Instrutech CDM900 Micro Bee Manuale utente

p/n 002626-101

InstruTech®

CDM900 Module

The Micro Bee™

User Manual

InstruTech

1475 S. Fordham St.

Longmont, CO 80503

USA

Phone: +1-303-651-0551

Fax: +1-303-678-1754

E-mail [email protected]

www.instrutechinc.com

Instruction Manual CDM900 Micro Bee

InstruTech Page 1

Important User Information There are operational characteristic differences between solid state equipment and

electromechanical equipment. Because of these differences, and because there are a variety of uses for solid state equipment, all

persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is

safe and used in an acceptable manner.

In no event will InstruTech be responsible or liable for indirect or consequential damages that result from the use or application of this

equipment.

Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and

requirements imposed on any particular installation, InstruTech cannot assume responsibility or liability for any actual use based on the

examples and diagrams.

No patent liability is assumed by InstruTech with respect to use of information circuits, equipment, or software described in this manual.

Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make you aware of

safety considerations.

Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,

could result in death or serious injury, property damage, or economic loss.

Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,

could result in minor or moderate injury, property damage, or economic loss.

Identifies information that is critical for successful application and understanding of the product.

Labels may be located on or inside the device to alert people that dangerous voltages may be present.

CAUTION

CccWARNING

WARNING

NOTICE

SHOCK HAZARD

CccWARNING

WARNING

p/n 002626-101

including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in

writing by InstruTech.

Printed in the United States of America

Conflat® is a registered trademark of Varian, Inc. / Agilent Technologies, Lexington, MA

 
Instruction Manual CDM900 Micro Bee 
 
InstruTech Page 1 
 
Table of Contents 
 
Introduction / General Information............................................................................................................................2 
1 Description.........................................................................................................................................................2 
2 Specifications.....................................................................................................................................................2 
3 Dimensions ........................................................................................................................................................3 
4 Part Numbers.....................................................................................................................................................4 
5 Options & Accessories.......................................................................................................................................4 
 
Important Safety Information.....................................................................................................................................5 
1 Safety Precautions - General .............................................................................................................................5 
2 Safety Precautions - Service and operation....................................................................................................... 6 
3 Electrical Conditions ..........................................................................................................................................6 
3.1 Proper Equipment Grounding...................................................................................................................6 
3.2 Electrical Interface and Control.................................................................................................................7 
4 Overpressure and use with hazardous gases .................................................................................................... 7 
 
Installation..................................................................................................................................................................8 
1 Mechanical Installation......................................................................................................................................8 
2 Electrical Installation .........................................................................................................................................9 
2.1 Grounding..................................................................................................................................................9 
2.2 Connector................................................................................................................................................10 
2.3 Connector pin-out...................................................................................................................................10 
 
Setup and Operation ................................................................................................................................................11 
1 Gauge start up and operation .........................................................................................................................11 
2 Zeroing the Gauge ...........................................................................................................................................11 
 
Analog Output ..........................................................................................................................................................13 
 
Service.......................................................................................................................................................................14 
1 Maintenance, Repair .......................................................................................................................................14 
2 Removing the gauge from service...................................................................................................................14 
 
Factory Service and Support.....................................................................................................................................15 
 
Warranty...................................................................................................................................................................15 

Instruction Manual CDM900 Micro Bee

InstruTech Page 2

1 Introduction / General Information

1.1 Description

The CDM900 Micro Bee™ Capacitance Diaphragm vacuum gauge is an economical, gas type independent absolute pressure

sensor. The CDM900 provides excellent long term stability and performance. The sensor assembly is constructed of a

compact ceramic and metal design resulting in a simple yet rugged sensor suitable for numerous industrial applications.

The corrosion resistant sensor material provides excellent temperature compensation capability, thus enhancing the

reliability of the pressure measurements.

The CDM900 Micro Bee vacuum gauge module provides the basic signal conditioning required to turn the sensor into a

complete vacuum pressure measurement instrument. The combination of superior sensor design and enhanced signal

processing provides optimal and stabile pressure readings by the instrument. The built-in controller provides a 0 to 10 Vdc

analog output for pressure measurements and allows for local or remote zeroing of the instrument. The CDM900 provides

various full scale ranges from 10 to 1,000 Torr.

1.2 Specifications

full scale (F.S.) ranges - Torr

1000, 500, 200, 100, 50, 20, 10

lowest reading

0.05% of F.S.

accuracy (1)

model A: 1% of reading

model B: 0.5% of reading

temperature effect on zero

0.02% F.S./ °C

temperature effect on span

0.02% of reading/°C

resolution

0.05% F.S.

long term stability

0.5% F.S./yr aluminum oxide ceramic (AI2O3)

temperature compensated range

+10 to +50 °C

materials exposed to gases

sensor, feedthrough

aluminum oxide ceramic (AI2O3)

flange, tube

stainless steel AISI 316L

internal gauge volume

1/2 in. Tube: 0.219 in3(3.6 cm3)

