Instrutech Hornet Manuale utente

p/n 000710-116

InstruTech®, Inc.

Hot Cathode Ionization Vacuum Gauge

IGM401 Module

The Hornet™

User Manual

InstruTech, Inc.

1475 S. Fordham St.

Longmont, CO 80503

USA

Phone: +1-303-651-0551

Fax: +1-303-678-1754

E-mail [email protected]

www.instrutechinc.com

p/n 000710-116

This User Manual is applicable to the InstruTech® Hornet™ model IGM401 product

manufactured with firmware p/n 1769 versions 108 or higher. For previous versions of IGM401

manufactured prior to the introduction of firmware p/n 1769-108, please go to

http://www.instrutechinc.com/downloads-archived-user-manuals/ to find the version of user manual applicable

to prior versions of IGM401. See section 5.8.5, SERVICE MENU of this manual to determine the firmware

version of your IGM401.

Important User Information There are operational characteristic differences between solid state equipment and

electromechanical equipment. Because of these differences, and because there are a variety of uses for solid state equipment, all

persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is

safe and used in an acceptable manner.

In no event will InstruTech, Inc. be responsible or liable for indirect or consequential damages that result from the use or application of

this equipment.

Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and

requirements imposed on any particular installation, InstruTech, Inc. cannot assume responsibility or liability for any actual use based on

the examples and diagrams.

No patent liability is assumed by InstruTech, Inc. with respect to use of information circuits, equipment, or software described in this

manual.

Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make you aware of

safety considerations.

Identifies information about practices or circumstances that can cause electrical or physical

hazards which, if precautions are not taken, could result in death or serious injury, property damage, or economic loss.

Identifies information about practices or circumstances that can cause electrical or physical

hazards which, if precautions are not taken, could result in minor or moderate injury, property damage, or economic loss.

Identifies information that is critical for successful application and understanding of the product.

Labels may be located on or inside the device to alert people that dangerous

voltages may be present.

NOTICE

CAUTION

CccWARNING

WARNING

NOTICE

SHOCK HAZARD

CccWARNING

WARNING

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 1

including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in

writing by InstruTech, Inc.

Printed in the United States of America

Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA

Conflat® is a registered trademark of Varian, Inc. / Agilent Technologies, Lexington, MA

Teflon® is a registered trademark of E.I. du Pont de Nemours and Company, Wilmington, DE

Swagelok®, Cajon®, VCR® are registered trademarks of the Swagelok Company, Solon, OH.

Hyperterminal® is a registered trademark of Hilgraeve, Inc., Monroe, MI

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 2

Table of Contents

Introduction / General Information....................................................................................................................41

1.1 Description .................................................................................................................................................4

1.2 Specifications .............................................................................................................................................4

1.3 Dimensions.................................................................................................................................................5

1.4 Part Numbers .............................................................................................................................................5

1.5 Options & Accessories................................................................................................................................5

Important Safety Information.............................................................................................................................62

2.1 Safety Precautions - General......................................................................................................................6

2.2 Safety Precautions - Service and operation ...............................................................................................7

2.3 Electrical Conditions...................................................................................................................................8

2.3.1 Proper Equipment Grounding ............................................................................................................8

2.3.2 Electrical Interface and Control..........................................................................................................8

2.4 Overpressure and use with hazardous gases.............................................................................................9

2.5 Gases other than Nitrogen / air .................................................................................................................9

Installation ........................................................................................................................................................10

3.1 Mechanical Installation ............................................................................................................................10

3.2 Electrical Installation ................................................................................................................................11

3.2.1 Grounding.........................................................................................................................................11

3.2.2 Connectors .......................................................................................................................................11

3.2.2.1 Analog Connector pin-out............................................................................................................12

3.2.2.2 RS485 COM / Relay Connector pin-out........................................................................................12

Bakeout.............................................................................................................................................................144

Setup and Operation.........................................................................................................................................155

5.1 Applying power ........................................................................................................................................15

5.2 Emission Current ......................................................................................................................................15

5.3 Overpressure shut down..........................................................................................................................16

5.4 Degas........................................................................................................................................................16

5.5 Filament Material Selection / Venting the Chamber ...............................................................................17

5.6 User Interface Basics................................................................................................................................18

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 3

5.7 Factory-Set Default Parameters...............................................................................................................19

5.8 Programming............................................................................................................................................20

5.8.1 SETUP DISP .......................................................................................................................................21

5.8.2 SETUP UNIT ......................................................................................................................................22

5.8.3 SETUP IG...........................................................................................................................................25

5.8.4 SETUP COMMS .................................................................................................................................27

5.8.5 SERVICE MENU .................................................................................................................................27

