

Bonner Strasse 498

50968 Cologne, Germany

INFICON Table of Contents

LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803) iii

Table of Contents

1 About these instructions ...................................................................................................................................7

1.1 Other associated documents ....................................................................................................................7

1.2 Target groups ...........................................................................................................................................7

1.3 Warnings...................................................................................................................................................7

1.4 Definition of terms.....................................................................................................................................8

2 Safety .............................................................................................................................................................11

2.1 Intended use ...........................................................................................................................................11

2.2 Owner requirements ...............................................................................................................................11

2.3 Duties of the operator .............................................................................................................................12

2.4 Dangers ..................................................................................................................................................12

3 Shipment, Transport, Storage ........................................................................................................................14

4 Description......................................................................................................................................................15

4.1 Function ..................................................................................................................................................15

4.2 Device setup ...........................................................................................................................................16

4.2.1 Entire device (LDS3000)............................................................................................................. 16

4.2.2 Entire device (LDS3000 AQ)....................................................................................................... 16

4.2.3 Connection block ........................................................................................................................ 20

4.2.4 MSB box ..................................................................................................................................... 20

4.2.5 Nameplate................................................................................................................................... 23

4.3 Technical data ........................................................................................................................................24

4.4 Factory settings ......................................................................................................................................25

5 Mounting LDS3000.........................................................................................................................................28

5.1 Adjust the position of the connections to the installation dimensions .....................................................28

5.2 Installing the mass spectrometer module on the test system .................................................................29

5.3 Select connection ULTRA, FINE, or GROSS .........................................................................................30

5.4 Establish component connection ............................................................................................................31

5.5 Establish electrical connections..............................................................................................................32

6 Mounting LDS3000 AQ (Accumulation)..........................................................................................................33

6.1 Adjust the position of the connections to the installation dimensions .....................................................33

6.2 Installing the mass spectrometer module on the test system .................................................................34

6.3 Select components and connect.............................................................................................................36

6.4 Establish electrical connections..............................................................................................................38

7 Operation LDS3000........................................................................................................................................39

Table of Contents INFICON

iv LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803)

7.1 Switching the device on ..........................................................................................................................39

7.2 Default settings .......................................................................................................................................40

7.3 Selecting a unit for the leak rate .............................................................................................................42

7.4 Select device for pressure ......................................................................................................................43

7.5 Select Compatibility Mode ......................................................................................................................43

7.6 Select operation mode............................................................................................................................45

7.7 Select gas type (mass) ...........................................................................................................................46

7.8 Calibrating the device .............................................................................................................................47

7.8.1 Time and general preferences .................................................................................................... 47

7.8.2 Internal Calibration Configuration and Start................................................................................ 49

7.8.3 External Calibration Configuration and Start............................................................................... 50

7.8.4 Start external dynamic calibration............................................................................................... 52

7.8.5 External calibration with sniffer line SL3000XL........................................................................... 54

7.8.6 Check the calibration .................................................................................................................. 55

7.8.6.1 Calibration using the internal calibration leak test..............................................................55

7.8.6.2 Calibration using the external calibration leak test.............................................................55

7.8.7 Entering the calibration factor ..................................................................................................... 56

7.8.7.1 Calibration factor sniffing....................................................................................................56

7.8.7.2 Calibration factor vacuum ..................................................................................................56

7.8.8 Setting machine and sniff factor.................................................................................................. 57

7.8.8.1 Setting machine and sniff factor manually .........................................................................57

7.8.8.2 Setting machine and sniff factor using machine calibration ...............................................58

7.9 Starting and stopping the measurement.................................................................................................58

7.10 Loading and saving parameters .............................................................................................................59

7.11 Copying measurement data, deleting measurement data ......................................................................60

7.12 Suppressing gas backgrounds with "ZERO" functions ...........................................................................60

7.13 Measurement result display with signal filters ........................................................................................61

7.14 Control of the Gas Ballast Valve of the Backing Pump...........................................................................62

7.15 Selecting display limits............................................................................................................................63

7.16 Setting trigger values ..............................................................................................................................63

7.17 Setting capillary surveillance ..................................................................................................................63

7.18 Set the rotation speed of the turbo molecular pump...............................................................................64

7.19 Cathode Selection ..................................................................................................................................65

7.20 Settings for the XL sniffer adapter ..........................................................................................................65

7.21 Resetting the settings .............................................................................................................................68