KF16: 0.226 in3 (3.7 cm3)

4 VCR & 8 VCR: 0.342 in3(5.6 cm3)

temperature compensation range

+ 10 to + 50 oC

temperature

operating: 0 to + 70 oC

storage: -20 to + 85 oC

humidity

0 to 80% relative humidity, non-condensing

bakeout temperature (at flange)

≤ 110 oC (non-operating)

admissible pressure (absolute)

≥ 500 Torr F.S. = 58 psi (4 bar)

50 to 200 Torr F.S. = 43.5 psi (3 bar)

10 to 20 Torr F.S. = 29 psi (2 bar)

burst pressure

87 psi (6 bar)

weight

4 to 5.7 oz. ( 115 to 160 g) , flange/fitting dependent

housing (electronics)

aluminum extrusion

use

indoor only

mounting orientation

any

altitude

13,125 ft. (4000 m) max

analog output

linear 0 to 10 Vdc

output impedance

10 , short-circuit proof

load impedance

>10 k

Instruction Manual CDM900 Micro Bee

InstruTech Page 3

max output signal

+ 10.24 Vdc

response time

100 msec (from 10% to 90% F.S.)

input power (2)

13 to 30 Vdc, 0.3 W protected against power reversal

fuse required

1 AT (slow), automatic reset (Polyfuse)

supply voltage ripple

≤50 mVpp

connector

9-pin D-sub male

CE compliance

EMC (EN61000-6-2, EN61000-6-3, EN61010-1)

environmental

RoHS compliant

1) Non-linearity, hysteresis, repeatability at 25 Deg oC ambient temperature without temperature effects after 2 hours operation.

(2) WARNING! The gauge may only be connected to power supplies, instruments, or control devices that conform to the

requirements of a grounded protective extra-low voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has

to be fused.

1.3 Dimensions

in. (mm)

Fitting dimension A

1/2 in. Tube 0.59 in. (15.0 mm)

NW16KF 1.20 in. (30.7 mm)

NW25KF 1.39 in. (35.5 mm)

1 1/3 in. Mini-CF 1.28 in. (31.1 mm)

1/4 in. Cajon 4VCR 2.43 in. (61.8 mm)

1/2 in. Cajon 8VCR 1.77 in. (45.0 mm)

Instruction Manual CDM900 Micro Bee

InstruTech Page 4

1.4 Part Numbers

Accuracy

A= 1% accuracy

B= 0.5% accuracy

CDM900 # F # U # #

Fitting / Flanges

A= 1/2 in. Tube

B= NW16KF

C=NW25KF

E = 1 1/3 in. Mini-CF (NW16CF)

G = 4VCR Female

Full Scale (F.S.)

A = 10 Torr

B = 20 Torr

C = 50 Torr

D = 100 Torr

E = 200 Torr

F = 500 Torr

G = 1000 Torr

H = 8VCR Female

Units of Measure

T= Torr

Example: CDM900BFAUTB (CDM900, 0.5% accuracy, 10 Torr F.S, Torr units of measure, NW16KF fitting)

1.5 Options & Accessories

Part Number

Optional Wall Mount AC-DC

PS901 Power Supply

Input: 100 - 240 Vac

Output: 24 Vdc @ 750 mA (18 W)

Various AC plugs, 6 ft. cable length

with North American AC Plug

PS901-A

with Universal European AC Plug

PS901-EU

with UK AC Plug

PS901-UK

with China AC Plug

PS901-C

with Australian AC Plug

PS901-SP

PS901-UX For Use With User

Supplied AC Power Cord

This variation of the PS901 power supply may be

used when an AC plug that is not listed above is

required. The conventional IEC60320 AC power

entry receptacle allows use with any user supplied

AC mains power cord set available worldwide.

Input: 100 - 240 Vac

Output: 24 Vdc @ 2.5 A (60 W)

Cable Length: 6 ft.

PS901-UX

Instruction Manual CDM900 Micro Bee

InstruTech Page 5

2 Important Safety Information

InstruTech has designed and tested this product to provide safe and reliable service, provided it is installed and

operated within the strict safety guidelines provided in this manual.Please read and follow all warnings and

instructions.

To avoid serious injury or death, follow the safety information in this document. Failure to comply with these

safety procedures could result in serious bodily harm, including death, and or property damage.

Failure to comply with these warnings violates the safety standards of installation and intended use of this

instrument. InstruTech disclaims all liability for the customer’s failure to comply with these instructions.

Although every attempt has been made to consider most possible installations, InstruTech cannot anticipate

every contingency that arises from various installations, operation, or maintenance of the module. If you have

any questions about the safe installation and use of this product, please contact InstruTech.

2.1 Safety Precautions - General

WARNING! Do not modify this product or substitute any parts without authorization of qualified

InstruTech service trained personnel. Return the product to an InstruTech qualified service and repair center to

ensure that all safety features are maintained. Do not use this product if unauthorized modifications have been

made.

WARNING! Source power must be removed from the product prior to performing any servicing.