5.9 Activating the sensor................................................................................................................................28

Using the gauge with different gases ...............................................................................................................296

Analog Output...................................................................................................................................................307

RS485 serial communications ...........................................................................................................................318

8.1 Device Specific Serial Communication Info..............................................................................................31

8.2 RS485 Command Protocol Summary .......................................................................................................32

Service...............................................................................................................................................................359

9.1 Calibration................................................................................................................................................35

9.2 Troubleshooting - Operation....................................................................................................................35

9.3 Troubleshooting - Error Messages ...........................................................................................................36

9.4 Troubleshooting - Filaments F1 or F2 open .............................................................................................37

9.5 R & D (Research) Diagnostic Display ........................................................................................................38

9.6 Maintenance ............................................................................................................................................40

9.7 Contamination..........................................................................................................................................41

9.8 Sensor Replacement.................................................................................................................................42

Factory Service and Support .............................................................................................................................4310

Warranty ...........................................................................................................................................................4311

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 4

Introduction / General Information1

1.1 Description

A hot cathode ionization gauge (IG) measures vacuum pressure by ionizing gas atoms and molecules inside the

vacuum region of the gauge transducer and measuring the quantity of ions produced. The measurement of the

resulting ion current is directly proportional to the density of gas inside the gauge transducer therefore

proportional to the pressure. As pressure inside the vacuum system drops, there are fewer ions created and

therefore ion current measured is lower translating to a lower pressure reading.

The InstruTech® IGM401 Hornet™ module provides the basic signal conditioning required to turn a hot cathode

ionization vacuum gauge into a complete measuring instrument. The module provides a log-linear analog

output, RS485 serial communications, and one setpoint relay. In addition, a built-in display provides a

convenient user interface for setup and operation of the vacuum gauge. The measurement range for the

IGM401 hot cathode ionization gauge is 1 x 10-9 to 5 x 10-2 Torr.

1.2 Specifications

measurement range

1 x 10-9 to 5 x 10-2 Torr / 1.3 x 10-9 to 6.7 x 10-2 mbar / 1.3 x 10-7 to 6.7 Pa

accuracy - N2 (typical)

1 x 10-8 to 5 x 10-2 Torr; ± 15% of reading

repeatability - (typical)

± 5% of reading

display

OLED graphical display, 3 digits plus 2 digits exponent, user-selectable Torr, mbar, or Pa

materials exposed to gases

dual filaments: yttria coated iridium or optional tungsten

Ion collector: tungsten Grid: tantalum Others: 316/304 SS, glass, nickel

sensitivity

factory pre-set. Also user adjustable between 2 to 99 using the display

x-ray limit

< 5 x 10-10 Torr, < 6.7 x 10-10 mbar, < 6.7 x 10-8 Pa

emission current

100 µA, 4 mA, or automatic switching between 100 µA and 4 mA

degas

3 W, electron bombardment

overpressure protection

gauge turns off at factory default setting of 5 x 10-2 Torr

internal gauge volume

1.0 in3 (16.4 cm3 )

temperature

operating; 0 to + 40 oC storage; -40 to + 70 oC

bakeout temperature

200 oC (sensor only - electronics removed)

humidity

0 to 95% Relative Humidity, non-condensing

weight

0.6 lb. (0.27 kg) with NW25 KF flange

housing (electronics)

aluminum extrusion

mounting orientation

any

altitude

operating; 8,200 ft. (2,500 m) max storage; 41,000 ft. (12,500 m) max

serial communications

RS485 - ASCII protocol; minimum command interval: 50 ms

analog output

log-linear 0 to 9 Vdc, 1 V/decade

setpoint relay

one single-pole, double-throw (SPDT), 1A at 30 Vdc resistive, or ac non-inductive

status outputs

degas & filament on/off status are determined by display messages,

via open collector transistor or RS485 communication

input signal

degas and filament on/off & emission current are set by continuity to ground

using digital inputs, RS485 or manually using front panel push buttons

filament selection

filament 1 or 2 selectable via front panel push buttons or RS485 commands

input power

20 to 28 Vdc, 30 W protected against power reversal and transient over-voltages

connectors

9-pin D-sub male for analog and 9-pin D-sub female for RS485

CE compliance

EMC Directive 2004/108/EC, EN61326-1, EN55011

Low Voltage Directive 2006/95/EC, EN61010-1

environmental

RoHS compliant

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 5

1.3 Dimensions

fitting

dimension A

NW16KF

1.45 in. (37mm)

NW25KF

1.45 in. (37mm)

NW40KF

1.45 in. (37mm)

1 1/3 in. Mini CF

1.85 in. (47 mm)

2 3/4 in. Conflat®

1.70 in. (43 mm)