8 Operation LDS3000 AQ (Accumulation).........................................................................................................69

8.1 Switching the device on ..........................................................................................................................69

INFICON Table of Contents

LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803) v

8.2 Default settings .......................................................................................................................................69

8.3 Selecting a unit for the leak rate .............................................................................................................70

8.4 Select device for pressure ......................................................................................................................71

8.5 Select Compatibility Mode ......................................................................................................................71

8.6 Making basic settings via the wizard ......................................................................................................73

8.7 Determine peak ......................................................................................................................................74

8.8 Store leak rate of calibration leaks..........................................................................................................75

8.9 Calibrating the device .............................................................................................................................76

8.9.1 Time and general preferences .................................................................................................... 76

8.9.2 Entering the calibration factor ..................................................................................................... 77

8.9.3 Calibration factor vacuum ........................................................................................................... 77

8.9.4 Calibrating................................................................................................................................... 78

8.10 Perform ZERO ........................................................................................................................................80

8.11 Setting machine and sniff factor .............................................................................................................81

8.11.1 Setting machine and sniff factor manually .................................................................................. 81

8.12 Carrying out a measurement ..................................................................................................................82

8.13 Loading and saving parameters .............................................................................................................83

8.14 Copying measurement data, deleting measurement data ......................................................................83

8.15 Adjust ”Zero time factor AQ” ...................................................................................................................84

8.16 Selecting display limits............................................................................................................................84

8.17 Set the rotation speed of the turbo molecular pump...............................................................................84

8.18 Cathode Selection ..................................................................................................................................85

8.19 Resetting the settings .............................................................................................................................85

9 Using the expansion module (LDS3000, LDS3000 AQ).................................................................................87

9.1 Selecting the type of expansion module .................................................................................................87

9.2 Settings for I/O module IO1000 ..............................................................................................................87

9.2.1 General interface settings ........................................................................................................... 87

9.2.2 Assigning inputs and outputs ...................................................................................................... 87

9.2.2.1 Assigning the digital inputs of the I/O module ....................................................................95

9.2.2.2 Assigning the digital outputs of the I/O module..................................................................98

9.3 Settings for bus module BM1000..........................................................................................................100

10 Warning and error messages (LDS3000, LDS3000 AQ)..............................................................................101

10.1 Illustration of error codes with the help of the status LEDs...................................................................109

11 Operating CU1000 (optional)........................................................................................................................110

11.1 Touchscreen elements .........................................................................................................................110

11.1.1 Measurement display elements ................................................................................................ 110

Table of Contents INFICON

vi LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803)

11.2 Elements of the error and warning display ...........................................................................................113

11.3 Settings and functions ..........................................................................................................................113

11.3.1 Touch screen settings............................................................................................................... 113

11.3.2 Operator types and authorizations............................................................................................ 117

11.3.2.1 Logging out the operator ..................................................................................................118

11.3.3 Functions .................................................................................................................................. 118

11.3.3.1 Resetting the settings.......................................................................................................118

11.3.3.2 Recording data.................................................................................................................119

11.3.3.3 Calling up information ......................................................................................................120

11.3.4 Updating the software ............................................................................................................... 123

11.3.4.1 Updating the software of the control unit..........................................................................123

11.3.4.2 Checking and updating the software version of the MSB box..........................................123

11.3.4.3 Updating the software of the I/O module..........................................................................124

12 Maintenance .................................................................................................................................................126

12.1 Maintenance at INFICON .....................................................................................................................126

12.2 General maintenance information.........................................................................................................126

12.3 Maintenance plan .................................................................................................................................127

12.4 Maintenance work.................................................................................................................................128

12.4.1 Change operating fluid reservoir of turbo molecular pump ....................................................... 128

13 Decommissioning the measuring instrument................................................................................................133

13.1 Shutting down the leak detector ...........................................................................................................133

13.2 Disposing of the mass spectrometer module........................................................................................133

13.3 Returning the mass spectrometer module............................................................................................133

14 Appendix.......................................................................................................................................................134

14.1 CE Declaration of Conformity ...............................................................................................................134

14.2 Declaration of Incorporation..................................................................................................................135

14.3 Declaration of Contamination ...............................................................................................................136

INFICON About these instructions | 1

LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803) 7 / 138

1 About these instructions

This document applies to the software version stated on the title page.

Product names may occur in the document, which are added for identification pur-

poses only and belong to the respective owner of the rights.