WARNING! The gauge may only be connected to power supplies, instruments, or control devices that

conform to the requirements of a grounded protective extra-low voltage (SELV) and limited power source (LPS),

Class 2. The connection to the gauge has to be fused.

After servicing this product, ensure that all safety checks are made by a qualified service person. When

replacement parts are required, ensure that the parts are specified by InstruTech. Substitutions of non-

qualified parts may result in fire, electric shock or other hazards. Use of unauthorized parts or modifications

made to this product will void the warranty.

To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. These products are

not waterproof and careful attention must be paid to not spill any type of liquid onto these products. Do not

use these products if they have been damaged. Immediately contact InstruTech to arrange return of the

product if it is damaged.

WARNING

Instruction Manual CDM900 Micro Bee

InstruTech Page 6

Due to the possibility of corrosion when used in certain environmental conditions, it is possible that the

product’s safety could be compromised over time. It is important that the product be periodically inspected for

sound electrical connections and equipment grounding. Do not use if the equipment grounding or electrical

insulation has been compromised.

2.2 Safety Precautions - Service and operation

Ensure that the vacuum port on which the CDM900 is mounted is electrically grounded.

Use an appropriate power source of 13 to 30 Vdc, 0.3 W minimum.

Turn off power to the unit before attempting to service the module.

Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to

this instruction manual. Contact qualified InstruTech service personnel for any service or troubleshooting

condition that may not be covered by this instruction manual.

Do not use if the unit has been dropped or the enclosure has been damaged. Contact InstruTech for return

authorization and instructions for returning the product to InstruTech for evaluation.

Gauge failures due to contamination or wear and tear are not covered by the warranty. We recommend

checking the zero at regular intervals.

2.3 Electrical Conditions

WARNING! When high voltage is present in any vacuum system, a life threatening electrical shock hazard

may exist unless all exposed electrical conductors are maintained at earth ground potential. This applies to all

products that come in contact with the gas contained in vacuum chambers. An electrical discharge within a

gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity. A

person could be seriously injured or killed by coming in contact with an exposed, ungrounded electrical

conductor at high voltage potential. This condition applies to all products that may come in contact with the gas

inside the vacuum chamber (vacuum/pressure containment vessel).

2.3.1 Proper Equipment Grounding

WARNING! Hazardous voltages that could seriously injure or cause death are present in many vacuum

processes. Verify that the vacuum connection port on which the gauge is mounted is electrically grounded.

Consult a qualified Electrician if you are in doubt about your equipment grounding. Proper grounding of your

equipment is essential for safety as well as intended operation of the equipment.

The CDM900 must be electrically connected to the grounded vacuum chamber. The connection must conform

to the requirements of a protective connection according to EN 61010:

➔VCR® connections fulfill this requirement.

➔For gauges with a KF connection, use a conductive metallic clamping ring.

Instruction Manual CDM900 Micro Bee

InstruTech Page 7

WARNING! In order to protect personnel from electric shock and bodily harm, shield all conductors

which are subject to potential high voltage electrical discharges in or around the vacuum system.

2.3.2 Electrical Interface and Control

It is the user’s responsibility to ensure that the electrical signals from this product and any connections made to

external devices, for example, relays and solenoids, are used in a safe manner. Always double check the system

set-up before using any signals to automate your process. Perform a hazardous operation analysis of your

system design and ensure safeguards and personnel safety measures are taken to prevent injury and property

damage.

2.4 Overpressure and use with hazardous gases

WARNING! Install suitable protective devices that will limit the level of pressure inside your vacuum

chamber to less than what the vacuum chamber system components are capable of withstanding. For example,

a quick-connect, O-ring compression fitting may forcibly release a mounted device from the vacuum chamber

fitting with only a few psi over local uncorrected barometric (atmospheric) pressure.

In cases where an equipment failure could cause a hazardous condition, always implement fail-safe system

operation. For example, use a pressure relief device in an automatic backfill operation where a malfunction

could result in high internal pressures if the pressure relief device was not installed on the chamber.

WARNING! Overpressure in the vacuum system > 14.5 psia (1 bar)

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened

while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use

the type of clamps which are suited to overpressure.

WARNING! Overpressure in the vacuum system > 29 psia (2.5 bar)

KF connections with elastomer seals (O-rings) cannot withstand such pressures. Process media can thus leak

and possibly damage your health. Use O-rings provided with an outer centering ring.

CAUTION! If the internal pressure of a vacuum measuring device is allowed to increase above local

uncorrected barometric pressure (atmospheric pressure side), vacuum fittings may release and possible

overpressure conditions may cause leaks that would allow the gas inside the tube to release into the

atmosphere of the surrounding environment. Toxic, pyrophoric and flammable gases are examples of

hazardous gases that if allowed to leak out of the vacuum/pressure containment vessel into the atmospheric

environment, could cause bodily injury and possible damage to equipment. Never expose the vacuum

measuring device internal volume to pressure above local atmospheric pressure when using hazardous gases.

Indice

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