3/4 in. Tube

2.16 in. (55 mm)

1/2 in. VCR

2.58 in. (65 mm)

1.4 Part Numbers

IGM401 Fittings / Flanges

With Yttria

Filaments

With Tungsten

Filaments

Replacement

Sensor - Yttria

Replacement

Sensor - Tungsten

NW16KF

IGM401YBD

IGM401TBD

IG4YB

IG4TB

NW25KF

IGM401YCD

IGM401TCD

IG4YC

IG4TC

NW40KF

IGM401YDD

IGM401TDD

IG4YD

IG4TD

1 1/3 in. Mini-CF/NW16CF Mini-Conflat®

IGM401YED

IGM401TED

IG4YE

IG4TE

2 3/4 in. CF / NW35CF Conflat®

IGM401YFD

IGM401TFD

IG4YF

IG4TF

3/4 in. Tube (3/4 in. O.D. O-ring compression)

IGM401YAD

IGM401TAD

IG4YA

IG4TA

1/2 in. Cajon® 8VCR® female

IGM401YHD

IGM401THD

IG4YH

IG4TH

1.5 Options & Accessories

PS501-A

Compatibility: Powers the IGM401 Hornet™

vacuum gauge module

Power Input: 100 - 240 Vac

Power Plug: North American 115 Vac

Output: 24 Vdc @ 2.5 A (60 W)

Connector: 9-pin D-sub female to mate with and power the

IGM401 module

Cable length: 6 ft. (2 m)

Note: 9-pin D-sub connector backshell can be opened to

enable connections to signals and relays

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 6

Important Safety Information2

InstruTech has designed and tested this product to provide safe and reliable service, provided it is installed and

operated within the strict safety guidelines provided in this manual.Please read and follow all warnings and

instructions.

To avoid serious injury or death, follow the safety information in this document. Failure to comply with these

safety procedures could result in serious bodily harm, including death, and or property damage.

Failure to comply with these warnings violates the safety standards of installation and intended use of this

instrument. InstruTech, Inc. disclaims all liability for the customer’s failure to comply with these instructions.

Although every attempt has been made to consider most possible installations, InstruTech cannot anticipate

every contingency that arises from various installations, operation, or maintenance of the module. If you have

any questions about the safe installation and use of this product, please contact InstruTech.

This device meets FCC part 15 requirements for an unintentional radiator, class A.

2.1 Safety Precautions - General

Hazardous voltages are present with this product during normal operation. The product should never be

operated with the covers removed unless equivalent protection of the operator from accidental contact with

hazardous internal voltages is provided.

WARNING! There are no operator serviceable parts or adjustments inside the product enclosure; refer

servicing to service trained personnel.

Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained

personnel. Return the product to an InstruTech qualified service and repair center to ensure that all safety

features are maintained. Do not use this product if unauthorized modifications have been made.

WARNING! Source power must be removed from the product prior to performing any servicing.

After servicing this product, ensure that all safety checks are made by a qualified service person. When

replacement parts are required, ensure that the parts are specified by InstruTech, Inc. Substitutions of non-

qualified parts may result in fire, electric shock or other hazards. Use of unauthorized parts or modifications

made to this product will void the warranty.

To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. These products are

not waterproof and careful attention must be paid to not spill any type of liquid onto these products. Do not

use these products if they have been damaged. Immediately contact InstruTech, Inc. to arrange return of the

product if it is damaged.

WARNING

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 7

Due to the possibility of corrosion when used in certain environmental conditions, it is possible that the

product’s safety could be compromised over time. It is important that the product be periodically inspected for

sound electrical connections and equipment grounding. Do not use if the equipment grounding or electrical

insulation has been compromised.

2.2 Safety Precautions - Service and operation

Ensure the IGM401 is properly connected to earth ground.

Do not turn on filaments and try to activate the sensor when pressure exceeds 1.00 x 10-3 Torr if the device is

operating at the 4 mA emission current setting.

Do not turn on the filaments and try to activate the sensor when pressure exceeds 5.00 x 10-2 Torr if the device is

operating at the 100 µA emission current setting.

Ensure vacuum level is at or less than 5.00 x 10-5 Torr before attempting to initiate degas.

WARNING! The power supply used in the IGM401 hot cathode gauge module is subject to high voltages

which could cause severe injury or death. In order to prevent electric shock and bodily harm, the user should

wait 5 minutes after power is removed before touching the IGM401 power supply components.

WARNING! When the IGM401 is turned on, 180 V is present at the power supply and other components

such as the ion gauge and the cable. Furthermore, voltages as high as 350 V are present during degas. DO NOT

operate the IGM401 with the IGM401 enclosure removed. Contact with exposed electrical circuits in the

IGM401 could result in death or serious injury.