This operating manual describes the installation and operation of the LDS3000 mass

spectrometer module. It is available in two variants:

• LDS3000

• LDS3000 AQ (accumulation), switchable to all other operating modes.

1.1 Other associated documents

Operating Manual Control Unit CU1000 jina54

Operating instructions bus module jiqb10

Operating instructions I/O module jiqc10

Operating instructions XL sniffer adapter jinxa54

Interface protocols jira54

1.2 Target groups

These operating instructions are intended for the owner and for technically qualified

personnel with experience in leak detection technology and integration of leak detec-

tion devices in leak detection systems. In addition, the installation and use of the de-

vice require knowledge of electronic interfaces.

1.3 Warnings

DANGER

Imminent hazard resulting in death or serious injuries

WARNING

Hazardous situation resulting in potential death or serious injuries

1 | About these instructions INFICON

8 / 138 LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803)

CAUTION

Hazardous situation resulting in minor injuries

NOTICE

Hazardous situation resulting in damage to property or the environment

1.4 Definition of terms

Mention of helium in the manual

The device is a helium leak detector. If you want to use a forming gas instead of he-

lium to detect the hydrogen contained therein, the information for helium also applies

to hydrogen.

Accumulation

In connection with leak testing, it is about the enrichment of tracer gas over a defin-

able period of time. This allows the detection of small leak rates without the use of a

vacuum chamber. Helium or forming gas can be used.

When you talk about "AQ” in this manual, it's about accumulation mode. It is only

available for devices in the AQ version.

Automatic tuning / mass setting

This function adjusts the mass spectrometer so that a maximum leak rate indicator is

achieved. In order to detect a maximum ion current with the ion detector, the control

computer adjusts the voltage for accelerating the ions within the selected mass range

accordingly.

During each calibration, there is an automatic adjusted.

Operation mode

The leak detector distinguishes between the operation modes "vacuum" and "sniffing".

With the operation mode "vacuum", generally the tracer gas flows into the test object.

The pressure in the test object is less than the ambient pressure.

In the operation mode "sniffing" the tracer gas flows out from the test object and is ex-

tracted with a sniffer probe. The pressure in the test object is greater than the ambient

pressure.

INFICON About these instructions | 1

LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803) 9 / 138

FINE

FINE denotes the connection to the turbo molecular pump for inlet pressures up to 0.4

mbar. This is also used for the "sniffing" operation mode.

Forming gas

Forming gas is a collective term for gas mixtures of nitrogen and hydrogen.

GROSS

GROSS donates the connection to the turbo molecular pump with the lowest sensitiv-

ity. This allows high inlet pressures (up to 15 mbar).

Internal helium background

The measurement system of the leak detector also contains a residual amount of he-

lium. This creates an internal measurement signal component (background signal),

which overlaps the display of the leak right from the beginning and thus disturbs the

search for leaks.

So that this background signal can be suppressed, an internal "background suppres-

sion" can be activated with the factory settings.

Minimum detectable leak rate

The minimum detectable leak rate which can be detected by the leak detector under

ideal conditions (< 5 x 10-12 mbar l/s).

ULTRA

ULTRA denotes the connection to the turbo molecular pump for the measurement

range with the highest sensitivity at inlet pressures below 0.4 mbar (adjustable).

Background signal

Helium or hydrogen (as part of water) are natural components of air.

Operation mode "Vacuum": Before any leak detection, a certain amount of the ad-

justed tracer gas is already in the volume on the surfaces of the test chamber, supply

lines, and even in the leak detector itself. This certain amount of tracer gas generates

a measurement signal which is called the "Background signal". The ongoing evacua-

tion of the test chamber continuously reduces this background signal.

Operation mode "Sniffing": Ambient air is continuously fed into the leak detector via

the sniffer line. The amount of helium or hydrogen occurring naturally in air creates a

constant background signal.

1 | About these instructions INFICON

10 / 138 LDS3000-MSM-Operating-instructions-jiqa54en1-07-(1803)

Foreline pressure

Pressure of the backing pressure between the turbo molecular pump and the backing

pump.

ZERO

There is helium that is weakly bound to the surfaces of a specimen as a natural part of

the ambient air and is pumped bit by bit into the measurement system of the leak de-

tector. It produces a slowly decreasing measurement signal.

If you want to hide this background signal or the display of existing leaks, then use the

function ZERO.

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