Pfeiffer Vacuum FullRange PTR 91 Manuale utente

BG 5041 BEN / B (2016-07)

FullRan

RATING

ge® Gauge

NSTRUC

IONS

anslation of the original instru

tions

Product Id

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Validity

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PT T03 148

PT T03 158

PT T03 358

The part num

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DN 25 ISO-KF

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BG 5041 BEN / B (2016-07) 3

Intended Use

The FullRange® Gauges PTR 91 have been designed for

vacuum measurement of gases in the pressure range of

1×10-9 … 1000 mbar.

They must not be used for measuring flammable or combustible

gases in mixtures containing oxidants (e.g. atmospheric oxygen)

within the explosion range.

They are intended for operation in connection with a Pfeiffer

Vacuum measurement unit for gauges or with another suitable

controller.

Functional Principle

The gauge consists of two separate measuring systems (the

Pirani and the cold cathode system according to the inverted

magnetron principle). They are combined in such a way that for

the user, they behave like one measuring system.

Over the whole measurement range, the measuring signal is

output as a logarithm of the pressure.

Scope of Delivery

1× gauge

1× pin for adjusting settings via buttons

1× Operating Instructions German

1× Operating Instructions English

Trademark

FullRange®Pfeiffer Vacuum GmbH

4BG 5041 BEN / B (2016-07)

Contents

Product Identification 2

Validity 2

Intended Use 3

Functional Principle 3

Scope of Delivery 3

Trademark 3

1Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2Technische Daten 8

2.1 Output Signal vs. Pressure 12

2.2 Gas Type Dependence PTR 91 13

3Installation 16

3.1 Vacuum Connection 16

3.2 Power Connection 20

4Operation 22

4.1 Status Indication 22

4.2 Put Gauge Into Operation 23

4.3 Gas Type Dependence 23

4.4 Ignition Delay 24

4.7 Contamination 24

5Deinstallation 26

6Maintenance, Repair 28

6.1 Adjusting the Gauge 28

6.2 Cleaning the Gauge / Replacing Parts 30

6.2.1 Troubleshooting (measuring chamber) 31

6.2.2 Replacing Ionization Chamber and Ignition Aid 33

6.2.3 Replacing Measuring Chamber 35

6.3 Troubleshooting 37

7Returning the Product 39

BG 5041 BEN / B (2016-07) 5

8Disposal 40

9Options 41

10 Accessories 41

11 Spare Parts 42

11.1 Ignition Aid 42

11.2 Ionization chamber 42

11.3 Measuring Chamber Cpl. (Spare Sensor) 43

ETL Certification 44

EU Declaration of Conformity 45

For cross-references within this document, the symbol (→XY)

is used.

6BG 5041 BEN / B (2016-07)

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ-

mental damage.

Caution

Information on correct handling or use. Disregard can lead to

malfunctions or minor equipment damage.

Consultation of operating manual required (symbol

printed on the product nameplate)

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by

persons who have suitable technical training and the neces-

sary experience or who have been instructed by the end-user

of the product.

BG 5041 BEN / B (2016-07) 7

1.3 General Safety Instructions

•Adhere to the applicable regulations and take the necessary

precautions for the process media used.

Consider possible reactions with the product materials.

Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

•Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the

safety instructions in this document.

•Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations

and take the necessary precautions when handling contamin-

ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty becomes

null and void if the end-user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.)

on the product

•use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the

process media used.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. ionization chamber, ignition aid, Pirani

filament), are not covered by the warranty.

8BG 5041 BEN / B (2016-07)

2 Technical Data

Measurement range (air, N2) 1×10-9 … 1000 mbar

Accuracy (N2)

1×10-8 … 100 mbar

100 … 1000 mbar

30% of reading

50% of reading

Repeatability (N2)

1×10-8 … 100 mbar

5% of reading

Gas type dependence →13

Voltage range (analog output) 0 … +10.5 V

Measurement range +1.397 … +8.6 V (dc)

Voltage vs. pressure 0.6 V/decade, logarithmic

Error signal +9.5 … +10.5 V (dc)

Output impedance 2 × 4.7 Ω, short-circuit proof

Load impedance ≥10 kΩ, short-circuit proof

Step response time

>1×10-6 mbar

1×10-6 … 1×10-8 mbar

pressure dependent

<100 ms

≈1 s

Gauge identification 85 kΩreferenced to supply

common

Status signal (digital output)

Current rating 100 mA

High voltage is ON +14.5 … +30 V (dc)

(depending on supply voltage)

High voltage is OFF 0 V (dc)

BG 5041 BEN / B (2016-07) 9

Supply

DANGER

The gauge may only be connected to power sup-

plies, instruments, or control devices that conform

to the requirements of a grounded protective extra-

low voltage (PELV) and limited power source

(LPS), Class 2. The connection to the gauge has to

be fused. 1)

Supply voltage

at the gauge 2)

Class 2 / LPS

+14.5 … +30 V (dc)

Ripple ≤1 V

Power consumption ≤2 W

Fuse to be connected 1) ≤1 AT

High voltage in the measuring chamber

Ignition voltage

Operating voltage

≤4.5 kV

≤3.3 kV

Current in the measuring

chamber

High current

Electrical connection FCC 68, 8-pin

Sensor cable 8-pin, shielded

Cable length ≤50 m (0.14 mm2/conductor)

Grounding concept →"Power Connection"

Vacuum connection – signal

common

connected via 10 kΩ

(potential difference ≤16 V)

Supply common – signal

common

conducted separately;

differential measurement is

recommended

1) Pfeiffer Vacuum controllers fulfill this requirement.

2) The minimum voltage of the power supply unit must be increased

proportionally to the length of the sensor cable.

10 BG 5041 BEN / B (2016-07)

Materials exposed to vacuum

Vacuum connection

Measuring chamber

stainless steel (1.4435)

Pirani filament W

Feedthrough

Isolation

Ring

Anode

glass, ceramic (Al2O3)

stainless steel (1.4435)

molybdenum

Ni alloy

Ionization chamber stainless steel (1.4301, 1.4016)

Ignition aid stainless steel (1.4310)

Internal volume

DN 25 ISO-KF

DN 40 ISO-KF

DN 40 CF-F

≈19.9 cm3

≈20.9 cm3

≈25.2 cm3

Permissible pressure

(absolute)

10 bar, limited to inert gases

<55 °C

Bursting pressure (absolute) >13 bar

Permissible temperatures

Operation

Pirani filament (PTR 91)

Bakeout

Storage

+5 °C … +55 °C

120 °C

≤150 °C 3)

–40 °C … +70 °C

Relative humidity for 30 days a

year

1×10-8 … 1×10-2 mbar

1×10-7 … 1×10-2 mbar

≤70% (non-condensing)

≤95% (non-condensing)

Mounting orientation any

Use indoors only, altitude up to

6000 m NN

Degree of protection IP 40

3) Without electronics unit.

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