Inficon Porter CDG020D Manuale utente
tina80e1 (2012-06) 1
Capacitance Diaphragm Gauge
Porter™ CDG020D
Operating Manual
Incl. EC Declaration of Conformity
2tina80e1 (2012-06)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V W
tina80e1 (2012-06) 3
Validity
This document applies to products of the CDG020D series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. customized measurement range) as defined in the
corresponding ordering information.
5 Torr (x 133 Pa; x 1.3 mbar)
6 mbar (x 100 Pa)
1 DN 16 ISO-KF
C 4VCR male
D 4VCR female
E 8VCR female
0 FCC
1 D-Sub, 9-pin
A Binder M12, 8-pin
3CAx-xxx-0x00
9 10
A 20
B 50
C 100
D 200
E 500
F 1000 (Torr only)
G 1100 (mbar only)
Flange
Unit
Measurement range
(F.S.)
3 1%
4 0.5%
Accuracy
Receptacle
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with D-Sub receptacle and the
DN 16 ISO-KF vacuum connection. They apply to other gauges
by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
4tina80e1 (2012-06)
Intended Use
The Capacitance Diaphragm Gauges of the CDG020D series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (→3).
The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller (VGC series) or another appropriate
measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro-
nics which convert the capacitance into a DC voltage output sig-
nal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademarks
Porter™ INFICON GmbH
VCR®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2,
7536915 B2
tina80e1 (2012-06) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Function 4
Trademarks 4
Patents 4
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technical Data 8
3Installation 13
3.1 Vacuum Connection 13
3.2 Power Connection 16
3.2.1 FCC68, 8-pin Connector 17
3.2.2 D-Sub, 9-pin Connector 18
3.2.3 Binder M12, 8-pin 19
4Operation 20
4.2 Zeroing the Gauge 20
4.2.1 Zero Adjustment 20
5Deinstallation 22
6Maintenance, Repair 23
7Returning the Product 24
8Disposal 25
Further Information 26
ETL Certification 26
EC Declaration of Conformity 27
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).
6tina80e1 (2012-06)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.
tina80e1 (2012-06) 7
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
8tina80e1 (2012-06)
2 Technical Data
Measurement range →"Validity"
Accuracy 1)
3CA3-xxx-xxxx
3CA4-xxx-xxxx
≤1% of reading
≤0.5% of reading
Temperature effect on zero 0.02% F.S./ °C
Temperature effect on span 0.02% of reading/ °C
Resolution 0.05% F.S.
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range –0.2 … +10.24 V
Measuring range 0 … +10 V
Relationship voltage-pressure linear
Output impedance 10 Ω(short-circuit proof)
Loaded impedance >10 kΩ
Response time 100 ms
Gauge identification Resistance 13.2 kΩrefer-
enced to supply common
1) Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
tina80e1 (2012-06) 9
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused 2).
Supply voltage
at the gauge
ripple
+13 … +32 VDC
Class 2 / LPS
≤50 mVpp
Current consumption <20 mA
Power consumption ≤0.3 W
Fuse required 2) 1 AT (slow), automatic reset
(Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection
3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx
FCC68/RJ45, 8-pin, socket
D-Sub, 9-pin, male
Binder M12, 8-pin, male
Sensor cable
3CAx-xxx-0xxx
3CAx-xxx-1xxx
3CAx-xxx-Axxx
8-pin plus shielding
9-pin plus shielding
8-pin plus shielding
Cable length ≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required.
Grounding concept
Vacuum flange - signal common →"Power Connection"
Supply common - signal common conducted separately; for dif-
ferential measurement (10 Ω)
2) INFICON controllers fulfill this requirement.
10 tina80e1 (2012-06)
Materials exposed to vacuum
Flange, tube
Sensor, feedthrough
stainless steel AISI 316L
ceramics (Al2O3≥99.5%)
Internal volume
DN 16 ISO-KF
4 VCR male
4 VCR female
8 VCR female
≤3.7 cm3
≤6.1 cm3
≤5.6 cm3
≤5.1 cm3
Admissible pressure (absolute)
≥500 Torr/mbar (F.S.)
50 … 200 Torr/mbar (F.S.)
10 … 30 Torr/mbar (F.S.)
4 bar
3 bar
2 bar
Bursting pressure (absolute) 6 bar
Temperature compensated range +10 °C … +50 °C
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–20 °C … +85 °C
0 °C … +70 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
4000 m NN
Degree of protection IP 40
Indice
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