Do not use another gauge to automatically turn off the ion gauge when the ion gauge filament

in use is constructed of tungsten (yttria coated filament is ok). The response time of other gauges may not

allow for timely turn off of the tungsten filament leading to filament damage. Always turn off the IG filament

manually before pressure is to rise above 1.00 x 10-3 Torr.

When using yttria coated filaments, it is highly recommended to periodically alternate operating Filaments 1

and 2. An inactive filament not operating for an extended length of time may result in that filament failing to

establish emission current when it is eventually used. This will be more problematic in dirty applications.

Use an appropriate power source of 20 to 28 Vdc, 30 W min. (InstruTech PS501 power supply is rated 60 W).

Turn off power to the unit before attempting to service the module. Turn off power to the unit before

detaching the electronics from the sensor for sensor replacement or bake-out purposes.

Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to

this instruction manual.

NOTICE

Instruction Manual IGM401 Hornet

InstruTech, Inc. Page 8

Do not use if the unit has been dropped or the enclosure has been damaged. Contact InstruTech for return

authorization and instructions for returning the product to InstruTech for evaluation.

Use yttria coated filaments with air and inert gases such as N2, argon, etc. Optional tungsten filaments are

available for use with gases not compatible with yttria filaments.

The most common cause of all vacuum gauge failures is contamination of the sensor. Noisy or erratic readings

and total gauge failure are possible indications of gauge contamination. Contamination can generally be

characterized as either:

A) A physical or chemical reaction of process gases with the sensor element. A different gauge may be

considered if neither yttria coated nor tungsten filament sensor materials are compatible with your

application.

B) An accumulation of material on the sensor element. In this case, performing the degas function of the

instrument may resolve the issue.

2.3 Electrical Conditions

WARNING! When high voltage is present in any vacuum system, a life threatening electrical shock hazard

may exist unless all exposed electrical conductors are maintained at earth ground potential. This applies to all

products that come in contact with the gas contained in vacuum chambers. An electrical discharge within a

gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity. A

person could be seriously injured or killed by coming in contact with an exposed, ungrounded electrical

conductor at high voltage potential. This condition applies to all products that may come in contact with the gas

inside the vacuum chamber (vacuum/pressure containment vessel).

2.3.1 Proper Equipment Grounding

WARNING! Hazardous voltages that could seriously injure or cause death are present in many vacuum

processes. Verify that the vacuum connection port on which the ion gauge is mounted is electrically grounded.

Consult a qualified Electrician if you are in doubt about your equipment grounding. Proper grounding of your

equipment is essential for safety as well as intended operation of the equipment. The vacuum gauge transducer

and enclosure of any control module must be connected directly to a good quality equipment earthing

conductor. Use a ground lug on the vacuum connection flange of the pressure measurement device if

necessary.

WARNING! In order to protect personnel from electric shock and bodily harm, shield all conductors

which are subject to potential high voltage electrical discharges in or around the vacuum system.

2.3.2 Electrical Interface and Control

It is the user’s responsibility to ensure that the electrical signals from this product and any connections made to

external devices, for example, relays and solenoids, are used in a safe manner. Always double check the system

set-up before using any signals to automate your process. Perform a hazardous operation analysis of your

Questo manuale è adatto per i seguenti modelli

Indice

Altri manuali Instrutech Unità di controllo

Instrutech

Instrutech CVM211 Manuale utente

Instrutech

Instrutech CDM900 Micro Bee Manuale utente

Manuali Unità di controllo popolari di altre marche

Festo

Festo Compact Performance CP-FB6-E Manuale elenco delle parti

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Manuale utente

JS Automation

JS Automation MPC3034A Manuale utente

JAUDT

JAUDT SW GII 6406 Series Guida rapida

Spektrum

Spektrum Air Module System Manuale utente

BOC Edwards

BOC Edwards Q Series Manuale utente

KHADAS

KHADAS BT Magic Manuale utente

Etherma

Etherma eNEXHO-IL Manuale utente

PMFoundations

PMFoundations Attenuverter Manuale utente

GEA

GEA VARIVENT Manuale utente

Walther Systemtechnik

Walther Systemtechnik VMS-05 Manuale utente

Altronix

Altronix LINQ8PD Istruzioni per il montaggio

Eaton

Eaton Powerware Series Manuale utente

WAGO

WAGO 750-407/040-000 Manuale utente

Sony

Sony CCU-590 Manuale utente

Graco

Graco 25D614 Manuale utente

Task Force Tips

Task Force Tips YE-RF-900 Manuale di programmazione

Shini

Shini SPV-U Series Manuale utente